二手 DNS / DAINIPPON Lot #9123906 待售

Lot of spare parts: Quantity Part Number Description 2 0-06-B4474-2 SHUTTER PLATE (HTPVC) 3 0-06-B5437-7 PINION 1 0-06-B5456-6 RACK 2 0-06-B5456-8 RACK 1 0-06-B5458-4 GEAR 1 0-06-B5459-2 VACUUM SEAL 2 0-06-B5473-9 SHUTTER SHAFT 1 0-06-B5490-C GEAR (1) 1 0-06-B5543-5 FITTING 3 0-17-A4499-5 COVER,SC 2 0-17-A4582-9 EXHAUST HOSE 8 0-17-A5236 DRIVE NUT 3 0-17-A5485-1 BLOCK 4 0-17-A5725-6 DRIVING WIRE 2 0-17-A5725-7 CONVEYER WIRE/2 ZONE 3 0-17-A5725-9 DRIVING WIRE 1 0-17-A5737-0 CARRING WIRE/4 ZONE 5 0-17-A5737-1 TENSION WIRE,4 ZONE 5 0-17-A5825- PULLEY, HIGH TEMPERATURE 5 0-17-A5825-8 PULLEY 1 0-17-A5825-9 PULLEY 2 0-39-01702 PHOTO TRANSISTOR 2 0-39-06182 O-RING 1 0-39-06190 O-RING 1 0-39-07556 V-RING 1 0-39-08212 BEARING 1 0-39-08213 BEARING 1 0-39-10414 O-RING 1 0-39-12352 SOCKET FOR P.M. SENSOR (SCREEN) 9 0-39-12449 BALL BEARING 12 0-39-12450 BALL BEARING 2 0-39-12504 BEARING 3 0-39-12531 BEARING 3 007-A4982-3 COVER, BRUSH (6") 4 017-A5881-1 PULLEY, HIGH TEMPERATURE 1 06B-54576 PACKING 2 10033095 CELLMEMBRANE UNIT, WAF SCRUB 1 1408 NOZZLE, DESONIC 1 19993 PUG 122-B, 110V, 22V, 6A 1 2-39-00634 GEAR HEAD/2GK25 2 2-39-00642 GEAR HEAD SCW UNIT 2GK150K 14 2-39-08872 O-RING 1 2-39-11670 NEEDLE VALVE 10 2-39-11678 TAC GASKET (SCREEN) 2 2-39-11793 SOLENOID VALVE PNEUMATIC 2 2-39-12433 AMP, SERVO, SPIN COATER 3 2-39-12560 SENSOR, WAFER 1 2-39-20121 VACUUM GAUGE 1 2-39-20131 SUCK-BACK/DA-S1-S4 2 2-39-20160 FITTING 20 2-39-20245 CASSETTE BASE 1 2-39-20318 METER FLOW 3000CC HMDS 2 2-39-20371 SERVO-AMP 1 2-39-20632 PUMP HP 25-35 ML 4 2-39-20950 ASM OSCILATOR AND DRIVER 12 2-39-20990 CONN SW 4 2-39-22200 ASM TUBE FITTING 1 2-39-22257 CYLINDER PRESSURE SPIN UNIT 1 2-39-22304 CYLINDER CDJPB15-15D-90L-XBR 6 2-39-22373 SYNCHRO BELT 1 2-39-23263 PFTE TUBE 3/4 (SCREEN) 1 2-39-30038 CYLINDER, PEN 1 2-39-32089 PNEUMATIC CYLINDER 1 2-39-32700 INPUT UNIT 2 2-39-33213 ELECTROMAGENTIC CLUTCH (SCREEN) 12 2-39-33218 PHOTO MICRO SENSOR EE-SX671 1 2-39-33416 BL SERVOMOTOR(TAMAGAWA SEIKI CO.,LTD. MOD# TS35ION29E61) 2 2-39-33795 CONTROLLER, SERVOPACK, CACR-01-DS3B4C 1 2-39-33850 PNEUMATIC CYLINDER 6 2-39-34115 LM GUIDE 1 2-39-34470 CYLINDER, PNEUMATIC 2 2-39-34596 BL SERVOMOTOR(TAMAGAWA SEIKI CO.,LTD. MOD# TS35ION31E61) 3 2-39-35119 SYNCHRO BELT 1 2-39-35135 PLATE, QUARTZ,TOP 2 2-39-35155 LINEAR GUIDE (SCREEN) 3 2-39-35294 O-RING (PACK OF 5) 1 2-39-37179 FILTER THERMAL, TYPE 03FHA005 1 2-39-37407 MOTOR CONTROLLER RD 022 1 2-39-37789 CONTROLLER SEB2154A4A 14 2-39-38904 SYNCHRO BELT 4 2-39-38905 SYNCHRO BELT (6) 2 2-39-38907 HEAD GEAR 1 2-39-39115 EBR NOZZLE (SCREEN) 18 2-39-39125 