二手 EATON NOVA / AXCELIS Lot of spare parts #9304170 待售

Qty / Part number / Model / Description (5) / SDP A 6R 6-0640180 / 6200 / time belts (2) / 3200023 500AB 3 1 / 10-80 / Humphrey (1) / 0020-35764 EEP-P1-355 / - / Slit valve (3) / 0042-0001 / 6200AV / Bearing thrusts (4) / 006-062-001 / 6200 / Bearing rotaries (2) / 0100-00435 / 3206 / Coupler shaft / Spindle MOT (1) / 0100-90229 / Unknown / Blade controller, 8" (7) / 0110-0003-0016 / 6200AV / Nut spacers (3) / 0110-0003-0019 / 6200av / Spacers 110-004-158 (14) / 0110-0003-0062 / 6200AV / Nut insulatings (13) / 0110-0003-0063 / 6200AV / Nut insulating tops (15) / 0110-0004-0160 / 6200 / Ball bushing spacers (8) / 0110-0004-0161 / 6200AV / Tilt cam follower shafts (1) / 0110-0005-0019 / 6200 / Spacer (5) / 012-038 / 6200A / Coupling shafts (1) / 012256 / 6200A / Ion gauge cable (1) / 01281617-01 / - / PHD Ap 1 1/8x2-D-P (3) / 0141-0002-0001 / 6200 / Rotary actuators R11A 3180-B-M-O (2) / 0141-0018-0001 / 6200A / Load switch actuators (3) / 0141-0021-0001 / 6200 / Beam shutter assys (3) / 0154 / 6200 / Seals (3) / 021-NR QJ / 6200 / Bimba (5) / 0243-1454-0002 0342-0709-0001 / 3206 / HV Probers (1) / 0248A-14128 / - / S Valve (1) / 0261-0010-0001 / 8200 / Amplifier servo brush, type: DC 5A5 (26) / 0295-0006-2001 / 6200 / Pac man apertures (4) / 0295-0014-2001 / 6200AV / Quadrapole apertures (12) / 0295-0016-1001 / 6200 / Beam shutter Apertures (21) / 0295-0017-2001 / 6200 / Defining aperture plates (1) / 0295-0043-0001 / 3206 / Aperture upstream (5) / 0295-0044-0001 / 3206 / Aperture aluminiums (3) / 0298-0125-0001 / 6200 / Inner chamber upload arms, 6" (1) / 0298-0129-0001 / 6200A / Chamber upload arm, 5" (2) / 0298-0167-0001 / 8200A / Pick arms, 5" (4) / 0301-0068 / 3206 / Switch interfaces (1) / 03030 / 10-80 / Translator board (2) / 0303-0124 / 3206 / PCBs (1) / 03-16698-00 / 10-80 / CV-Colbilt (9) / 0342-0049-4001 / 6200 / Chamber Vac (13) / 0342-0050-4001 / 6200 / Condition module assys (11) / 0342-0138-4001 / 3206 / A 17 Beam current display drivers (9) / 0342-0139-4001 / 6200 / Process controllers A-15 (4) / 0342-0148-4001 / 3206 / Control panels with PCB (6) / 0342-0156-4001 / 3206 / I/O Status displays A4 (10) / 0342-0160-4001 / 6200 / Relay driver interfaces A-2 (12) / 0342-0161-4001 / 6200 / A-13 (3) / 0342-0164-4001 / 10-80 / HVPS Controllers A-10 (9) / 0342-0175-4001 / 6200 / System alarms A-12 (2) / 0342-0185 / 3206 / A3 (3) / 0342-0217 / 6200 / Beam monitors (5) / 0342-0218 / 3206 / Beam monitors Amp (1) / 0342-0219 / 3206 / B-4 Sensor amplifier (1) / 0342-0219-4001 / 6200 / Sensor Amp (4) / 0342-0221-4001 / 3206 / B12 Carrier motor drives (1) / 0342-0228-4001 / 3206 / B5 (10) / 