二手 HITACHI S-9200SA #165834 待售

HITACHI S-9200SA
ID: 165834
晶圆大小: 6"-8"
优质的: 2000
CD SEM system, 8" Workstation: Model : B2600 O/S :HPUX Software Version : 18.35ev15 IP Read : 5.4~16.1pA(Low mode) CD measurement principle: Cursor and line profile measurement CD measurement range: 0.1 to 2.0 um Secondary electron image resolution: 3nm Image magnification: SEM image; 500 x 300,000 Optical microscope image; about x110 Specimen stage: Movement range X and Y: 0-200mm Stage drive: Pulse motor Control and speed: max. speed 100mm/s Wafer loader: Wafer transfer from cassette to loader chamber: Auto transfer via wafer transfer robot Wafer transfer from loader chamber to stage: Auto evacuation and auto loading Wafer transfer robot system: random access using (2) cassettes Wafer detection in cassette: Auto detection via wafer searcher Chucking method: Vacuum chucking on back of wafer Orientation flat/ V notch detection: non-contact auto detection via optical sensor Electron Optics: Schottky emission type Accelerating voltage: 500 to 1600V Lens system: Electromagnetic condenser lens system, booster objective lens Secondary electron detection: Scintillator/ photomultiplier detection system Objective lens aperture: Heating type movable aperture Scanning coil: 2-stage electromagnetic type (X, Y axes) Probe current monitoring: Faraday cup incorporated, with automatic measurement function Optical microscope: 1.2 mm square visual field, monochrome image Control and display system: Viewing control CRT: 21 type monitor Scanning modes: TV scan, HR scan, SLOW scan Image processing: Software processing using filtering Saftey device: Equipped with emergency off switch CD measurement data processing system: File storage Storage media: Hard disk (2GB), 3.5 type magneto-optic disk, 3.5 floppy disk Data processing function: statistics scanning using worksheet system Printout: 80-character thermal printer Evacuation system: Evacuation principle: Full automatic dry & clean evacuation Vacuum pumps: (3) Ion pump, (2) turbo molecular pump, (2) oil rotary pump Safety devices N2 Gas source (for leak): Gas pressure: 200 to 660 kPa Outside Diameter of connecting tube: 6um Compressed air source (for valve drive) Air pressure: 600 to 880 kPa Outside diameter of connecting tube: 6mm Vacuum source (for auto loader) Vacuum pressure: P= 1.3 to 21.3 kPa Outside diameter of connecting tube: 6mm. VIPS and Cognex are missing Currently warehoused 2000 vintage.
HITACHI S-9200SA扫描电子显微镜是满足先进科学和工业要求的高性能工具。凭借其先进的扫描和检测技术,它提供了卓越的成像分辨率、灵活性和可用性。其宽大的腔室和高分辨率的抗振系统提供了高度稳定的环境和卓越的图像清晰度,而其广泛的自动化操作确保了高效和用户友好的操作。S-9200SA具有高速超高分辨率PCO(适当的光学组合)和扫描探针系统,可轻松更改,并提供长达160毫米的长工作距离,以适应各种样本量和形状。此功能非常适合非标准样本。PCO与多倾斜和旋转样品制备一起,可实现最佳图像清晰度。扫描系统提供卓越的成像分辨率和对比与一个超高真空(UHV)柱和样品旋转阶段的集成。它还有一个自动采样级运动和一个六轴采样机械手进行详细分析。采样阶段的高线性精度也有利于精确测量中小采样零件。显微镜还配备了全方位的探测器和信号处理器,从二次电子和反向散射电子探测器到EDX元素分析(EDX)、X射线微分析(XRM)、阴极发光。它还具有先进的数字成像功能,能够执行3D深度分析、自动像素关联技术和各种集成功能,如线扫描模式和Z切片。这样可以确保可靠的数据采集和分析,以及方便地获取结果。HITACHI S-9200SA提供卓越的图像质量、低噪声背景和高信噪比。这使得显微镜可以用于苛刻的生命科学和工业应用,如纳米表面、半导体工业、电子、材料科学和纳米技术。总体而言,S-9200SA是一种高端扫描电子显微镜,它将卓越的成像分辨率与复杂样品的通用选项结合在一起,可以进行复杂的分析和研究。它拥有一系列的自动化操作、先进的探测器和处理器,以及3D深度分析功能,使其成为工业和学术研究项目的理想工具。
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