SYNCHRO BELT (SCREEN) 2 2-39-39336 CYLINDER PNEUMATIC FOR EBR NOZZLE 1 2-39-39869 RODLESS CYLINDER 1 2-39-39977 MOTOR, STEP 1 2-39-40329 STEPPING MOTOR 5 2-39-41642 SENSOR, LEAKAGE AMP RS-1000C 2 2-39-41901 MOTOR DRIVER 2 2-39-42401 AMD VALVE 1 2-39-44722 INNER SLEEVE (SCREEN) 5 2-39-44797 CYLINDER AIR 1 2-39-44867 PRESS SENSOR DPX-201 1 2-39-45759 FLOW METER 1 2-39-45772 PNEUMATIC VALVE (SCREEN) 1 2-39-45971 FLOW METER 1 2-39-45972 ASSY, FLOWMETER 60-600ML/MIN W/BRACKET 1 2-39-45975 FLOW METER 2 2-39-46477 ASM BALL SCREW/NUT TRANSPORT ROBOT HORIZ 2 2-39-46491 SYNCHRO BELT (SCREEN) 6 2-39-48668 ROTARY,ENCODER,E6B2-CWZ6C,P/R 16 2-39-48969 ASM SUCK BACK UNIT SPIN COATER 1 2-39-49255 CYLINDER, PNEUMATIC 6 2-39-49610 NUT(CUP) 9 2-39-50096 BEARING (SCREEN) 5 2-39-50589 SLT LAMP L800FS-MC (UV LAMP) 1 2-39-50781 FLOW METER 3 2-39-51734 SENSOR, CASSETTE EX13P 1 2-39-51922 VALVE, PNEUMATIC FOR SDWP 2 2-39-52081 CYLINDER, PNEUMATIC 1 2-39-52316 MODULE, MIX-08V20 1 2-39-52474 MOTOR, STEP 4 2-39-54128 TRAP, TANK 3 2-39-54153 BELT, TIMING 3090-5GT-F9N 1 2-39-54158 SENSOR 2 2-39-54164 GUIDE, LINEAR BEARING VERTICAL ARM 2 2-39-54234 CYLINDER, PNEUMATIC 3 2-39-54314 BELT, TIMING 2590-5GT-15RFL 2 2-39-54393 BELT, TIMING 1 2-39-55708 CYLINDER, PNEUMATIC 1 2-39-57470 GENERATOR D-SONIC NOZZLE 1 2-39-60033 VALVE, HUMIDIFIER (BALL TAP) DNS FLOAT 1 2-39-61774 SCREW, BALL 3 2-39-62560 ARM, SLIDER 8 INCH 1 2-39-63356 CONTROLLER, IF-B 1 2-39-63358 CONTROLLER, FOR CHE 1 2-39-63384 BEARING CROSS ROLLER 2 2-39-63473 PUMP, RESIST PDS IWAKI SK2000 1 2-39-66135 CYLINDER, DBL ACT PLT MOUNT SLIDE PNEU 2 2-39-67880 ARM, CERAMIC IFB 1 2-39-71254 CONTROLLER, TRANSFER 6 2-9P-00059 CABLE, Y-AXIS TR2 1 1 2-9P-00084 CABLE, Z-AXIS IF-B 4 2-AE-D0063 GAUGES, FLOW 100ML/ 1 2-AE-J00042 SENSOR, CAPACITIVE FOR SOURCE BOTTLE 1 2-AE-J0006 SENSOR, AIR FLOW UNIT FOR SPIN SC 1 2-AE-J0012 SENSOR, DIGITAL FOR SC/SD SPIN UNIT 1 2-AE-J0019 SENSOR, BEAM FOR ID 1 2-AE-J0076 SENSOR, PRESSURE 1 2-AE-J0083 FLOWMETER, 2-20 LPM N2 0,2MPa 20?C W/SEN 1 2-AE-J0084 SENSOR, PRESSURE 1 2-AE-J0104 ASSY, SOLENOID VALVE FOR CHEMICAL CH 1 2-AE-J0118 ASSY, CP LOWER STAGE MID 1 2-AE-J0134 ASSY, RHP MID STAGE LEFT 1 2-AE-J0182 SENSOR, PRESSURE S 1 2-AJ-60269-1 ROBOT HARNESS ASSY 1 2-AJ-60422-1 SPLASH GUARD BACKSIDE 1 2-AJ-D0768 PLATE, COOL 2 POS ASSY (AIR LEFT) 1 2-AR-63137 HOT PLATE FOR DNS COATER 60A / 80A 6 2-AR-D6783 PULLEY, DRIVE TR2 X-AXIS 200W 2 2-AR-D6784 PULLEY TENSION TR2 1 2-F-2-32343 CUP, SPIN UPPER 60A 11 2-F1-30874 CUP SPIN LOWER SCW-60 2 2-F1-81050 DISK BAFFLE DEVELOPER 1 2-F2-33110 ARM, LOWER 1 2-F2-33110 ARM, LOWER 1 2-F2-33117 BAFFLE