0342-0254-3001 / 6200 / Magnet power supply registers (7) / 0342-0256-4001 / 3206 / Source terminal data links (2) / 0342-0257-4001 / 3206 / Magnet term data links (5) / 0342-0259-3001 / 6200 / Source insulators (16) / 0342-0261-4001 / 6200 / Extraction housing assys with source insulators (4) / 0342-0274-200 / 3206 / Surge resistor assys (18) / 0342-0290-4001 / 3206 / Arc discharges PS (13) / 0342-0291-4001 / 3206 / Filaments PS (36) / 0342-0311-1001 / 6200 / Accel / Deccel feedthrus (17) / 0342-0369-3001 / 6200 / Copper filament buses (3) / 0342-0369-3002 / 6200 / Filament rods (32) / 0342-0375-3001 / 6200 / Supressor screen completes (35) / 0342-0384-1001 / 6200 / Suppressor feedthrus (6) / 0342-0406-4001 / 3206 / Magnets PS (6) / 0342-0408-0001 / 6200 / Beam current intergrators 2 (5) / 0342-0413-4001 / 3206 / A 16 PCBs (5) / 0342-0433-4001 / 3206 / Valve drivers (2) / 0342-0436-3001 / 3206 / Indexer port loads (4) / 0342-0437-4001 / 3206 / Wafer cooling controllers (5) / 0342-0441-4001 / 3206 / I/O E4 (5) / 0342-0442-4001 / 3206 / Driver displays (5) / 0342-0445-4001 / 3206 / Termocouple amplifiers E9 (6) / 0342-0448-4001 / 6200 / CPUs E-3 (5) / 0342-0450-4001 / 6200 / E-2 (1) / 0342-0452-3001 / 3206 / Endstation keybaord (5) / 0342-0452-4001 / 3206 / Microprocessors E7 (8) / 0342-0458-4001 / 6200 / E6 (10) / 0342-0459-4001 / 3206 / E8 Interfaces (7) / 0342-0466-3001 / 3206 / Wafer sensor assys (5) / 0342-0519-2001 / - / Vaporizer source crucibles (1) / 0342-0522-0001 / 6200 / PCB (80) / 0342-0549-2001 / 3206 / Resistors STL12 (4) / 0342-0565-3001 / 6200 / Cooling plates (3) / 0342-0568-2001 / 6200 / Oven TC vaporizer SCE plates (10) / 0342-0576-4001 / 6200 / HV PS Controllers A-10 (1) / 0342-0581-2001 / 3206 / Plate assy oven gas (5) / 0342-0589-2001 / 6200 / Vaporizer heaters (9) / 0342-0601-4001 / 6200 / Filament controllers (6) / 0342-0607-0001 / 6200 / A-19 (11) / 0342-0646-2001 / 6200 / Lens feedthru (5) / 0342-0647-4001 / 6200 / Electrostatic quadrapoles (4) / 0342-0648-3001 / 6200 / Accel colloumb (22) / 0342-0652-4001 / 6200 / Terminal HV data links (2) / 0342-0667-3001 / 6200A/AV / Rotary shutter assys (27) / 0342-0668-4001 / 6200 / Printer interfaces (5) / 0342-0678 / 3206 / Scan Amps (6) / 0342-0679-4001 / 6200 / System monitor interfaces A-20 (3) / 0342-0681-4001 / 3206 / PCBs (8) / 0342-0684-4001 / 6200 / I/O Status interfaces A-1 (3) / 0342-0685 / 3206 / Autoflood controllers (3) / 0342-0689-4001 / 3206 / PCB in computers (5) / 0342-0707 / 3206 / Interface computers (2) / 0342-0716-4001 / 3206 / Discharge power supply PCBs (1) / 0342-0717-4001 / 6200 / AMU Assy (5) / 0342-0722-4001 / 3206 / 100 Meg 1% Resistor completes (1) / 0342-0748-0001 / 3206 / CAP PCB (3) / 0342-0810 / 3206 / Beam scanner controllers unit 300 (4) / 0342-0854-4001 / 3206 / Auto register controllers unit 500 (1) / 0342-0887-4001 / 6200 / Insulator column (1) / 0342-0887-4001 kit / 6200 / Pumping tube kit (2) / 0342-0900-4001 / 3206 / Indexer drivers (2) / 0342-0906-4001 / 6200 / Data links (5) / 0342-0908-0001 / 6200 / Data links (3) / 0342-0910-4001 / 6200 / SERVO Amps (1) / 0342-0913-0001 / 6200 / Keyboard (1) / 0342-0917-0001 / 4206 / Term and accelerator controller (1) / 0342-0918-0001 / 4206 / Terminal controller (2) / 0342-0922-4001 / 6200 / Drivers (7) / 0342-0934-3001 / 6200 / Corona shields (1) / 0342-0967-4001 / 6200 / Power monitor (1) / 0342-0977-4001 / 6200 / Input / Output H-3 (4) / 0342-0983-2001 / 6200 / Opto slotted sensors (2) / 0342-0987-0003 / 6200 / So Line (3) / 0342-0987-4001 / 6200 / Buffers H6-H9 (2) / 0342-1000-4001 / 6200 / Power I/Os H-4 (2) / 0342-1013-4001 / 6200 / End stations MPV H-2 (1) / 0342-1027-0002 / 6200 / High current MTR driver (2) / 0342-1027-4001 / 6200 / PCBs (7) / 0342-1033-4001 / 6200 / Isolation buffers (1) / 0342-1049-0001 / 6200 / Scan generator horizons (1) / 0342-1049-0003 / 6200 / Scan generator horizons (2) / 0342-1050-0001 / 6200 / Scan generator verticals (1) / 0342-1050-0003 / 6200 / Scan generator verticals (1) / 0342-1051-0001 / 6200 / Scan clock card (1) / 0342-1052-0001 / 6200 / Scan system K-5 (3) / 0342-1052-0002 / 6200 / Scan systems K5 (3) / 0342-1053-0001 / 6200 / Multifunctionals K-6 (5) / 0342-1054-0001 / 6200 / Front panel I/Os K-7 (1) / 0342-1056 / 6200 / Beam monitor (2) / 0342-1077-4001 / 6200 / A24 (2) / 0342-1084-2001 / 6200 / Card rack cables (2) / 0342-1101-4001 / 6200 / Source data link terminals (2) / 0342-1142-2001 / 6200 / Sensors D (2) / 0342-1312-1001 / 6200 / Gas bottles CGA 180 (1) / 0342-1331-0001 / 10-80 / Beam monitor backplane (1) / 0342-1334-0001 / 3206 / PCB (1) / 0342-1340-0001 / 6200 / Scan plate (2) / 0342-1363-0001 / 6200 / High temperature vaporizer crucibles (3) / 0342-1402-0001 / 6200AV / Scan Amp HV modules (1) / 0342-1403-0002 / 6200 / Electronic module assy (2) / 0342-1429-0001 / 6200AV / Magnet power supplies (2) / 0342-1432-0001 / 6200A/AV / Filament power supplies (1) / 0342-1435-0001 / 6200AV / Discharge power RE (3) / 0342-1446-0001 / 6200 / Inner magnet liner assys (7) / 0342-1449-001 / 6200 / Outer magnet liner assys (7) / 0342-1487-0001 / 6200 / Scanner cable kits (1) / 039778 / 10-80 / Sensor A (2) / 040.5-DP / - / Bimba cylinders (4) / 0455-0001-0002 / GSD / Beeds (6) / 0469-0006-0002 / - / Bearings MFS 3KDD (4) / 0469-0007-0001 / 6200 / Bearing flags tapered (3) / 0470-0001-0001 / 6200AV / Thrust needle