二手 NOVELLUS Inova #9178318 待售
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ID: 9178318
晶圆大小: 8"
优质的: 2008
PVD System, 8"
Sputter deposition
Cu Seed
Main system:
Mainframe
Transfer
Load
Aligner
Cool
Degas chamber
Loadlock
(2) LPT2000 SMIF Systems
Handler system:
3-Axis trust control ConMag II robot assy
With ceramic blade (Transfer robot)
AWC BROOKS Mag 7 robot assy
With ceramic end effector (FE Robot)
Process chambers:
Ta
Cu
DMC
Hardware:
Main power distribution
Transformer
AC Control / Generator rack
(4) 9600 Cryo compressors
Mydax chiller
Polycold
Affinity chiller
(4) Dry pumps
Missing parts:
DMC LF Generator
DMC Turbo pump
Cu Chamber water box
Cu Chamber SIOC
Ta Chamber SIOC
Degas EV block
Ta EV Block
PVD Chamber quartz lamp
Loader ion gauge
Aligner lamp
HF Match
Degas table
CIP & Upgrades:
Ta Chamber process kit: SST Process kit
Ta HCM Target: Dual coil Ta with short lip
Damaclean dome shield: Single piece
HCM Cu Target: 3/4" HCM Cu Thickwall target
ESC Chuck: Rev2
Degas stn leak chk port (Front end)
Degas flexline
PVD Chamber flexline (Ta/Cu)
PVD Chamber HCM (Ta/Cu): Metal strain relief
PVD Chamber RGA port
Loadlock ion gauge port extension
PVD Chamber condensation control (Ta/Cu)
Dual loadlocks:
Chord mapping
Cryo baffle plate
Cryo pumps: CTI CRYOGENIC 8" F
Cryo pumps compressor: HELIX CTI 9600
Convectron gauge: GRANVILLE PHILIPS 275821 Mini-convectron
Ion gauge: GRANVILLE PHILIPS 354001-YG-T Micro-ion mod
LL Short light curtain
PEC Cassette nests
Gate valve shield assy:
VAT Rectangular gate valve MONOVAT classic
With gate compl (Gate aluminum with viton seal)
Wafer handler / Frontend CHM:
Robot arm: Ceramic
Cryo pumps: CTI CRYOGENIC 8" F & 4"
Cryo pumps compressor: HELIX CTI 9600
Convectron gauge: GRANVILLE PHILIPS 275821 Mini-convectron
Ion gauge: GRANVILLE PHILIPS 354001-YG-T Micro-ion mod
Degas station:
Degas station: 4pt Mechanical clamp
AERA FC-7800CD MFC 4 argon: 1.0/20
Cool station:
Standard
AERA FC-7800CD MFC 3 Argon: 1.0/100
Stage O-ring groove size: 0.121-0.124"
Transfer module:
Cryo pump: CTI CRYOGENIC 8" F
Cryo pumps compressor: HELIX CTI 9600
Robot: AWC BROOKS Mag 7
Robot end effector: Ceramic
Lid cover: Clear lid
Convectron gauge: GRANVILLE PHILIPS 275821 Mini-convectron
Ion gauge: GRANVILLE PHILIPS 354001-YG-T Micro-ion mod
Gate valve shield assy:
VAT Rectangular gate valve MONOVAT classic
With gate compl (Gate aluminum with viton seal)
Damaclean module:
Cylinder source: Ceramic
Gas box: (3) Gases
RF p/s: ADVANCED ENERGY RF 10s & LF 10WC
Plasma shield: Stationary
Pump: Varian V 701 VT
Stage: Non-ESC
Shield kit: Standard DMC non ESC
Convectron gauge: GRANVILLE PHILIPS 275821 Mini-convectron
Ion gauge: GRANVILLE PHILIPS 354001-YG-T Micro-ion mod
Manometer gauge: MKS Inst 627B.1TBD1B 100mT/0.1
AERA F-7800CD MFC 4 H2: 1.0/50
AERA F-7800CDMFC 1 Ar: 1.0/50
Gate valve shield sssy:
VAT Rectangular gate valve MONOVAT classic
With gate compl (Gate aluminum with viton seal)
Ta(N) Chamber:
Cryo pump: CTI CRYOGENIC 8" F
Cryo pumps compressor: HELIX CTI 9600
Ar MFC
N2 MFC