DISK 4 2-F2-33332 CHUCK, DEV OD54MM 1 2-F2-33371 8" SPIN CUP UPPER 2 2-F2-33385 INSIDE SPIN CUP 1 2-F2-80086 CUP BASE 3 2-F2-80089 BELT FITTING (SCREEN) 1 2-F2-81171 SPIN CUP UPPER BACKSIDE 1 2-F2-81173 SPIN CUP LOWER BACKSIDE 1 2-F2-86840 ARM, UPPER WAFER DNS SCRUBBER 1 2-F2-86841 ARM, LOWER WAFER DNS SCRUBBER 1 2-F2-90266 COVER PLATE TOP 1 2-F2-D0463 BLOCK, SLIDE 2 2-F2-D0465 COVER DNS 200W TR1 ROBOT 2 2-F2-D0466 COVER TRI-ROBOT 2 2-F2-D0707 CHUCK DEVELOPER 200SKW 1 2-F2-D0805 FILTER, 200W HEPA C 1 2-F2-D0862 ARC, CENTERING 200W IDA AND IFB 2 2-F2-D2472 NOZZLE, SLIT FRONT 2 2-F3-32084 CHUCK, COATER 2 2-F3-32678 CHUCK SPIN TOP SCRUB 3 2-F3-34848 SPIN CHUCK 6 2-F3-45773 IH ARM (97(SCREEN) 3 2-F3-82680 CHUCK SPIN A 80A 4 2-F3-84069 ARM ASSY 1 2-F3-86339 BRUSH WASHING POT 1 2-F3-91849 GUIDE 200MM DIA 2 2-F3-93598 FIXTURE CHILL PLATE MOUNTING GUIDES 6 2-F3-D0659 ARM ASSY 1 2-F3-D0775 GUIDE, LINEAR VERTICAL AXIS IFB SLIDER 1 2-F3-D1285 ARM UPPER ROBOT 150MM WAFER 200SKW 1 2-F3-D1286 ARM LOWER 150MM WAFER 200SKW 1 2-F3-D2931 CUP, SPIN MIDDLE 2 2-F3-D2932 MIST GUARD 1 2-F3-D8572 NOZZLE, SLIT REAR 1 2-F3-DO706 GUIDE, LINEAR 9 2-F4-30784 SHAFT PIN FOR POLYMIDE (R940084) 2 2-F4-30846 TEMPERATURE SENSOR 8 2-F4-30864 SECTOR 1 2-F4-31253 BEARING COVER 5 2-F4-31254 COLLAR 3 2-F4-31258 NUT LOCK 3 2-F4-31279 COLLAR 1 2-F4-32455 COUPLING 12 2-F4-34162 LIFTER PIN (SCREEN) 4 2-F4-35784 LIFTER PIN SILISON (SCREEN) 2 2-F4-37163 PIN TO CONNECT LIFT ARM 2 2-F4-39119 PLATE FOR INDEXER ARM 1 2-F4-39119 PLATE FOR INDEXER ARM 1 2-F4-39419 PULLEY (60A TR ARM) 1 2-F4-39858 THERMO COUPLE 5 2-F4-41213 PULLEY 11 2-F4-41214 PULLEY HIGH TEMPERATURE 5 2-F4-80237 INNER RING (SCREEN) 6 2-F4-83917 HOLDER FOR DNS COATER DOOR 6 2-F4-83921 COLLAR FOR DNS COATER DOOR 2 2-F4-84008 WAFER GUIDE (SCREEN) 2 2-F4-84333 SEAL 3 2-F4-85826 SHAFT 5 2-F4-89777 PACKING (SCREEN) 3 2-F4-91623 PIN 3 2-F4-96209 SPIN CHUCK PIN (SCREEN) 1 2-F4-D2478 PIN, LIFTER 5 2-F4-D3054 PIN, LIFTER 3 2-FI-81702 SPIN CUP UPPER 3 2-J3-31382 RESIST NOZZLE COVER 4 2-J3-33245 CHUCK, DNS EEW 1 2-J3-83146 PTFE RING (SCREEN) 1 2-J3-84414 SPIN DISK 200MM 4 2-J4-32446 DRAIN FUNNEL (SCREEN) 1 2-J4-33028 ARM FOR STEPPER MOTOR 4 2-J4-34042 PIN (SCREEN) 3 2-J4-34446 PR NOZZLE 8 2-J4-35537 PIN, SSWR, SPIN CHUCK (SCREEN) 4 2-J4-83290 INNER SLEEVE 5 2-J4-86785 COVER (SCREEN) 2 2-J4-86788 NOZZLE POT COVER IMP 2 2-J4-87059 SCREW (SCREEN) 2 2-J4-87087 SPRING SSW BRUSH ARM (SCREEN) 1 2-J4-87394 PIN 1 2-L2-02414 ASM ATMEL CABLE 1 2-VC-03166-1 A2-CPU BOARD 5 2-VC-06997 PCB BII-I/O BOARD 3 2-VC-10746 PCB, SPIN BOARD CESB-0011 2 2-VC-13439 CONTROL, IMAGE SENSOR EE 1 2-VC-15048 