bearings (50) / 0471407501 / 10-80 / Inserts (4) / 0475-0012-0001 / 6200 / Slit bellows (1) / 0478-0001-0001 / - / Upper bell lock (19) / 0483-0004-0001 / 6200 / Timing belts 56 Grooves (37) / 0483-0005-0001 / 6200 / Timing belts 115 Grooves 5/16W 176704 (109) / 0547-0068-0001 / 6200 / Graphite outer liner replacements (2) / 0547-0069-0001 / 6200 / Magnet liner blocks (2) / 0547-0076-0001 / 6200A / Rod support blocks (2) / 0547-0092-0001 / 6200A / lower drive blocks (1) / 0567-0026-4001 / 3206 / Extender board (5) / 0567-0052 / 3206 / Relay panels (3) / 0567-0053-4001 / 3206 / Beam current display drivers (6) / 0567-0064-4001 / 3206 / I/O Switch interfaces (3) / 0567-0109-0001 / 3206 / - (2) / 0567-0137-0001 / 3206 / - (2) / 0567-0228-0001 / 6200A / Ion gauge controllers BD (1) / 0567-0230-0003 / 6200A / End station controller (1) / 0567-0230-0008 / 6200A / MPU (1) / 062 4E1 36 / - / Humphrey Valve (38) / 0762-0031-0004 / 6200 / Linear bearings super 8 (9) / 0762-0060-0001 / 6200A / Plastic bushing assemblies (1) / 0781-0020-0002 / 3206 / SEO Cable assembly (6) / 0781-0133-0001 / 6200 / Vaporizer cables (1) / 0781-0307-0001 / 10-160 / Photo interuptor (1) / 0781-0329-0001 / 10-160 / Home sensor cable (1) / 08060020001 / 6200 / Loadlock CAM 7-27 (157) / 0843-0007-2001 / 6200 / End cap non couter sunks (7) / 08484001 / 350D / 350D Ion source completes (5) / 0854-0001-0001 / 6200 / DI Water filters (6) / 0854-0004-0001 / 6200A / Differential seals (2) / 0854-0005-0001 / 6200A / Seal cartridges (20) / 0871-0002-0001 / - / Catch flanges dorlec DLH-067 (3) / 0895-0005-4001I / 6200 / Arc chambers improved (5) / 0896-0005-4001 / 6200 / Standard arc chambers (3) / 09-04399 / 6200 / Power distributions (3) / 09-04433 / 10-80 / I/O Expansions (1) / 0906-0089-0001 / 6200 / Ion gauge controller (4) / 0906-0191-0001 / 6200A / 6200/A Chamber vertical motor driver retrofits (1) / 0906-0235-0001 / 6200 / Ion gauge controller (1) / 092-DP / - / Bimba 092-DP (28) / 0951-0003-1001 / 6200 / Filament clamps (30) / 0981-0005-1001 / 3206 / Filament support collars (1) / 100.019.006 / 6200 / Part (1) / 100-005-018 / 6200 / Flange cartridge (1) / 100-010-304 / 6200 / Interior arm loader, 6" (4) / 100-010-330 / 6200 / Arms, 6" (1) / 100-019-007 / 6200 / Tool (1) / 100-019-008 / 6200 / Tool (1) / 100-019-026 / - / Plate (1) / 100-019-027 / 6200 / Plate (1) / 100-019-028 / 6200 / Plate (2) / 100-019-029 / - / Tools (8) / 1001-0016-0001 / 6200 / SKM Electrode connectors (2) / 10020721 / - / Seal pumps (3) / 10021865 / 10-80 / Clampless disks, 6" (1) / 1007-1063 / 6200 / Process transport I/O (2) / 100B110 / - / Flow switches (1) / 101-0692 / 6200 / Motor (1) / 1020 / 10-80 / Modulas one (1) / 1027-0068-0001 / 8200 / 133 Cell controller (1) / 103-540-26 / - / SANYO DENKI 103-540-26 Motor stepper assy Z (1) / 1046-TE44-1032 / 6200 / Cat valve (4) / 1062DVS-3.00-1 / 6200 / American beam shutter cylinders (1) / 1066-0002-0001 / 6200 / Coupling flexible (8) / 1066-0006-1001 / 6200 / Open crucible couplings (3) / 1066-0007-1001 / 6200 / Closed crucible couplings (1) / 1066-0036-0001 / 6200 / Coupling pump (2) / 107375001 / 6200 / U44 EPROM 9/18/92 (7) / 1097100 / 10-80 / Source gates (14) / 1097101 / 10-80 / Source gate shims (1) / 10C19B4-1 / - / Valcor valve Cv 120 125 PSI 115v/60Hz 10W (1) / 10PS-P10 / - / Sprague 1UF 1KV non polarized capacitor (1) / 1100001 / 10-160 / Kaiser tank (1) / 110-0012-0038 / 6200AV / Shaft coupling (1) / 110-003-002 / 6200 / Main clamp ring (30) / 110-003-019 / 6200AV / Pivot bearing caps (14) / 110-003-064 / 6200 / Washers brown (15) / 110-003-065 / 6200A / Ball bearings (3) / 110-004-001 / 6200 / Timing belts (1) / 110-004-082 / 6200 / Idler bearing (12) / 110-004-158 / 6200A / Cam base spacers (15) / 110-004-159 / 6200AV / Cam follower caps (1) / 110-004-161 / 6200 / Tilt cam follow shaft (3) / 110-005-004 / 6200 / Lift rods (7) / 110-005-016 / 6200AV / Cartridge Bot Flange (1) / 110-005-017 / 6200 / Differential seal (6) / 110-005-018 / 6200A / Cartridge top flanges (7) / 110-005-020 / 6200A / Seal reainers (13) / 1100054 UA740C - / OP Amp ua740c (7) / 110-006-001 / - / Bearings KAA15XL0 (5) / 110-006-009 / 6200 / Spacers (1) / 110-006-023 / 6200 / Plate arm mounter (6) / 110-007-0032 / 6200 / Yoke cam followers (1) / 110-007-023 / - / Main drive system block (4) / 110-007-028 / 6200AV / Micro slides (2) / 110-007-029 / 6200AV / Precision bearings (7) / 110-007-030 / 6200 / Bearings (20) / 110-007-044 / 6200 / Springs 6200 (2) / 110-007-051 / 6200 / Align rod couples (1) / 110-007-179 / 6200 / Mod bod cam loadlock (1) / 110-009-008 / - / Vert ball bushing (10) / 110-009-009 / 6200 / Horizontal ball rods (5) / 110-011-002 / 6200 / Shafts 110-011-002 (1) / 110-012-016 / 6200A / Bearing screw shaft (5) / 110-012-052 / 6200A / Bearings (4) / 1100310 / 10-80 / Arc current power supplies (1) / 1100311 / 10-160 / Arc power supply (2) / 110040630 0692-0001-0001 / 6200 / Silver brushes for RAWSON-LUSH Gaussmeter set (2) / 1101490 / 10-80 / V2 Source valves (3) / 1101518 / 10-160 / Vaporizers PS (1) / 11017 / 3206 / Microprocessor F9 (7) / 1101850R / 10-80 / Analyzer magnet PS master and slave (1) / 1101860 / 10-80 / Source magnet power supply (2) / 1102200 / 10-80 / 80KV Water baffles (1) / 1102220 / 10-80-160 / Water flow meter (10) / 1102460 / 10-80 / Extraction electrode assys (2) / 1103600 / 10-80 / AMU