二手 AMAT / APPLIED MATERIALS Chamber for Producer GT #9270760 待售

12" Process: SiCoNi (2) FI20620-1 Remote Plasma Sources (RPS) ADVANCED ENERGY APRX3013 RF Generator PCB’s: Slot1 / CDN491 Slot2 / CDN491 Slot3 / CDN491 Slot4 / CDN496 Slot5 / CDN496 Slot6 / Interlock module Slot7 / Interlock module Slot8 / SIG COND Gas configuration: Make / Model / Gas / Maximum flow UNIT / IFC-125 / NF3 / 300 SCCM UNIT / IFC-125 / NH3 / 600 SCCM UNIT / IFC-125 / H2 / 5000 SCCM UNIT / IFC-125 / He / 3000 SCCM UNIT / IFC-125 / Ar / 2000 SCCM UNIT / IFC-125 / Ar / 1000 SCCM UNIT / IFC-125 / Ar / 2000 SCCM UNIT / IFC-125 / Ar / 20000 SCCM MKS / 1179A00411CR1BV / Ar / 10 SCCM MKS / 1179A00411CR1BV / Ar / 10 SCCM Missing parts: RF Generator with cover Lift pins.