ASM DRIVER A/D RGB CONVERTER FOR MAIN CO 3 2-VC-19284-1 PCB INTERFACE B CONTROL 1 2-VC-28023 PCB, INDEXER ID-A GEDC-001 1 2-VC-39823 PCB, DEVELOPER I/O DISTRIBUTION 1 2-VC-53335 CONTROLLER, MAIN SK2000 1 2-VC10035 PCB INTERFACE UNIT BOARD 2 2-XA-00038 5"GLASS WAFER (125MM) 2 2-XB-10041 KIT Z AXIS CABLE 60A 1 2-XX-11318 SENSOR, PRESSURE 2 2-XZ-11187 MOTOR, STEP .75A 5-PHASE 2 2-XZ-11474 PLATE TOP ASSEMBLY 1 2GK12.5K-D8 GEAR HEAD 3 2RK6RGK-A2 5"AC MOTOR 1 2RSR15AG1-4072-2 MINIATURE LM GUIDE 1 2VC-18987-6 PCB EEW CONTROL 1 31101-0004 BALL SCREW 1 33101-0005 SLIDE UNIT 1 33101-0061 AIR CYLINDER 1 33501-0011 SENSOR, DIGITAL PRESSURE 1 35801-0053 SENSOR, LIMIT 1 37010 UNIT, TRANSFER CHUCK 1 38001 UNIT, TRANSFER CHUCK, MACOL 1 39-2013 LAMP, HALOGEN, 1000W, 120VAC 4 39076 SENSOR, CABLE/ELEVATOR 1 3G2A5-OD213 PLC 64-POINT OUTPUT CARD (TR 2 41-0002-00 VALVE 1 5-39-00539 REGULATOR, INA-13-796-02 4 5-39-00809 TOGGLE VALVE 2 5-39-00841 RING 2 5-39-00846 SWITCH,MICRO 3 5-39-01001 BELT, DRIVE, 025-T10-0417-6 1 5-39-01001 BELT, DRIVE, 025-T10-0417-6 1 5-39-01071 PNEUMATIC VALVE AS 5260-31CIW 3 5-39-01160 VALVE, AIR SAV-3260-131TIZ 1 5-39-01193 AIR VALVE 1 5-39-01264 SAFETY PNEUMATIC VALVE 5 5-39-01334 TUBE,COIL,B30B1436 1 5-39-01444 DRIVER, MOTOR 1 5-39-01445 DRIVER, MOTOR A4402-9415TGW 1 5-39-01477 MOTOR, REVERSABLE 2 5-39-01605 TUBE, 36 PINS WIRING HARNESS 3 5-39-01606 TUBE 1 5-39-01873 MONITOR, RESISTIVITY 1 5-39-02129 GUIDE, LM SEAL LESS TR 4 5-39-02158 MOTOR,STEPPING 1 5-39-02219 MANIFOLD 2 5-39-02286 MANIFOLD 2 5-39-02319 TIMING BELT 4 5-39-02322 O-RING, (BATH PERIPH PIPING) 1 5-39-02724 STEPPING MOTOR 2 5-39-03273 SOLENOID VALVE 4 5-39-04069 O-RING 1 5-39-04071 O-RING 3 5-39-04219 PHOTOSENSOR, (CTC) 1 5-39-04480 COUNTER, WAFER 1 5-39-04481 COUNTER ( STAGE) 1 5-39-05194 FILTER, SH4M114R5 4 5-39-05233 FILTER, CTFG01P01 1 5-39-05286 ORANGE FIBER OPTIC, CONC. MONITOR 1 5-39-05287 BLACK FIBER OPTIC, CONC. MONITOR 1 5-39-05299 O-RING 2 5-39-05418 PNEUMATIC VALVE, O3 2 5-39-05584 VALVE, MIXING 7 5-39-05619 PNE. VALVE 1 5-39-05707 VALVE, NEEDLE AM-3240-BTM1 1 5-39-05731 SENSOR AREA SS10-TR48 TAKEX 3 5-39-05830 VALVE, AV 1 5-39-05856 NEEDLE VALVE 1 5-39-05857 VALVE, NEEDLE 4 5-39-05877 SWITCHING VALVE 4 5-39-05878 VALVE, PNEUMATIC 3 5-39-05949 SENSOR, CHEMICAL LEAKAGE 3 5-39-06066 PNE. VALVE 2 5-39-06295 REGULATOR 4 5-39-06385 HOT DI-W VALVE 1 5-39-07053 MFC, N2 SEC-4600R 1 5-39-07607 CALIBRATION UNIT N2 SENSOR 3 5-39-08616 AIR CYLINDER 3 5-39-08846 SENSOR, HYBRID FIBEROPTIC 2 5-39-09987 DRAIN VALVE 3 5-39-10683 PURGE METER 2 5-39-10687 PREFLOW METER 3 5-39-11785 CHOPPER MOTOR, HF CONC. MONITOR 2 