Controller B (2) / 1103670 / 10-80 / Sliding seal plates (6) / 11038800 / 10-80 / Waveguide (1) / 1104130 / 10-80 / High voltage resistor assy (1) / 1104430 / 10-160 / Y-Scan monitor panel (2) / 1104900 / 10-80 / Accel / Deccel PS (6) / 1105172 / 10-80 / V17 Valves (2) / 1105440 / 6200 / Gas controllers (6) / 1105441 / 10-160 / Leak valve actuator assemblies (3) / 1105670 / GSD / Leak valve actuator assemblies (1) / 110567-001 / 6200 / Z80 Processor (7) / 1105840 / 10-80 / Disk sensors BD 2 (1) / 1105950 / 10-80 / Rotary drive (3) / 1107000 / 10-80 / Disk faraday assy (2) / 1107130 / 10-160 / Door stepper P.S (3) / 1107320 / 10-160 / AT-4 Stepper P.S (2) / 1108180 / 10-160 / Rotating stage motor assembly (2) / 1108181 / - / Rotating stage motor assembly (1) / 1108700 / 10-160 / Control power assy (2) / 1108760 / 10-160 / Status display panel (2) / 1110390 / 10-80 / 12 V 50 A Var. power supply (1) / 1110410 / - / Accel Electrode Complete (8) / 1110542 / 10-80 / Flag assy. (1) / 1111920 / 10-160 / AMU Controller (1) / 1112290 / 10-160 / Remote beam con. (10) / 1112350 / 10-80 / Waveguide outer linear assy (1) / 1112540 / 10-160 / Gas box controller (2) / 1112560 / 10-80 / Flood power supply (1) / 1113630 / 10-160 / Adjustable slit flag (3) / 1115040 / 10-80 / Dose controller (1) / 1115100B / 10-80 / Back cover vacuum controller (1) / 1115100F / 10-80 / Front panel vacuum controller (1) / 1115150 / 6200AV / Shorting bar (1) / 1115610 / 10-160 / AMU Controller (1) / 1115620 / 10-160 / AMU Controller (3) / 1115930 / 10-160 / Beam controller CRT (1) / 1115970 / 10-80 / Light pipe com. (1) / 1116341 / 10-80 / Input Vac chuck 6 in assy. (1) / 1116600 / 10-80 / Vaporizer power supply (1) / 1116750 / 10-160 / Remote disk beam controller (2) / 1119160 / 10-80 / Soure beam controller (2) / 1120805 / 10-160 / Wafer stage (2) / 1121150 / 10-160 / Flood power supply (1) / 1121230 / 10-80 / Rotary drive P.S. (178) / 1121406 / 6200 / Copper gasket (2) / 1121450 / 10-80 / Control power assy (15) / 1121510 / 10-80 / Disk grounding kit (1) / 1122000 / 10-160 / Surpression P.S. (1) / 1125470 / 10/80 / Chamber door sensor (22) / 1127550 / 10-80 / Source For 10-80/160 no vaporizer (8) / 1131407 / 6200 / Filament single med current feedthru (1) / 1132161 / 10-160 / Remote terminal beam controller (1) / 1132191 / 10-160 / Remote Vac beam con. (1) / 1132221 / 10-160 / Remote disk beam con. (1) / 1132230 / 10-160 / Source beam controller (2) / 1135882 / 10-160 / AT-4 Assembly (2) / 1137410 / 10-80 / AT-4 Alignment sensor (1) / 11377 / 6200 / Modulas One 1020 (1) / 1139120 / 10-80 / Disk Cooling Plate (10) / 1152240 / 10-80 / Vaporizer Heat Shield (2) / 1152620 / 10-160 / Crucible