二手 AMAT / APPLIED MATERIALS Spare parts for P5000 #9244633 待售

Qty / Part number / Description (13) / 0100-76258 / Gas panel boards (6) / 0190-09257 BAY A-188-4 / Pneumatic solenoid panels (6) / - / Levelite universal controllers (5) / - / Mass flow meter He (17) / 0100-09131 / Fluid overfill boards (13) / 0100-09123 / Wafer sensor boards (10) / 0100-09127 / Loader interconnect boards (9) / 0100-09029 / Turbo interconnect assys (13) / 0100-09076 / K1 Assys (14) / BES-530-8S-PCB / Stop valve manifolds and PCB (4) / 0100-09237 / Dual freq wiring interconnect boards (1) / - / TC Control assy (5) / 0242-13822 / Top LID (14) / 0100-76181 / 5000 Wiring distribution boards (12) / 0010-76535 / Ergo Pneumatic boxes (10) / 0010-09181 / DC Power supplies (13) / 0100-09008 / Pneumatic control boards (14) / 0100-09104 / Contactor interlock boards (2) / 0100-09145 / RS232 Video interconnect boards (49) / 0015-09091 / Power DIST (6) / 0015-09091 / PTC Power DIST (5) / 0100-09103 / AC Interconnect board assys (52) / 0100-09099 / Chamber interconnect board assys (6) / 0100-76088 / Centre finder sensor boards (17) / 0100-09108 / Assy PCB (8) / 0100-09106 / Expanded gas panel interface boards (9) / 0100-09107 / TEOS Gas interface boards (25) / 0010-09341 / Wafer lift precision 5000 (10) / 0010-10033 / Wafer lift ceramic hoops (4) / - / WATLOW 93 Unit (6) / 0100-09109 / K Type PCB (1) / 0010-09239 / Boomerang box (51) / AMS 8620155 10569066 COMPUMOTOR AM5 00101300167 / Parker controller digiplan digital stepping motor drives (1) / E8U0403A-01-40W / Powerspec (1) / HSU100-12 / Carlton bates WBPS-15-7 (21) / LAMBDA LIS-71-15 / LAMBDA LIS-71-15 (27) / 0100-00008 / TC Gauge PCB (27) / 0100-00014 / OPTO Detect PCB (12) / 0100-09009 / Buffer I0 (3) / 0100-00162 / I/O Distribution boards (1) / 0100-09017 / Chamber interconnect board (1) / 0100-09304 / Wiring distribution board (58) / 0100-11002 / Digital I/O cards (20) / 0100-09054 / Analog input boards (6) / 0100-11001 / Analog output boards (9) / - / Synergy microsystems V4.8 cpu boards (17) / 0100-00003 / Stepper drive assys (2) / 0100-09023 / Mini DI/DO boards (27) / 0100-09022 / Mini AI/AO boards (23) / 0100-09136 / Mini DI/DO short circuit protected boards (13) / 0100-09006 0100-09024 / Intelligent interface & bus buffers (1) / 0140-00149 / Harness (1) / 0140-00150 / Harness (1) / AC11200-00LA / WESTER DIGITAL CAVIAR 11200 Model AC11200-00LA (1) / - / Full P5000 gas panel (1) / - / Full P5000 gas panel (15) / 0090-09116 / Thermal electric driver II (13) / 044-592-D / PCB (13) / 0100-70019 / Controller distribution WPS BD (10) / 0100-09137 / Encoder interface BD (11) / 0100-09071 / SBC 1/0 Breakout BD (12) / 0100-09056 / Intelligent interfaces (3) / 0090-09061 / Thermal electric drivers (3) / 0100-09117 / Dio Fuses BD (55) / 0100-09134 / Dio Fuses board (4) / 0660-01088 / Drives (12) / 0100-09011 / A1 MUX / Current senses (7) / 0100-09012 / PCB Power supply back planes (5) / 0100-76254 / Power supply back planes (13) / 0100-76085 / System electronics back planes (13) / 369362 / LAMBDA Switching power supplies (1) / 0010-76036 / Mini controller (3) / 0200-10181 / Collar quartz lowered cathodes (4) / 0200-10182 / Focus ring lowered cathodes (2) / 0200-10416 / Color 200 mm noth low profiles (2) / T2OPI-00573-028 / Tube controllers CX 2000 (Monitor) (2) / 0100-09379 / Lamp test MOD 1 PAB (1) / T2DCI-11336-10176 / Heater tape unit (1) / 732KEE83486 / Nitride heater blanket controller (1) / - / Connector board (1) / - / Water cooler (2) / 0190-35116 / Interface connectors (2) / 0190-35116 / Interface connectors (1) / 0100-18062 / Chamber tray ultima (3) / 0100-18063 / Assy pneumatics (2) / 0100-18064 / SSD Power supplies (6) / 0100-18065 / TTVO22 (2) / 0100-18066 / Chamber tops (3) / 0100-18067 / HV Diodes (1) / 0100-18068 / HV Filter board (2) / 0100-18069 / Water leak detectors (2) / 0100-18070 / Chamber pneumatic interconnects ultima assy (4) / 0100-1807 / Lambda LIS-71-15 (2) / 0100-18072 / Monitor stand alones (2) / 0100-18073 / Remote wiring distribution boards (1) / 0100-18074 / Remote signal cable (1) / 0100-18075 / PTC Power dist (1) / 0100-18076 / Motor (1) / 0100-18077 / PC (6) / 0100-18078 / Turbo-molecular pump controllers (1) / 0100-18079 / Load lock interlock (1) / 0100-18080 / Component side (1) / 0100-1808RF Generator controller (2) / 0100-18082 / RF Outputs (2) / 0100-18083 / System electronics back planes (1) / 0100-18084 / Gas panel BD (1) / 0100-18085 / Turbo interconnect (10) / 0100-18086 / Opto defects (1) / 0100-18087 / Wafer sensor board (1) / 0100-18088 / Gas panel board (1) / 0100-18089 / Modified N-Dryvac distribution board (1) / 0100-18090 / SSR AC Control (1) / 0100-1809 / N2 Dryvac distribution board (4) / 0100-18092 / Operator control panels (9) / 0100-18093 / Stepper motor drives (8) / 0100-18094 / TC Gauges (10) / 0100-18095 / Stepper drives (2) / 0100-18096 / Serial side boards assy (1) / 0100-18097 / Expanded RS232 interconnect boards (1) / 0100-18098 / Chamber interconnect (3) / 0100-18099 / A1 Mux / Current senses (12) / 0100-18100 / Digital I/O cards (1) / 0100-1810 / Dual gas leak detector (5) / 0100-18102 / Lambda LIS 71-15 (1) / 0100-18103 / Mini DI / Do short circuit protected board (4) / 0100-18104 / Fluid overfill boards (1) / 0100-18105 / Thermal electric driver (1) / 0100-18106 / DIO Fuse board (2) / 0100-18107 / Intelligent interfaces (2) / 0100-18108 / Electronics back plane boards (1) / 0100-18109 / Remote wiring distribution board (1) / 0100-18110 / Gas panel board (1) / 0100-1811 / PCB VME SBC (1) / 0100-18112 / Level lite universal controller (1) / 0100-18113 / Centre finder SBL assy (1) / 0100-18114 / Centre finder SBL assy (1) / 0100-18115 / DIO Fuse board (8) / 0100-18116 / PCB TC and interlocks (1) / 0100-18117 / VME to dual frequency wiring interconnect (1) / 0100-18118 / Electronics backplane board (1) / 0100-18119 / Pneumatic solenoid panel (17) / 0100-18120 / Plate pedestals (3) / 0100-1812 / HDP Collars clean (1) / 0100-18122 / Harness assy (1) / 0100-18123 / PC (1) / 0100-18124 / Monitor (1) / 0100-18125 / Clear LID (1) / 0100-18126 / Tester interface (1) / 0100-18127 / H2 Main interface (2) / 0100-18128 / PCB (1) / 0100-18129 / Rubber silicone heat conduct (2) / 0100-18130 / Field retros (22) / 0100-1813 / Screw less BB teos (8) / 0100-18132 / Directional power sensors (9) / 0100-18133 / Relay thermal over loads (2) / 0100-18134 / CB MAG THRM 3P 240VAC (2) / 0100-18135 / Hard drives (2) / 0100-18136 / Monitor base assy (5) / 0100-18137 / HDP-CVD RPSC Applicators (1) / 0100-18138 / DC Power supply (1) / 0100-18139 / Filter (4) / 0100-18140 / PA Tubes for top / Side deck (1) / 0100-1814 / Loader (6) / 0100-18142 / PWBA Extenders (1) / 0100-18143 / Power supply (2) / 0100-18144 / Cover assy LLC bolt down (2) / 0100-18145 / Top lids (8) / 0100-18146 / FLTR Low-pass boxes (1) / 0100-18147 / 8 Slot wafer position sensor (1) / 0100-18148 / DIDO Fuse (1) / 0100-18149 / Pump turbo FRKLN MTR (2) / 0100-18150 / Chambers (1) / 0100-1815 / Kit LEYBOLD turbo pump seal (3) / 0100-18152 / MFA Heatsink adapter assy (1) / 0100-18153 / Modified N2 dryvac PCB (1) / 0100-18154 / Cleaned LID gas box oxide (2) / 0100-18155 / Shield 200 mm giant gap nitride (1) / 0100-18156 / CB Therm MAG 3P 240VAC (6) / 0100-18157 / Mini AI/AO BD (2) / 0100-18158 / Temperature controls servo (1) / 0100-18159 / Orientor interlock flat and notch (1) / 0100-18160 / Wafer arm interlock (1) / 0100-1816 / Contacter drive (1) / 0100-18162 / Adapter (1) / 0100-18163 / ARM Lower right robot drive (1) / 0100-18164 / Storage elev wafer cassette handler (4) / 0100-18165 / Monitor base assy (6) / 0100-18166 / Shield tapered, 8" (1) / 0100-18167 / Centering arc platform (1) / 0100-18168 / Signal conditioner (Type 270) (1) / 0100-18169 / 3 Laser robot char fixture assy and case (1) / 0100-18170 / Vacuum control interlock (9) / 0100-1817 / Retaining ring composite 8" Titan head (2) / 0100-18172 / RF Tuning kits (1) / 0100-18173 / Wiring distrubution board (1) / 0100-18174 / ESC Test 300 mm dual HE CVD (2) / 0100-18175 / Dome top feed HDP CVD 300 mm Ultima plus (1) / 0100-18176 / Plate viton face seal (5) / 0100-18177 / API Controls (3) / 0100-18178 / Vexta stepping motors (1) / 0100-18179 / Robot (1) / 0100-18180 / Plate (5) / 0100-1818 / Fuse HLDR (1) / 0100-18182 / Service tool robot blade 300 mm (2) / 0100-18183 / GIMBAL Rods (1) / 0100-18184 / LID Assembly (1) / 0100-18185 / Rectangular door L-VAT (1) / 0100-18186 / Endura dimax motor (1) / 0100-18187 / Comb passthru cassette (2) / 0100-18188 / Power supplies (1) / 0100-18189 / PVD Source 300 mm (6) / 0100-18190 / E-Chuck 300 mm (1) / 0100-1819 / Heater pedestal (1) / 0100-18192 / Heater pedestal (1) / 0100-18193 / Lift hoop assembly (1) / 0100-18194 / Disk shutter SIP (4) / 0100-18195 / Robot blades (2) / 0100-18196 / Hoist (3) / 0100-18197 / Retaining rings (4) / 0100-18198 / Middle clamps (3) / 0100-18199 / Control boxes (1) / 0100-18200 / BRKT Gen rack stabilizer (3) / 0100-1820 / Block magnet holder and magnets, 12" (2) / 0100-18202 / Block magnet holder and magnets, 12" (1) / 0100-18203 / Press transducer (1) / 0100-18204 / Flange extension kit (1) / 0100-18205 / 3 Channel heater / Susceptor leveling system (1) / 0100-18206 / Template drilling panel (2) / 0100-18207 / Retaining rings (1) / 0100-18208 / Hoist (1) / 0100-18209 / Hoist (1) / 0100-18210 / Front cover wet robot (2) / 0100-1821 / Carrier, 12" (1) / 0100-18212 / Membrane support fixture Titan head, 12" (1) / 0100-18213 / Hoist (1) / 0100-18214 / Hoist (1) / 0100-18215 / Power supply (1) / 0100-18216 / Turbo AC power supply (3) / 0100-18217 / Transpectors (3) / 0100-18218 / Operator control panel I/O blocks (1) / 0100-18219 / Rectangular door L-VAT (3) / 0100-18220 / Mini environment pressure gauges (3) / 0100-1822 / MGE UPS Systems (2) / 0100-18222 / SCR Power supplies (2) / 0100-18223 / LM Guide actuators (1) / 0100-18224 / Lambda power supply (3) / 0100-18225 / Collars, 12" (1) / 0100-18226 / Cover (4) / 0100-18227 / Lamp fluorescent 17 W (1) / 0100-18228 / Cathode stand ultima, 12" (1) / 0100-18229 / Device net I/O block (1) / 0100-18230 / Lift plate lift assy (1) / 0100-1823 / ASSY Swell bellow (1) / 0100-18232 / Ultima cathode (2) / 0100-18233 / Gas rings (2) / 0100-18234 / Paddle dual blade robots (1) / 0100-18235 / Extension panel (4) / 0100-18236 / Gas panel dist bd (2) / 0100-18237 / Robot axis multilink (2) / 0100-18238 / KENSINGTON Labs (1) / 0100-18239 / Chamber dist BD (1) / 0100-18240 / Motor (1) / 0100-1824 / MGE UPS System (1) / 0100-18242 / Power supply (2) / 0100-18243 / Peabody scientific controllers (1) / 0100-18244 / Precision parameter analyzer (1) / 0100-18245 / CS Source 110 V power supply (1) / 0100-18246 / KIT PM PC11, 12" (1) / 0100-18247 / PVD Source, 12" (1) / 0100-18248 / Top cover (1) / 0100-18249 / Controller back plate (19) / 0100-18250 / Wafer sensor assy (1) / 0100-1825 / CHC I/O Lift assy (1) / 0100-18252 / Degas lift hoop (1) / 0100-18253 / Chamber I/O board (1) / 0100-18254 / Controller distribution board (1) / 0100-18255 / CHC I/O Lift assy (3) / 0100-18256 / Heater lifts assy (1) / 0100-18257 / Spool separator (1) / 0100-18258 / CH Pneumatic manifold (2) / 0100-18259 / Industrial compliance meters (1) / 0100-18260 / Flux shaping magnet (4) / 0100-1826 / CH3 Wafer lift assy (1) / 0100-18262 / Degas Wafer Lift (1) / 0100-18263 / Chuck, pem, sabre (1) / 0100-18264 / Asyst NRI 1150R SMIF indexer (1) / 0100-18265 / Digital gauge (1) / 0100-18266 / MDX Pinnacle (1) / 0100-18267 / Turbovac 1000C (1) / 0100-18268 / Chamber polisher (1) / 0100-18269 / SIEMENS Pump (2) / 0100-18270 / Target locking device retrofit kits (1) / 0100-1827 / Target gravity safe lock left assy (1) / 0100-18272 / Target gravity safe lock right assy (1) / 0100-18273 / Legacy pmr target locking device retrofit kit (1) / 0100-18274 / Retrofit flexline htr purge (1) / 0100-18275 / Bracket cpci inboard securing (4) / 0100-18276 / Block magnet holder and