5-39-11786 SHUTTER, HF CONC. MONITOR 1 5-39-14212 GENERATOR MEGASONICS 4 5-39-50031 BOARD, I/O RELAY (MAIN CONTROLLER) 2 5-39-50061 CONTROLLER, TEMP 1 5-39-50152 PCB 1 5-39-50153 BOARD,NFB,POWER DC 1 5-39-50153 BOARD,NFB,POWER DC 2 5-39-50154 BOARDMASTER,INTERGRATED 1 5-39-50155 LEAK DETECTOR BOARD 1 5-39-50155 LEAK DETECTOR BOARD 1 5-39-50197 PCB MAIN CONTROLLER 1 5-39-51160 INPUT/OUTPUT UNIT 1 5-39-51173 THERMOCONTROLLER 2 5-39-51307 CONVERTER 5 5-39-51540 SENSOR, LEVEL (N2 AIR PIPING) 1 5-89-05512 BELT, V (S/D) 2 5-F1-02430 ARM, LIFTER DNS DRYER 1 5-F1-06033 WAFER GUIDE 1 5-F1-90164 WAFER GUIDE NOTCH (1) (CTC) 1 5-F1-90165 WAFER GUIDE NOTCH (2) (CTC) 2 5-F1-90825 WAFER CHUCK (L) WAFER TRANSFER 4 5-F1-91373 WTR WAFER CHUCK 1 5-F1-91374 WTR WAFER CHUCK (L) 1 5-F2-02484 QTZ BATH HEATER 1 5-F2-08483 WAFER GUIDE RETAINER 2 5-F2-08484 WAFER GUIDE LOWER 1 5-F2-72784 MAIN SHAFT 1 5-F3-02026 LID 2 5-F3-02027 AUTOMATIC COVER 1 5-F3-05839 TEFLON SHEET 1 5-F3-05843 EXHAUST PARTITION 1 5-F3-07403 TEFLON SHEET 1 5-F3-07444 CHUCK HANGER 1 5-F3-16562 SEAL, BALL 2 5-F3-31157 SHUTTER VALVE BRACKET 1 5-F4-01725 COUPLING FLEXIBLE (TR) 1 5-F4-01725 COUPLING FLEXIBLE (TR) 4 5-F4-04086 BOSS 1 5-F4-07868 TEMPERATURE ELEME 2 5-F4-08343 TEFLON SHEET 1 5-F4-08344 TEFLON SHEET 1 5-F4-08346 TEFLON SHEET 1 5-F4-21488 FLANGE 4 5-F4-22290 RETAINER FULCRUM 2 5-F4-32341 CASSETTE GUIDE 1 5-F4-70481 PIN, CHUCK 2 5-F4-73546 VALVE 2 5-F4-73989 SENSOR, TEMPERATURE 2 5-F4-90106 LM BEARING 2 5-F4-90456 HEATER TUBE 1 5-F4-95031 SEAL, MEASURING TANK 10 5-J4-17466 SIGHT TUBES 2 5-R4-13578 CABLE, ROBOT 3 52-314340-02 GEAR HEAD (SCREEN) 7 54601408 COUNTERS 2 54602614 CONTROL, HUMIDITY LOVE 2 566015 LENSE, OBJECTIVE PL APO 150x 2 7-39-00516 CYLINDER 1 7-39-01148 AIR CYLINDER S-TY 1 7-39-01428 SPRING 9 7-39-02424 INDICATOR, PRESSURE DPC5-5 5 7-39-02798 VALVE,SOLENOID 2 7-39-03092 RUBBER BELT (SCREEN) 1 7-39-03103 VALVE, AIR (CHEM CABINET) 1 7-39-03335 DRIVER, MOTOR 1 7-39-03351 SERVO MOTOR, AC (S/D) 1 7-39-03407 O-RING 2 7-39-03579 POWER CONNECTOR 6 7-39-03783 METER, RESISTIVITY,871CC-A6-4 4 7-39-04036 CYLINDER, AIR (SPLASH GUARD) 3 7-39-04039 CYLINDER, AIR (SPIN) 4 7-39-04044 CONTROLLER, SPEED SC4-M5A-4W 1 7-39-04798 CYLINDER BLOCK 1 7-39-04949 AC SERVO MOTOR 2 7-39-05056 VALVE,SOLENOID 5 7-39-05057 VALVE, SOLENOID VJ3233Y-5LOZ-X31 1 7-39-05058 SOLENOID VALVE (SCREEN) 2 7-39-05303 FITTING 1 7-39-06032 CYLINDER 1 7-39-06128 CYLINDER 9 7-39-06968 SWITCH, MANOSTER MS-61L-VT50-300PA 7 7-39-07183 FILTER AIR 1 7-39-13043 E-RING 6 7-39-20508 FILTER, MILLIPAK MPGL-10CBJ 1 7-39-22929 RECIEVER SHAFT 3 7-39-24093 O-RING 3 7-39-26312 