二手 AMAT / APPLIED MATERIALS Chamber for Producer GT #9270898 待售

12" Process: P-TEOS, SiO, SiN (2) FI20620-1 Remote Plasma Sources (RPS) ADVANCED ENERGY APRX3013 RF Generator PCB’s: Slot1 / CDN491 Slot2 / CDN491 Slot3 / CDN491 Slot4 / CDN496 Slot5 / CDN496 Slot6 / Interlock module Slot7 / Interlock module Slot8 / SIG COND Gas configuration: Make / Model / Gas / Maximum flow UNIT / IFC-125 / NF3 / 15000 sccm UNIT / IFC-125 / Ar / 10000 sccm UNIT / IFC-125 / SiH4 / 1000 sccm UNIT / IFC-125 / NH3 / 700 sccm UNIT / IFC-125 / N2 / 25000 sccm UNIT / IFC-125 / Ar / 10000 sccm UNIT / IFC-125 / O2 / 10000 sccm UNIT / IFC-125 / N2O / 1000 sccm UNIT / IFC-125 / N2O / 15000 sccm UNIT / IFC-125 / Ar / 15000 sccm STEC / LF-A40M-A-EVD / TEOS / 7g/min 2007 vintage.