二手 NOVELLUS Sabre XT #9275235 待售
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ID: 9275235
晶圆大小: 8"
优质的: 2001
Electro copper plating system, 8"
Ergo Cassette Loader (ECL)
ART7 Robot
Clamshell cup: POR
PPS Chuck
Hard Disk Drive (HDD) missing
Integrated frame:
(3) Plating modules
3-Phase anode chamber
(3) SRD Modules
Anneal:
(5) Anneal chambers
Temperature: 50°C - 400°C
Forming gas: H2
BROOKS AUTOMATION 4-Axis atmospheric dual-end effector robot
Front end robot: BROOKS AUTOMATION Accutran robot
CUP: Pentium
SECS/GEM: Comparability
System controller
Tool generation: SABRE-XT
(25) Wafers per cassette
Graphic User Interface (GUI)
Signal tower: (3) Colors
Host connection type: RS232 C
Mini-environment: Synetics
Desktop PC
Central Bath Reservoir: 150 liters for (3) Plating modules
Exhaust kit: Top mount
Cassette handler module:
(3) Load port stations
Wafer aligner type: Mechanical center finder
End effector
Wafer release with puff
Magstore 1.7.0 Robot firmware
Mapping type: Through beam
Plating cell configuration: Cell 1 / 2 / 3
Clamshell: Drive unit, 8"
Clamshell cup: 1 A Ceramic Cup
Clamshell cone: 196 mm Phase
Clamshell cylinder: Pressure vacuum cylinder
Anode Type: 3-Phase
Clamshell lift
Additive dosing: NowPack
Bath chemistry: Control algorithm
AE Pulse plating power supply
Post plating cell configuration: Cell 1 / 2 / 3
Edge bead removal
Wafer present sensor mount
Bath module:
(2) Florite totalizer
(3) Dosing pumps
Recirculation pump: Inverter
NESLAB HX-75 A Heat exchanger
2001 vintage.
NOVELLUS® NOVELLUS Sabre XT反应器是一种精密控制的化学气相沉积（CVD）设备,使客户能够在大量材料上进行高产准确的薄膜沉积。该系统是专门为优化半导体制造领域的薄膜沉积而设计的。NOVELLUS SABREXT反应堆提供了许多好处，如拥有成本低、生产率提高、设计灵活性出色以及工艺结果的一致性。该装置具有高度控制的高度精确度，并提供一整套带有单室和双室系统的工艺选项。Sabre XT反应堆的CVD工艺集成了预热、冷却、智能传感等多项功能。预热对于在沉积进行之前正确设置基板温度很重要。冷却功能有助于确保基板在沉积后迅速恢复到所需温度。对过程的智能感应使机器能够准确地检测、识别和控制气流，从而确保薄膜的精确和均匀沉积。该反应器具有独特的滤室设计，有助于最大限度地减少颗粒引入工艺室。交叉室还有助于防止冷凝在抽油烟机中的工艺气体凝结。该工具采用多步骤工艺，针对多种基板的高吞吐量进行了优化。SABREXT资产也有一个先进的等离子体源兼容多种气体处理技术。新型等离子体源支持超高纯度源气体、高节气流量、高源排气压力。这样可以实现更高的沉积速率、更高的功率密度和更低的有效温度。最后,NOVELLUS® NOVELLUS Sabre XT反应器是一种现代化和先进的CVD模型,有助于在半导体制造领域取得更高的产量和一致的结果。设备拥有成本低,生产率更高,设计能力灵活。还配备了预热、冷却、智能传感等先进功能。滤室设计和专用等离子体源使NOVELLUS SABREXT成为可靠的CVD工艺的完整封装。
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