二手 OXFORD INSTRUMENTS Opal #293764744 待售
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ID: 293764744
优质的: 2009
RF/Plasma oxide deposition system
Atomic Layer Deposition (ALD) system
(2) Channels metal organic precursors
Heated table, 8.25"
Diameter circular, 8.25" flat table
Water plasma head
Open-loop vacuum chamber
Heated table and heated sidewalls
Downstream 300 W RF plasma head with isolation valve
Temperature: 80-300ºC
Power supply: 208V, 60Hz, 25A, 3 Phase
2009 vintage.
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