ASSY. (3) / 1153040 / 10-80 10-160 / source control (1) / 1153430 / GSD / ACCEL WIRE (1) / 1154030 / 20A / Dual Vaporizer Source (1) / 1154830R / 10-160 FAST SCAN / SCREW DRIVER ASSY (1) / 1155820 / GSD / DI Power Supply 24VAC to 24VDC (1) / 115673001 / 10-80 / U1 EPROM (1) / 115673002 / 10-80 / U2 EPROM (10) / 115866 / 10-80 / Copper .69in OD 1in OD 2in L (3) / 1158870 / 10-80 / V3 Valve Sliding Seals (26) / 1159060 / NV 10-80 / PIN CONTACT SUB PLATE DISK HUB (2) / 116201001 / 10-80 / EPROM U42 REV 1 VO.15 5/10/96 (2) / 116202001 / 10-80 / EPROM U43 REV1 VO.15 5/10/96 (2) / 116203001 / 10-80 / EPROM U44 REV1 VO.15 5/10/96 (2) / 116204001 / 10-80 / EPROM U45 REV1 VO.15 5/10/96 (1) / 116223001 / 6200 / Double Main EPROM V020 (1) / 116223002 / 6200 / Double Main EPROM V020 (1) / 116227001 / 6200 / TB EPROM V.020 (3) / 1162800 / 10-80 / Exchange Arm (6) / 1163720 / 10-80 / Source Mounting Flange (3) / 1164410 / 10-80 / Electron Shower 4 (4) / 116441011 / 10-80 / Electron Shower V 3 (1) / 1165270 / 10-80 / Valve Cylinder V6 (1) / 1167070 / 10-80 / Hub Disk New Style (2) / 1167810 / 10-80 / Loading Disk Plate (1) / 1167930 / 6200 / Dual Enhcnced Vap 160KV M2732AFI (4) / 1168460 / 80-10 / proximity switch assy (1) / 1172530 / 10-80 / Source Can (4) / 1174390 / 20A / Interlock Switch Assembly (3) / 1176920 / 6200 / 10 Turn Pot 2K Ohms (1) / 117883 / 80-10 / BREAKER W/GROUNG FULT PROTECTION 15A 120V (1) / 1180740 / GSD / Belt Drive Cooling Tube (3) / 1181831 / GSD / Beam Dump Assy. (1) / 1182480 / GSD / Extration Manilulator assy. (1) / 1186221 / GSD / Feedthru Plate (1) / 1190031 / GSD / Gyro Cont. (1) / 1192020 / GSD / 125 mm Modular Wafer Pickup Arm (3) / 11SM1-T - / 11SM1-T Switch (4) / 11SX21-T / 6200 / MCRSW (7) / 11TS152 - / Switch 11TS152 (488) / 1200320 / 6200 / Filament Insulator Insert (332) / 1200321 / 10-80 / Filament Insulator Insert B (9) / 1200470 / 10-80 / Linear Bearing (3) / 1200B / 10-160 / Beam Monitor Scope (5) / 1201340 / 10-80 / Bearing Liner (4) / 1201350 / 10-80 / Liner Bearing (1) / 1203019 - / (9) Cherry MO Cap Key (9) / 12033800 / 10-80 / BOLTS (3) / 1205000 / 20A / filament supply for 20A EMS 7.5V - 30 (3) / 1210-90181 - / Fixed 50W Resistor (2) / 1214130 EMS 600V-1.6A-2-D-1286 / GSD / EMS 600V-1.6A-2-D-1286 (1) / 1215D12H - / DC/DC Converter (1) / 123 / 6200 / SCAN FEEDTHUR (1) / 1298-0001-1204 / 6200 / Diode IN1204 (8) / 130.002.034 / 6200 / Platen 2 (6) / 130.005.002 / 6200AV / Platen Drive Belt (1) / 130-018-053 / 6200AV / AV Target (1) / 13-75-1-D - / EMS Power Supply 13V 75A (1) / 140012 / 6200 / Light Pipe System (8) / 1400630 / 6200 / Log Radio Module (2) / 140-40-017 / 3206 / Load Lock Cover (10) / 140-415-097 / 6200 / Clippard