magnets, 12" (3) / 0100-18277 / Pedestal LG OG preclean (1) / 0100-18278 / Pedestal shield lower large od (2) / 0100-18279 / Ring edge aluminum's (3) / 0100-18280 / Support LG OG preclean (2) / 0100-1828 / Plate top blank off base rings (3) / 0100-18282 / FI Controllers (1) / 0100-18283 / Centura controller (1) / 0100-18284 / Datum gauge (3) / 0100-18285 / UPS Smart-ups (2) / 0100-18286 / Upstation GXT (3) / 0100-18287 / Hot plates (1) / 0100-18288 / Mini environment pressure gauge (1) / 0100-18289 / Servo positioning controller (1) / 0100-18290 / Monitor (1) / 0100-1829 / Lift fixture wafer handler (1) / 0100-18292 / RTC Rack (2) / 0100-18293 / Gas panel cages (2) / 0100-18294 / Mainframe controllers (7) / 0100-18295 / Pyro radiances RTP (2) / 0100-18296 / MKS 600 Series pressure controllers (1) / 0100-18297 / Fan (1) / 0100-18298 / Mini Megapac (2) / 0100-18299 / Throttle valve controllers (1) / 0100-18300 / LAMBDA Alpha 1000 W (1) / 0100-1830 / CDN494 PCB (1) / 0100-18302 / Mainframe interface (1) / 0100-18303 / Swell driver (2) / 0100-18304 / DNP-CPC1-2 PCB (1) / 0100-18305 / Loadlock interface (1) / 0100-18306 / Swell lift and controller (1) / 0100-18307 / Dual HE CVD shower head, 12" (2) / 0100-18308 / Load ports (2) / 0100-18309 / Load ports (2) / 0100-18310 / Load ports (1) / 0100-1831 / Load port (2) / 0100-18312 / AMAT FESTO Pneumatic valves (2) / 0100-18313 / Fine wire thermocouples (1) / 0100-18314 / Weldment post heat with shut off (4) / 0100-18315 / Stud cryo / Gate valves (1) / 0100-18316 / Swll fins left side (3) / 0100-18317 / LIQ Line tdmat 1/8 OD LIQ panels (1) / 0100-18318 / Mainframe cable (1) / 0100-18319 / Gear, rotating 1.25 module, 44 teeth (1) / 0100-18320 / Banner mini-beam sensor (2) / 0100-1832 / UHP VAC Switches (3) / 0100-18322 / UHP VAC Switches (10) / 0100-18323 / FTG TEE 1/4" Tubes (1) / 0100-18324 / Suction cup assy (2) / 0100-18325 / Variflo valves (2) / 0100-18326 / Variflo valves (14) / 0100-18327 / C-Seal assy 1.50 X1.50 SST 2 port components (1) / 0100-18328 / CBMAG Therm 1P din rail (11) / 0100-18329 / GSKT VOR 1/8 NI flats (6) / 0100-18330 / Seal assy .860X.300 1PORT components (1) / 0100-1833763073 / CEL (1) / 0100-18332 / Cable assy, spill sensor (1) / 0100-18333 / Gasline,BSP,gas module TXZ, 12" (1) / 0100-18334 / BRKT,Heater,interface TXZ, 12" (1) / 0100-18335 / Gasline,BSP,gas module TXZ, 12" (1) / 0100-18336 / Gasline,EP,gas module TXZ, 12" (1) / 0100-18337 / Gasline,EP,heater TXZ, 12" (1) / 0100-18338 / Gasline,BSP,heater TXZ, 12" (1) / 0100-18339 / Gasline,BP,heater TXZ, 12" (1) / 0100-18340 / Hose assy flex braid (1) / 0100-1834 / Safety shield (1) / 0100-18342 / Clamp plate, heater interfaceTXZ, 12" (1) / 0100-18343 / Retrofit instructions (1) / 0100-18344 / Hose conn EL camlock, 2" (3) / 0100-18345 / Hose conn EL camlocks, 2" (10) / 0100-18346 / Clamp buckles 1/4W 201SST (1) / 0100-18347 / Clamp band coiled 1/4W (2) / 0100-18348 / Vicor megapac MP6-76542 (1) / 0100-18349 / Cable 18 AWG 100' (1) / 0100-18350 / Gasline,BSP,gas module TXZ, 12" (3) / 0100-1835 / Mainframe cables (1) / 0100-18353 / Cable assy,3 zone htr drv control (3) / 0100-18354 / Hose assy flex braids (1) / 0100-18355 / ZV-400 (1) / 0100-18356 / Pin robot, 12" (1) / 0100-18358 / Cover view port, 6" (1) / 0100-18359 / AKFACS (1) / 0100-18360 / INTEL Shipkit (1) / 0100-1836 / EGA Robot prealign (1) / 0100-18362 / Cable assy (1) / 0100-18363 / Safety shield (1) / 0100-18364 / BRKT,Heater,interface TXZ, 12" (1) / 0100-18365 / Gasline,BP,heater,TXZ, 12" (1) / 0100-18366 / Gasline,BP,gas module,TXZ, 12" (1) / 0100-18367 / Gasline,EP,heater,TXZ, 12" (1) / 0100-18368 / Gasline,BSP,heater,TXZ, 12" (1) / 0100-18369 / Clamp plate,heater interface,TXZ, 12" (1) / 0100-18370 / Retrofit instructions (10) / 0100-1837 / SWAGELOK High pressures (1) / 0100-18372 / Gasline,ep,heater,TXZ, 12" (1) / 0100-18373 / Gasline,bp,gas module,TXZ, 12" (1) / 0100-18374 / Gasline,bsp,gas module TXZ, 12" (1) / 0100-18375 / Gasline,ep,gasmodule,TXZ, 12" (1) / 0100-18376 / Gasline,bsp,heater,TXZ, 12" (1) / 0100-18377 / Gasline,bp,heater,TXZ, 12" (3) / 0100-18378 / Hose assy flex braid (2) / 0100-18379 / Clamp plate,heater interfaces TXZ, 12" (1) / 0100-18380 / Safety shield (1) / 0100-1838 / BRKT,Heater,interface TXZ, 12" (1) / 0100-18382 / Retrofit instructions (5) / 0100-18383 / Hose 3/8ID Push lock (50') (5) / 0100-18384 / SWAGELOK High pressure check (Single) (1) / 0100-18385 / Cable power, T75-X1 350MM 8ft (1) / 0100-18386 / Cable power, T75-X1 350MM 9ft (1) / 0100-18387 / Gasline,EP,gasmodule,300MM TXZ (3) / 0100-18388 / Hose assy flex braid (1) / 0100-18389 / Cable,evc-evc,75ft Centura, 12" (1) / 0100-18390 / Harness assy, cryo compressor cable (4) / 0100-1839 / Hose assy flex braids (1) / 0100-18392 / Cable assy dnet trunk 23 meter (1) / 0100-18393 / Cable assy, Endura, 12" (1) / 0100-18394 / Harness assy, Endura, 12" (1) / 0100-18395 / LESZ 3506 Cable (1) / 0100-18396 / Cable assy,emo generator 1/2 INT (1) / 0100-18397 / Valve door atmosphere side (2) / 0100-18398 / Seal dovetails (1) / 0100-18399 / Foxboro board (1) / 0100-18400 / F05 Carrier resting plate (1) / 0100-1840 / Front side keyboard (1) / 0100-18402 / 48V Power supply (1) / 0100-18403 / 96V Power supply (1) / 0100-18404 / Window quartz lower (1) / 0100-18405 / INFICON Transpector 2 RGA with EXT (1) / 0100-18406 / Controller,REV B type,motion (1) / 0100-18407 / CU,Laser Argon Ion head (2) / 0100-18408 / SVME/AT-BCN/V (1) / 0100-18409 / PHSW PCB (1) / 0100-18410 / MVME PCB (1) / 0100-1841 / AVIO PCB (1) / 0100-18412 / VMIF PCB (1) / 0100-18413 / Dual gas leak detector PCB (1) / 0100-18414 / Cool chamber interface PCB (1) / 0100-18415 / OXA 405 Main control module PCB (1) / 0100-18416 / VGC PCB (1) / 0100-18417 / TEL PCB (1) / 0100-18418 / R/L Pneumatic unit (1) / 0100-18419 / Turbo molecular pump controller 305 W (1) / 0100-18420 / ABC Switch (1) / 0100-1842 / SEKI DENKO 2000 (2) / 0100-18422 / UDX5114N 5 Phase driver (3) / 0100-18423 / Turbo molecular