二手 HITACHI S-8840 #9214004 待售
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ID: 9214004
晶圆大小: 6"-8"
优质的: 1997
Critical Dimension Scanning Electron Microscope (CD-SEM), 6"-8"
Workstation:
Model: B180L
Operating system: HP Unix
SEMI / JEIDA: Flat / V Notch wafers
Measurement method: Curser / Line profile
Measurement range: 0.1 ~ 11 µ m
Measurement repeatability: ±1% / 2 nm (3s)
Throughput: 26 Wafers / Hour
Secondary electron image resolution: 5 nm
Image magnification: 1,000x ~ 150,000x
Measurement points:
1 Point / Chip
(5) Chips / Wafer
Electron optics system:
Electron gun: Schottky emission type
Accelerating voltage: 500 to 1300 V
Lens system: Electromagnetic condenser lens system and FCM objective lens
Secondary electron detection method: 2-Stage electromagnetic deflection
Objective lens aperture: Heating type movable aperture with fine adjustment
Scanning method: 2-Stage electromagnetic method
Astigmatism correction method: 8 Polar electromagnetic method (X and Y axis)
Monitor: Faraday cup incorporated with automatic measurement function
Optical microscope: 1.2 mm² Visual field, monochrome image
Stage:
Movement range:
X and Y: 0 ~ 200 mm
Driving method: Pulse motor
Computer controlled operation
Speed: Maximum 51 mm/s
Wafer transfer robot method:
(2) Cassettes random access method
Wafer detection inside cassette: Arm type robot
Vacuum chucking method
Orientation flat / V Notch detection: Non-contact automatic detection method
Control and display system:
Observation control CRT:
EWS (GUI) LCD Monitor
Integral processing image display
Interactive computer operation
Wafer map display
Measured value indication
Stage coordinate indication
Scan mode:
TV Scan
Raster rotation
Auto brightness / Contrast control
Image processing:
Photographic recording unit
Effective visual field 80 x 80 mm
Safety device: Mushroom type EMO switch
Measurement data processing system:
File storing function:
3.5" Floppy disk drive
3.5" Magneto optic disk drive
With storage
Recording media:
Hard disk with EWS
3.5" Magnetic optical disk
3.5" Floppy disk
Print output: 80 Digit thermal printer
Evacuation system:
Method: Automatic dry cleaning evacuation system
Vacuum pumps:
(3) Ion pumps
(2) Turbo molecular pumps
(2) Oil rotary pumps
Safety devices:
Power fail / Vacuum level safety devices
1997 vintage.
HITACHI S-8840是一种扫描电子显微镜（SEM），专为精密、高分辨率的应用而设计。HITACHI S8840允许研究微米至亚微米范围内材料和器件的纳米结构。高功率、低压电子束能够产生导体、绝缘体和半导体的详细图像，分辨率为40 nm，放大倍率范围为20倍至500 000倍。S 8840配备了先进的技术，可以进行高质量的成像和分析。该显微镜利用了低的、无损的电子束和先进的信号处理系统，大大减少了图像失真。强大的信号处理器提供清晰的信噪比,同时提供准确的信号输出和详细的3D图像。S8840还提供了探针探测器的选择，包括用于获取高质量视频图像的CCD摄像头和超高灵敏度场发射探测器。低电流检测器提供高达每秒超过100万个电子的动态范围，使用户能够检测到电子束条件的微妙变化。显微镜还配备了真空室，能够保持10⁻⁶bar真空，适用于材料科学和半导体应用。HITACHI S 8840具有用户友好的图形用户界面和全套软件工具，以及一系列选项和配件，使其适合各种苛刻的应用。显微镜支持能量色散X射线光谱（EDS）和能量过滤成像（EFI）进行元素分析和材料元素组成研究。SEM还可用于观察晶体结构和材料的纹理，从而更好地表征微积木的结构和性能。此外，S-8840提供了一个激光光束感应发光（LBIC）系统，可以对样品进行目视检查、对比度增强和自动分析。SEM还配备了用于样品制备的高精度等离子体蚀刻系统、用于加热样品的气体入口以及辅助样品操纵和定位的支撑臂。HITACHI S-8840是一种先进的扫描电子显微镜，能够提供高分辨率图像和有价值的数据分析。它是一种可靠、高性能的仪器，适合广泛的研究用途。
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