二手 NOVELLUS Inova XT #9393590 待售
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ID: 9393590
晶圆大小: 12"
PVD System, 12"
BROOKS MAG7 Robot
NOVELLUS MC3 Module controller
PFEIFFER Turbo and controller
(3) CTI / HILEX / BROOKS Cryo pumps
(4) BROOKS FOUP Cassette wafer loaders
VAT Throttle valve and controller
ADVANCED ENERGY PDX 5000 RF Generator
ADVANCED ENERGY RFG 5500 RF Generator
MKS RF Generator
PVD Chamber
Preclean chamber
Right degas chamber
Left degas chamber
Sputter
Transfer module with dual blade
Dual brooks robot transfer
DC power supply
Qty / Part number / Make / Model / Description
(1) / PA07060 / TREK / - / Power supply
(2) / DCS80-13E / SORENSEN / - / DC Power supplies: 0-80 V, 0-13 A / 1000 W
(1) / CPW2870B10 / CPI / - / 27-251231-00 DC Sputtering power supply
(1) / 3155051-015A / ADVANCED ENERGY / RFG 5500 / M/N: 3155051-015A RF Generator
(1) / 684-1 / TREK / - / NOVELLUS R19-137359-00, 416092, ESC Power supply: 6 Phase
(1) / RPG-50 / MKS / ENI / RPG-50A / Bipolar pulsed DC Generator
(1) / 27-156757-00 / ADVANCED ENERGY / PDX 5000 / RF Generator, M/N: 3156043-204
(1) / 03-12785-00 / NOVELLUS / - / 02-128733-00 PVD Assy SIOC Controller
(1) / 02-288084-00 / NOVELLUS / - / WTS-HV Sesioc 0, Rev.A
(1) / 02-271697-00 / NOVELLUS / - / WTS-HV Sesioc 3 IXT, Rev.A
(1) / 02-266875-00 / NOVELLUS / - / 02-266875-00 4 IXT WTS HV 4
(1) / 02-253704-00 / NOVELLUS / - / ASSY MC3E Controller with Ethernet 75-261867-00
(1) / 02-257935-00 / NOVELLUS / - / MC3E Platform controller with Ethernet 79-257795-00
(2) / 651D-16202 / MKS / - / Throttle valve controllers
(1) / TMH 071 P / PFEIFFER / BALZERS / - / Turbomolecular
(1) / 02112-BA24-APN1/0022 / VAT / - / Rectangular gate valve pneumatic actuator A-290319
(1) / 02112-BA24-APN1/0017 / VAT / - / Rectangular gate valve pneumatic actuator A-276468
(1) / 02112-BA24-APN1/0018 / VAT / - / Rectangular gate valve pneumatic actuator A-276468
(1) / 02112-BA24-APN1/0002 / VAT / - / Rectangular gate valve pneumatic actuator A-335571
(1) / 02112-BA24-APN1/0008 / VAT / - / Rectangular gate valve pneumatic actuator A-276468
(1) / 02112-BA24-APN1/0016 / VAT / - / Rectangular gate valve pneumatic actuator A-276468
(1) / 02112-BA24-APN1/0024 / VAT / - / Rectangular gate valve pneumatic actuator A-290319
(1) / 02112-BA24-APN1/0019 / VAT / - / Rectangular gate valve pneumatic actuator A-288644
(1) / 02112-BA24-APN1/0004 / VAT / - / Rectangular gate valve pneumatic actuator A-276468
(1) / 02112-BA24-APN1/0002 / VAT / - / Rectangular gate valve pneumatic actuator A-276468
(1) / 02112-BA24-APN1/0434 / VAT / - / Rectangular gate valve pneumatic actuator A-529666
(1) / 02112-BA24-APN1/0023 / VAT / - / Rectangular gate valve pneumatic actuator A-290319
(1) / - / PFEIFFER / TMU521P / PM P03 120H, PM P03 120 C with TC750-E74, PM C01 712, Turbo pump
(1) / - / PFEIFFER / TMU521P / PM P03 855 with TC750 Special DS15, PM C01 711, Turbo pump
(1) / - / PFEIFFER / TMH 071 P/ Turbomolecular pump with TC750-E74, PM C01 712
(1) / 8116079G001 / CTI-CRYOGENICS / - / Cryo pump, HELIX Control sputtering
(1) / 14036-PE24-0004 / VAT / - / Gate valve 14036-PE24-0004
(1) / 003-1600-25 / BROOKS / Magmatran 7 / Wafer transfer robot
(1) / 002-7090-03 / BROOKS / - / Wafer transfer robot
(1) / - / PFEIFFER / TMU 1001 P / Turbo pump PM P02 875, DN 200CF-F, 3P With TC-750 SPECIAL DS15 PMC01 711
(1) 27-265775-00 / NOVELLUS / AE Mercury 3013 Match, 3150274-009.
NOVELLUS Inova XT是为下一代器件制造而设计的多室半导体加工设备。该系统配有三个化学隔离室，每个室都有不同的工艺模块，可以配置为满足任何应用的具体要求。它具有出色的热处理、蚀刻、沉积和清洁应用，所有这些都具有最低的交叉污染风险。Inova XT的第一室专门用于沉积过程。这包括等离子增强化学气相沉积（PECVD）、原子层沉积（ALD）或物理气相沉积（PVD）。该腔室还能够使用化学Etch™或喷雾工艺进行干蚀刻。它也与各种源材料兼容，其柔韧性允许它用于介电、金属、屏障和三维（3D）沉积等应用。第二室和第三室都用于蚀刻过程。第二室专门设计用于浅沟隔离和硅局部氧化（STI/LOCOS）蚀刻工艺。NOVELLUS Inova XT的设计旨在通过广泛的工艺气体、可变射频输出和直接向下的晶圆传感来精确控制蚀刻深度和特征传输,以实现最小的粒子生成。第三室还配备了利用电离团簇光束（ICB）和反应性离子蚀刻（RIE）进行干蚀刻的工艺。它提供多种金属、电介质和其他材料的精密蚀刻工艺。Inova XT以其先进的工艺工程软件提供高精度的工艺控制。这个自动化单元可以实时跟踪气体流动、温度、压力、功率水平和其他参数。还配备了快速周转时间、稳健控制、错误监控、内置安全报警、自动关机等稳定安全功能，确保了高品质的终端产品。总体而言，NOVELLUS Inova XT是一款功能强大且可靠的工具，专为先进的半导体处理应用而打造。其多室架构和广泛的沉积和蚀刻能力使其成为各种应用的理想选择。其先进的工艺软件和安全功能使其成为任何希望获得最大效果的用户的可靠且经济的解决方桉。
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