Convectron gauge: GRANVILLE PHILIPS 275821 Mini-convectron
Ion gauge: GRANVILLE PHILIPS 354001-YG-T Micro-ion mod
Manometer gauge: MKS Inst 627B.1TBD1B 100mT/0.1
Argon BSG manometer gauge: MKS Inst 750B11TCB2GA
AERA FC-7800CD MFC 3 N2: 1.0/200
AERA FC-7800CD MFC 1 Ar: 1.4/100
MKS UPC 1 Ar: 1.0/10
Shield kit:
Shield support ring, RF FF: Ceramic
RF Plug: Ceramic
Gate valve shield kit not installed
Arc sprayed SST:
Assy, anode, HCM
Shield adapter
Deposition shield
ESC Table shield
Weight clamp, RF
Bottom shield
Source:
DC p/s: CPI 36 KW
D-Coil
M-Coil
Source magnet: Array
Top magnet: Rotating
Target: Ta
ESC Power supply: TREK 684-I
Table:
Assy, table, HCM
POLYCOLD N2 Cooling lines: Vacuum-jacketed
MKS UPC
Stage: ESC With active cooling
Heat exchanger for chilled N2 exhaust
Z-Table
RF Ready
Gate valve shield assy:
VAT Rectangular gate valve MONOVAT classic
With gate compl (Gate aluminum with viton seal)
Cu Chamber:
Cryo pump: CTI CRYOGENICS 8" F
Cryo pumps compressor: HELIX CTI 9600
Ar MFC
Convectron gauge: GRANVILLE PHILIPS 275821 Mini-convectron
Ion gauge: GRANVILLE PHILIPS 354001-YG-T Micro-ion mod
Manometer gauge: MKS inst 627B.1TBD1B 100mT/0.1
Argon BSG manometer gauge: MKS inst 750B11TCB2GA
MFC:
AERA FC-7800CD MFC 3 N2: 1.0/200
AERA FC-7800CD MFC 1 Ar: 1.4/100
MKS UPC 1 Ar: 1.0/10
Shield kit:
ESC Clamp: Grit blasted
Assy, anode, HCM: Grit blasted SST
Shield adapter: Grit blasted SST
Gate valve shield kit
Grit blasted, Non RF:
Deposition shield
ESC Table shield
Bottom shield
Source:
DC p/s: CPI 36 KW
D-Coil
M-Coil
Source magnet: Array
Top magnet: Rotating
Target: Cu
ESC Power supply: TREK 684-I
Table:
MYDAX Fluid cooling line: Vacuum-jacketed
MKS UPC
Stage: ESC With active cooling
Z-Table
Gate valve shield assy:
VAT Rectangular gate valve MONOVAT classic
With gate compl (Gate aluminum with viton seal)
Auxiliary subfab equipment:
Cu Chamber chiller: MYDAX 1-VLH7-WB
Ta Chamber chiller: POLYCOLD 152-WC-CE/S2
System DI water chiller: Affinity E series EWA-15DK-GE06CBC0 chiller
Dry pumps: EBARA EV-S20N (High efficiency pump)
Main power distribution: Cutler hammer cabinet C2/Inova
ECR: C2/Inova ECR 208 VAC, (3) racks
2008 vintage.
NOVELLUS Inova是由NOVELLUS Systems Inc开发的最先进的化学气相沉积（CVD）反应堆。这个高度先进的腔室包含许多产品,为半导体制造操作提供了卓越的工艺解决方桉。Inova是一个可扩展的平台,可为当今高级流程节点和设备结构的前端和后端生产提供广泛的流程功能。NOVELLUS Inova具有两种截然不同的CVD解决方桉：Express™和Prime。该Express™是一种单晶片、低真空的CVD解决方桉,非常适合低温工艺,如III-V和CMOS材料层的反向处理,提高了拥有成本。此外，Express能够处理细腻、薄薄的氧化物和氮化物层，通常用于先进晶体管的平面化和定位，有助于降低代价高昂的污染风险。第二种产品Prime是一种多晶片、高真空CVD系统,非常适合用于finFET和FEOL工艺的薄膜。Prime先进的温度控制技术保证了您所有批次的可重复性-最大限度地减少颗粒生成并确保完美的薄膜沉积。除了提供领先的CVD工艺能力外,Inova反应堆还提供业界最先进的现场测量和工艺控制能力。其扫描电子波长色散X射线（SEM-WDX）和光学计量学,具有用户定义的测量参数,能够实时监测和控制所有重要的过程参数。这允许最大限度地优化蚀刻或沉积过程,并确保精确的过程控制精度,这实际上有助于消除临界尺寸（CD）错误。NOVELLUS Inova反应堆还提供先进的自动化和远程监控功能,以实现最大的正常运行时间和过程控制。其直观的用户界面为自动化配方创建和实施提供了一个高效的平台,以简化您的操作。此外,其先进的遥测功能支持远程故障排除和问题解决,有助于最大程度地减少停机时间。总之，Inova是一个市场领先、最先进的反应堆，旨在满足当今纳米级器件结构严格的工艺控制要求。它的功能范围允许用户访问最新的流程功能和高级自动化功能,以实现最大的流程控制和正常运行时间。其先进的现场计量功能以及复杂的自动化和远程监控功能确保了最大的正常运行时间和过程控制准确性。
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