二手 VEECO / EMCORE D125 #9212026 待售
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ID: 9212026
优质的: 2003
MOCVD System
(2) Chillers
Semi-automatic wafer transfer
Gas delivery system
Flanges constructed of 316L stainless steel
Reactor & gas panel: With exhaust vented steel & polycarbonate cabinet panels
HEPA Filtered wafer loading area
With system cabinet
7-8 Metal organic channels (Switchable from N2 to H2 carrier gas)
3-4 Hydride channels
Standard non-emissivity corrected pyrometer included
Up to 3 2"/1 3" wafers per run capability
(4) SiC Coated wafer carriers: (2) Standard 3 x 2" / (2) Custom configurations
EBARA A70W Process pump
MKS Butterfly reactor exhaust line pressure control valve
With PID control
Turbo molecular pump / Scroll dry pump for load lock
CTC Controller with low noise analog card for T/C channel
MO & Hydride delivery SS lines
Heaters and controls
(5) MO Bath water chillers
AFFINITY / LYTRON / Equivalent heat exchanger
Turbo rotation: 1500 RPM
Safety alarm system
Control system:
Operating system: Windows 7
Personal computer (PC)
With flat panel monitor
Alarms
Routines provide unparalleled control system versatility
Spare parts:
(3) Analog cards
(2) Digital cards
(2) MFC
PCU
Baratron
ATMI CDO 862 Abatement system
Combination scrubber and burn-box
Nitride MOCVD precursors: NH3, H2, SiH4, MOs
Handling maximum D125/D180 gas flows (according to OEM specifications)
Scrubber water: Recirculated in loop
PRAXAIR (3) Bottles ULTRA PURGE ammonia gas cabinet
Internal gas network: ULTRA PURGE Controller
(2) 501b ammonia bottles
Does not include nitrogen purge bottle
Air products AP10, 24" silane gas cabinet
Touch screen controls
(2) SILANE Bottles
Indoor gas distribution panel for hydrogen and nitrogen:
Anodized aluminum: 3 ft. x 4 ft./ Smaller gas panel
Cylinder banks and nitrogen purge: Manifold with (2) hydrogen inlets
(2) Pressure regulators
(3) Check valves
(2) Inline particle filters
(8) Manual valves
High purify 1/4 inch tubing
Tees
Weldments (Orbital welding)
(2) Pressure gauges
Leak checking and certification of leak integrity
Outdoor gas distribution panel for hydrogen with nitrogen purging capability:
36 in x 9 in / Smaller anodized aluminum gas panel
Purging & switching manifolds for (2) six pack cylinders
Manual valves and (2) check valves
UHP 1/4 inch Tubing
Weldments (Orbital welding)
(2) Pressure gauges
Leak checking & certification of leak integrity
System electrical specification:
208 / 220V
50 or 60 Hz
3 φ 150 A per φ
5 Wire with GND
Gas supply specification
Type / Rating / Max flow / Mean flow
Purified H2 / 30-40-100 PSIG / 65 SLM / 30-40 SLM
Purified N2 / 80-100 PSIG / 70 SLM / 20-40 SLM
N2 House feed / 80-100 PSIG / 50 SLM / 25 SLM
CDA/N2 for pneumatics / 80-100 PSIG / 50 SLM / < 15 SLM
NHa / 40-60 PSIG / 30 SLM / -
100 ppm SiH« in UHP H2 / 20-30 PSIG / 22 SLM / -
2003 vintage.
VEECO/EMCORE D125是一种通用反应堆设备,旨在支持先进的工艺开发、学术研究和生产规模的制造作业。VEECO D125集成了常用于异构催化工艺和纳米材料应用的先进热壁技术。反应堆系统经过特别优化,以实现精确的温度、压力和停留时间控制,同时也为各种各样的工艺提供了最高的产量生产率。EMCORE D125的模块化设计允许自定义配置,以最好地满足用户的应用程序需求。它具有一个集成的加热墙设施,最高温度可达220°C,内部压力可达22 bar。加热壁由环形缝组成,可有效地从壁传热到工艺。可适应的模块化体系结构允许对设备进行修改以支持批处理和连续处理。再者,反应堆的整体设计和调整简单明了,可以轻松配置,以适应不同的反应堆尺寸、温度、压力和停留时间。D125为用户提供各种过程控制选项,从手动控制到自动化控制,使复杂过程的开发更加轻松灵活。可以合并自动化控制系统来监视关键参数、调整设置和数据记录,从而产生可重现的结果。过程时间轴模拟可针对重复策略进行编程,例如循环温度倾斜和压力增加/降低。对于需要高处理灵敏度的操作,可以对VEECO/EMCORE D125进行巧妙的配置,以提供全面的危害控制和超出通常提供的措施(如安全关闭)的措施。VEECO D125具有广泛的跨行业和应用。它可以部署在UV-Vis光谱、闪烁计数和电镀过程中。此外,该装置用于质谱、色谱、电化学表征和药物发现。EMCORE D125非常适合在生化工业中制造药品、碳纳米管和其他蛋白质。而且它的先进技术对于纳米材料合成特别有用,因为纳米材料的合成通常需要非常高的温度、高流速或更长的反应时间。总体而言,D125是一种灵活、坚固、可靠的反应堆机器,经过优化,可支持先进的工艺开发、学术研究和性能驱动的生产应用。高性能、模块化的设计提供了集成的控制、精确的温度、压力和驻留时间控制、提高的生产率以及改进的安全功能,确保了可靠、可重现和可重复的过程结果。
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