二手 AIXTRON Argus #9032555 待售
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ID: 9032555
Thermal mapping system, 2"-6"
Temperature measurement range: 450°C ~ 1300°C
Reactor rotation speed range: 25 ~ 150 rpm
Measurement rate: 1 Hz
Refresh rate (hole susceptor): 1 x per second
Recalibration interval: 1 year
Point to point variation: > than 1°C
Measurement resolution (increment): 0.1°C
Measurement stability: ± 0.2°C
Argus thermal image resolution: 2880 acquisition points
Device control software: AixAct ≥ 5.7
Temperature correlation with other tools: ± 0.2°C
2011 vintage.
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