二手 THOMAS SWAN / AIXTRON CCS #293827393 待售
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ID: 293827393
优质的: 2005
MOCVD System
Reactor capacity: 19x2" Substrates
Temperature: 1300 °C
Heating system: 3-zone tungsten heater with SiC-coated graphite susceptor
Process control: 5 optical windows
ED500/2 Clean system
Gas purification
Dual-scrubber system
Pumping capacity: 300 m³/h.
2005 vintage.
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