GAUGE, PRESSURE (KNDS) 3 7-39-26474 MONITOR,RESISTIVITY,AQ-10 4 7-39-26634 SENSOR,PHOTO,MICRO,EE-SX671 5 7-39-27266 AIR,VALVE,DS-7270-131 1 7-39-27331 THUMB KNOB 2 7-39-27383 ROTARY ACTUATOR 1 7-39-27417 O-RING 7 7-39-27418 SYNCHRO BELT (SCREEN) 11 7-39-27428 LIP SEAL 12 7-39-27437 LIP SEAL (SCREEN) 2 7-39-27492 LIP SEAL 1 7-39-27612 BEARING 1 7-39-27616 MINIATURE BEARING 1 7-39-27650 BELT 5 7-39-28511 BLANK CAP 6 7-39-28719 VALVE,AIR,DS-7270-132ZH 1 7-39-28750 SEAL 7 7-39-28853 OIL SEAL 2 7-39-29125 MOTOR, STEPPING 1 7-39-29148 AIR VALVE (SCREEN) 1 7-39-29298 PNEUMATIC VALVE 2 7-39-30810 CASSETTE 1 7-39-30834 OUTPUT UNIT 2 7-39-30855 POWER SUPPLY UNIT 2 7-39-31647 24 VOLT AC POWER SUPPLY 1 7-39-32817 SENSOR, AMPLIFIER SS-A5 2 7-39-32922 FIBER OPTIC CABLE 2 7-39-33310 DATA LINK UNIT 1 7-39-33447 MOTION DETECTOR 1 7-39-33728 BOARD, ENC 1 7-39-33731 BOARD, PMC 1 7-39-33748 BOARD, IDC 1 7-39-33760 BOARD, REMOTE I/O (MAIN CONTROLLER) 3 7-39-33893 CONTROLLER, TEMP 2 7-39-34342 TEMPERATURE CONTROLLER (SCREEN) 1 7-39-34345 THYRISTOR UNIT AC 200V ON 1 7-39-34346 SENSOR, LEVEL, DSX-L48 (KDNS) 2 7-39-34358 POWER SUPPLY AC100V/DC24 2 7-39-34474 SWITCH, KEY 166-3E11 1 7-39-52120 MOTHER BOARD A 1 7-39-52123 MOTHER BOARD A 1 7-39-52127 MOTHER BOARD A 1 7-39-52128 MOTHER BOARD B 1 7-39-52134 MOTHER BOARD B 1 7-39-52136 PUMP CONTROLLER BOARD 1 7-39-52137 POWER FAILURE DETECTOR/SSR BOARD 1 7-39-52139 MASTER PANEL 1 7-39-53685 MOTOR, AC SERVO 2 7-39-54149 MOTOR, STEPPING 2 7-39-67359 PURGE METER ASSY 2 7-39-75008 BOARD, HLS-D016 SL- 1 7-F2-94011 SPIN BELLOWS 2 7-F2-94078 COVER 2 7-F3-14229 L.M. GUIDE 2 7-F3-16943 L.M.GUIDE 1 7-F3-23304 BALL SCREW 17 7-F3-94545 ATTACHMENT 1 7-F3-95107 CASSETTE GUIDE (UL) 1 7-F3-95108 CASSETTE GUIDE (UL) 3 7-F3-95429 ARM COVER 2 7-F3-95649 SHAFT 1 7-F3-95752 SPIN SHAFT 4 7-F3-95921 ARM 2 7-F4-10498 COIL SPRING 1 7-F4-11864 AXIS (SCREEN) 2 7-F4-22153 TIMING PULLEY 1 7-F4-29186 ROLLER(1) 1 7-F4-29187 ROLLER(2) 1 7-F4-30429 PULLEY (SHUTTLE TRUCK) 1 7-F4-93045 WASHER 1 7-F4-93123 STOPPER 1 7-F4-93145 COLLAR 1 7-F4-93146 COLLAR 1 7-F4-93149 SPRING HOOK 1 7-F4-93150 ARM 1 7-F4-93160 BOLT 2 7-F4-93164 KEY PIN 1 7-F4-93382 SENNSING PULLEY 1 7-F4-93840 NOZZLE 3 7-F4-94547 BOWL SCREEN 41 7-F4-95981 CHUCK PIN 23 7-F4-96207 CHUCK PIN 34 7-F4-96209 SPIN CHUCK PIN 83 7-F4-96281 TEFLON COATED MACHINE SCREW 1 7-F4-96767 GUIDE, LM (ARM TRANSPORT) 4 7-F4-96955 LINK (SCREEN) 4 7-F4-96970 SHAFT 1 7-F4-96990-A SENSOR, TEMPERATURE 1 7-F4-97831 GUIDE, LM (ARM TRANSPORT) 1 7-F4-97896 ARM PIN 1 7-F4-98115 PLATE 1 7-F4-98128 PACKING 2 7-F4-98405 INNER SHAFT 4 7-F4-98516 BOLT 2 7-F4-98680 BOLT 