二手 AMAT / APPLIED MATERIALS Etch chamber for P5000 #9284305 待售
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ID: 9284305
晶圆大小: 6"
6"
Configured to run dopant gases (B2H6 and PH3) for BPSG applications
Includes:
Ozone generator
Hotbox
(4) EBARA Dry pumps
(4) OEM 12 RF Generators (1200 W)
Heat exchanger
NESLAB HX-150 Chiller
29 Slot elevator
21 Slot VME
Mini controller
Wafer sensing
Wafer centering.
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