二手 AMAT / APPLIED MATERIALS Etch chamber for P5000 #9284305 待售

AMAT / APPLIED MATERIALS Etch chamber for P5000
ID: 9284305
晶圆大小: 6"
6" Configured to run dopant gases (B2H6 and PH3) for BPSG applications Includes: Ozone generator Hotbox (4) EBARA Dry pumps (4) OEM 12 RF Generators (1200 W) Heat exchanger NESLAB HX-150 Chiller 29 Slot elevator 21 Slot VME Mini controller Wafer sensing Wafer centering.
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