1 7-F4-99569 WASHER UPPER 2 7-F4-99570 WASHER (LOWER) 5 7-R3-19021-0 BOARD, I/O RELAY 1 705A12A1 KIT INDEXER SET-UP 1 9EIO-4011 I/O BOARD 2 9SSC-1003 FILTER 9 (SCREEN) 2 9SX00004 VALVE,SOLENOID,3 PORT 2 9SX00006 VALVE,SOLENOID,4 PORT 1 9SX00032 AIR CYLINDER 1 9SX00073 THERMOCOUPLE 1 9SX00117 CUP RING 6 9SX00133 JETS,BSR,U-TURN PVC 4 9UVP0006 STANDOFF,CERAMIC,31MM 12 9UVP0011 SCREW,M4 X 4.5, FLAT 1 9UVP0032 STEPPER MOTOR 6 9UVP0060 NUT,ANODIZED HOIST 1 9UVP0067 CAP,CATHODE STANDOFF 1 9UVP0068 CAP,MANDELA SCREW 1 9UVP0070 STEPPER MOTOR CONTROLLER 3 9UVP0076 CONTACT,BRASS 6 9UVP0077 SCREW,M04 X 06 6 9UVP0078 WASHER,MO4 4 9UVP0081 CAPACITOR,BYPASS 2 9UVP0082 CAPACITOR,BYPASS 2 9UVP0083 CAPACITOR,BYPASS 1 9UVP0087 MATCH UNIT WITH CONTROLLER 4 9UVP0088 CONTACTOR,TERMINAL 1 9UVP0101 GATE COMPL. 2 9UVP0105 MIRROR,SECONDARY (NWS) 1 9UVP0109 ASSY,LEAD SCREW,VCE 4 9UVP0110 COLLAR, INSULATION 1 9UVP0114 BOX SWITCHER 4 9UVP0134 COLLAR 10 A113558 O-RING 1 A118613 FROG LEG 1 AC-100W MOTOR, SPINDLE 2 AMB01-6-5 VALVE, AIR OPERATED 1 AMD312-15BUS-10-23Z AIR VALVE 1 AMD512-15AU-20-03Z AIR VALVE 1 AMD512-20AU-20-03Z AIR VALVE 1 AMD512-25BUS-20-03PZ AIR VALVE 3 AMS02-6 VALVE, SUCK BACK 2 AP11-8A-03A I/O VALVE 1 AP11-8A-M3A-DC24V 2WAY SOLENOID VALVE 1 AR2500-02 REGULATOR 1 AR3000-03 REGULATOR 1 AV-5259-131 VALVE 2 AV-5269-131 VALVE (ADVANCE) 1 AX42 PROGRAMMABLE CONTROLLER 2 AX71 INPUT MODULE 3 B5136-MOC3-M5 SENSOR 1 B5136M0C3-DC24V VALVE, SOLENOID, 3 PORT 1 B5136M6C3V-DC24 VALVE, SOLENOID VACUUM 3 CDJ1B15-110 CYLINDER 2 CDJ1D15-30-G79 AIR CYLINDER 2 CDJ1D15-85 CYLINDER 1 CDQ2B16-10DC CYLINDER 1 CDQ2B16-10DC-A80 CYLINDER, AIR 3 CDQ2B16-10DCA806 CYLINDER 9 CDQ2B16-30DC-A80 CYLINDER, AIR 2 CDQ2B20-10DCM CYLINDER 4 CDQ2B20-40DC-A80 CYLINDER, AIR 1 CDQ2B32-5DC PNEUMATIC CYLINDER 4 CDQ2KB12-50CM-F79LS-XG17H16 CYLINDER 2 CDQSB20-10D CYLINDER,AIR LIFT 2 CDQSB20-15D AIR CYLINDER 2 CDRQBW15 ACUATOR 1 CEEB-0011 PCB LINK UNIT DNS 60A 1 CESB-002 PCB LINK UNIT DNS 60A 2 CHB12-009 FITTING 2 CRB1BW20-270S ACTUATOR, ROTARY (CDRB1WU20-27) 1 CTO23-000055-1 TIMING BELT 1 CTO23-100559-1 TIMING BELT 105T80 1 CV500-LK201 PLC LINK UNIT 1 CV500-SLK21 PLC LINK UNIT 1 D113224 SRAP, RF 1 D113744 INDUCER COIL 1 D122104 PLATE INTERRUPT 2 D122201 VALVE 1 D122310 SHLD, CATHODE ADAPTOR 14 D124841-S ADAPTOR SHIELD 1 D126306 RACK, MODIFIED 1 DB-48H4C-R01E THERMO CONTROLLER 1 DPX-210 SENSOR 3 DS-502M PCB IVS DS-502M 2 DS-5X2M PCB ASSY 1 DS-7260-131 AIR VALVE (ADVANCED) 2 DS-L10 SENSOR 1 DS-L104 DIFFERENTIAL SENSOR 1 DS-L10H SENSOR 1 DS-L10H SENSOR 1 DWG-JB1001 BUMP, GUARD 2 E0R04-203 SENSOR, PHOTO P/C BOARD 1 E0R05-1028 BOARD, OPERATION