pump controllers 1606 W (2) / 0100-18424 / Turbo moloecular pump controllers 600 W (1) / 0100-18425 / EMI Filter (1) / 0100-18426 / GENMARK Robot (1) / 0100-18427 / SE04-10WA (1) / 0100-18428 / RCL605 ASSY (2) / 0100-18429 / PCB (3) / 0100-18430 / BD4 PCB (2) / 0100-1843 / HITACHI PCB (2) / 0100-18432 / BD2 PCB (1) / 0100-18433 / CPU0 VER PCB (2) / 0100-18434 / PM1 VER (1) / 0100-18435 / HITACHI PCB (3) / 0100-18436 / Mass flow controllers (4) / 0100-18437 / Mass flow controllers (2) / 0100-18438 / 325 Moducell (2) / 0100-18439 / Etch pump controllers (1) / 0100-18440 / Pro fort 810 (3) / 0100-1844 / Leader / Mainframe robots (1) / 0100-18442 / Robot (1) / 0100-18443 / PCB (1) / 0100-18444 / PCB (1) / 0100-18445 / PCB (1) / 0100-18446 / PCB (2) / 0100-18447 / Analyzers (3) / 0100-18448 / Analyzers (2) / 0100-18449 / Cathode chamber turbos (2) / 0100-18450 / HDP Throttle valves (1) / 0100-1845 / Magnetron head (1) / 0100-18452 / Butterfly valve unit (1) / 0100-18453 / BARATRON Pressure transducer (1) / 0100-18454 / MDC Spring loaded valve (1) / 0100-18455 / MKS Spring loaded valve (1) / 0100-18456 / Robot wafer arm (1) / 0100-18457 / Robot (1) / 0100-18458 / Spring loaded vavle (1) / 0100-18459 / Motor drive unit (2) / 0100-18460 / Robots (1) / 0100-1846 / Throttle valve (2) / 0100-18462 / Throttle valves (2) / 0100-18463 / Cassette handler tops (1) / 0100-18464 / Cassette handler bottom (1) / 0100-18465 / RPSC Applicator (1) / 0100-18466 / PCB (1) / 0100-18467 / PCB (1) / 0100-18468 / PCB (1) / 0100-18469 / PCB (1) / 0100-18470 / PCB (4) / 0100-1847 / PCB (4) / 0100-18472 / PCB (1) / 0100-18473 / PCB (1) / 0100-18474 / PCB (1) / 0100-18475 / PCB (1) / 0100-18476 / PBC (1) / 0100-18477 / Intreactive display (1) / 0100-18478 / PCB (1) / 0100-18479 / PCB (1) / 0100-18480 / MDC Spring loaded valve (1) / 0100-1848 / Isolator, WR340, 6kW (1) / 0100-18482 / HDP-CVD RPSC Applicator (1) / 0100-18483 / Magnatron head (2) / 0100-18484 / Robots (1) / 0100-18485 / AU-Plated 200 mm lamp module (1) / 0100-18486 / Atomic force microscope (2) / 0100-18487 / NESLAB Chillers (1) / 0100-18488 / Heat exchanger (1) / 0100-18489 / SMC Thermo chiller (1) / 0100-18490 / HITEC HI Volt power supply (1) / 0100-1849 / Focus PSU (1) / 0100-18492 / CRYO controller (1) / 0100-18493 / Load lock control panel (1) / 0100-18494 / Interface (1) / 0100-18495 / Magnet turbo controller (1) / 0100-18496 / Source assy mag psu (1) / 0100-18497 / Sensor assy (1) / 0100-18499 / End effector and mapper (1) / 0100-1850 / EDWARDS Pump controller (1) / 0100-18503 / Power distribution interface box (1) / 0100-18514 / 100 SCCM MFC (8) / 0100-18519 / SDS Cards (1) / 0100-18520 / Arc PSU (Upgraded) (1) / 0100-1852 / Beamline vac chassis (2) / 0100-18522 / FI Comms Box (1) / 0100-18523 / Beamline control chassis (1) / 0100-18524 / HV PSU(oliok) (1) / 0100-18525 / HIM Scan chassis (2) / 0100-18526 / AMAG PSU (1) / 0100-18527 / Focus PSU (1) / 0100-18528 / N 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