SW 2 E0R05-1029 BOARD, PSU 4 E0R05-1031B BOARD,CPU 2 E0R05-1032A BOARD, I/O 1 E0R05-1039 BOARD,RECEIVED WAFER 2 E0R05-1053A BOARD,SEMIX,I/O 1 E0R05-1068C BOARD, PULSE MOTOR 1 E0R05-1072E BOARD, SUB CPU 2 E0R05-1072E-3 SUB, PCB 1 E0R05-1073C BOARD, SUB I/O 1 E0R05-1073C BOARD, SUB I/O 1 E0R05-1086A BOARD, TEMP DISPLAY 1 E0R05-1089A BOARD,OPERATION KEY 1 E0R05-1110A BOARD,TEMP DISPLAY 2 E0R05-1163 BOARD, SENSOR MOUNTING 1 E0R05-1254 BOARD, SUB I/O EXPANSION 1 E0R05-1625A PCB, ALARM TEMPERATURE 1 E0R05-1625B BOARD, ABNORMAL TEMP DETECT 2 E0R05-1656 BOARD, SPI, PCB 1 E0R05-1656 BOARD, SPI, PCB 1 E0R05-1779B BOARD, OSCILLATOR 1 E0R05-199 BOARD, SENSOR MOUNTING 2 E0R05-203 BOARD, SENSOR MOUNTING 1 E0R05-2661 BOARD, PULSE GENERATOR 1 E0R05-2661B BOARD, PULSE 1 E0R05-2710 BOARD, 64K MEMORY 1 E0R05-2710 BOARD, 64K MEMORY 1 E0R05-2977 BOARD, OUTPUT 1 E0R05-3108 BOARD, ALARM, PC 1 E0R05-3249 BOARD, OPERATION PC 2 E0R531918 BOARD CPU 1 EE-SX671A SENSOR,PHOTO MICRO,OMRON 1 EE-SX673 PHOTO MICRO SENSOR 1 EOR05-1072F PCB CPU 1 EOR05-2708 PC CONVERTOR BOARD 1 EORO5-1072 PCB 1 EORO5-1656 BOARD, SPI, P.C.B. 1 EORO5-1812 BOARD, TERMINAL CONTROLLER 1 EORO5-1813 BOARD, LCD CONTROLLER 1 EORO5-2710 BOARD, 64K MEMORY 2 FU-93 FIBER FOR LIQUID LEVEL SENSOR 1 GAMD34-X0001 VALVE DRAIN 2 HAM-AG01 BASE HAMMAMATSU LAMP SOURCE BASE/LENS ASSEMBLY 2 HAM-AG06 ASSEMBLY HAMMAMATSU LAMP SOURCE SHUTTER 2 HAM-AG610 PCB SENSOR BOARD DNS EEW FILTER ASSY 1 NEC-PC-FD312R DRIVE, FLOPPY, 3.5" DUAL EXTER 20 NT30-KBA04 PROTECTIVE SHEET 1 PCB-241-NB-024PK SOLENOID, DOUBLE 1 PCS-241-NB-D24-PK SOLENOID VALVE W/ 4 PARTS 4 PS-201 PHOTO SENSOR 2 PT-005J1A GENERATOR, DESONIC 1 RAP5-90-DS-CS7J2 ACTUATOR, ROTARY, AIR 2 RS-520L SENSOR 1 RS-803N0 MAGNETIC COVER 1 S-F4-52003 PR BOTTLE CAP OUTER 1 S-F4-52010 PR BOTTLE CAP INNER 1 SEAD-104 BOARD, CONTROLLER 1 SEAD-204 PCB, ANALOG 1 SECU-006 5"PC B/D,B-I/O,DVEN 1 SEIO-006 5"PC B/D,C-MEMORY/SERIAL,MA 1 SEKC-0011 POWER SUPPLY 1 SELC-0041 ELEVATOR ASSY 1 SEMR-104 BOARD 1 SEMS-006 5"PC B/D, B-PULSE, OVEN 2 SH5M110V9WCDS CONTROLLER MACHINE TIMED 6 SHC-04-046-0 LM-BALL LM8 COATER 2-39-07827 16 SHC-05-006-0 LM-BALL LM6 COATER 1 SLM-4-005 ELEVATOR, AMPLIFIER 1 SS10-TR48 SENSOR 3 SSC-004 SPIN CHUCK 1 SU2A1 FAN MODEL SU2A1 SPRITE3INCH X 3INCH 2 SX-21 BEAM SENSOR UNIT, TRANS & REC 1 SX150U-24S POWER SUPPLY 6 T5-10-50 TIMING BELT 3 T5-10-60 TIMING BELT 1 TDAS10X30-CS3H CYLINDER, AIR 1 TS35ION29E61 SERVOMOTOR (TAMAGAWA SEIKI CO) 12 UE4N FITTING UE4N TUBE 1/4 INCH ELBOW FITTING 1 V050E1 VALVE, SOLENOID 2 VJ3130 VALVE 1 W-39-50178 MOTOR STEPPING UPK596H 3 WED-WD43AA MIRROR DRIVE 1 ZSE2-T1-15C VACUUM SEMSOR.