Minimatic (1) / 1417620 / GSD / Gasbox Control DI (1) / 141A-14319 - / MKS Vacuum Switch Type 141 (1) / 144001-6D / 10-80 / Eprom U28 (1) / 1450303 / 3206 / Sensor G (6) / 149F1 / 10-80 / AT4 149F1 (1) / 1500010 / 10-80 / I/V Converter (5) / 1500070 / 10-80 / Arc Current (1) / 1500080 / 10-80 / Slew Control-Dosemeter (1) / 1500180 / 10-80 / I/O Port J2 (1) / 1500181 / 10-80 / I/O Port J2 (2) / 1500183 / 10-80 / I/O Port J8 (5) / 1500191 / 10-80 / Analog Extension Module J2 (1) / 1500200 / 10-80 / Control Panel Readout (7) / 1500290 / 10-80 / Vaporizer Temp Control (1) / 1500301 / 10-80 / Status Display (2) / 1500360 / 10-80 / Universal 50 Pin Interconnect (3) / 1500460 / 10-80 / Disk Faraday Filter (2) / 15-00475-00 / 6200 / SEAL (4) / 1500482 / 10-80 / Analzyer & Source Magnet Supply (3) / 1500510 / 10-80 / Timer Driver (2) / 1500530 / 10-80 / Temp Limit Control (2) / 1500600 / 10-80 / AMU Front Panel (14) / 15006-1 / 6200 / 1/8 Pipe To 10-32 (5) / 1500610 / 10-80 / IC & Cryo Temp (3) / 1500620 / 10-80 / Logarithmic A/D Converter (10) / 1500640 / 10-80 / Emission Control A-8 (2) / 1500650 / 10-80 / Mother Board (3) / 1500660 / 10-80 / I/O Vacuum Controller (3) / 1500670 / 10-80 / Motherboard Vacuum Controller (3) / 1500680 / 10-80 / Status Display Vac Control (8) / 1500690 / 10-80 / Grid Power Supply (3) / 1500700 / 10-80 / Alpha Numeric Display (4) / 1500740 / 10-160 / THUMBWHEEL SWITCH (1) / 15007440 / 10-80 / AMU Remote (7) / 1500830 / 10-80 / Current Volt Converter (5) / 1500840 / 10-80 / Keyboard (5) / 1500850 / 10-80 / Alpha Numeric Display (3) / 1500870 / 10-80 / P2 (5) / 1500940 / 10-80 / Input Buffer (1) / 1500970 / 10-80 / Flat Sensor-Collector (1) / 1500980 / 10-80 / Flat Sensor-Emitter (2) / 1500990 / 10-80 / Vaporizer Control Motherboard (4) / 1501000 / 10-80 / Power Control Vaporizer (3) / 1501020 / 10-80 / Electrode Suppression Sense (1) / 1501030 / 10-80 / Filament Supply Control (3) / 1501040 / 10-80 / Electrode Divider Readout (8) / 1501060 / 10-80 / Counter/Timer A-8 (2) / 1501061 / 10-80 / Counter/Timer Fast Scan Only (2) / 1501070 / 10-160 / Filter (3) / 1501110 / 10-80 / Disk Sensor BD 1 (1) / 1501142 / 6200 / Motherboard (1) / 1501150 / 10-80 / Analyzer Magnet Supply (6) / 1501200 / 10-80 / A17 Vacuum Controller (4) / 1501210 / 10-80 / PCB (3) / 1501250 / 10-80 / status display pcb (1) / 1501270 / 10-80 / Faraday Burn-thru Sense (3) / 1501280 / 6200 / Input/Output Cassette to Cassette A-7 (1) / 1501290 / 10-160 / Led Rotary Drive (2) / 1501300 / 10-80 / Input I/O 80 (2) / 1501310 / 10-80 / Input TO 990/305 (3) / 1501320 / 10-80 / Output Buffer (5) / 1501330 / 10-80 / Stepper Motor Output Interface (5) / 1501360 / 10-80 / AT-4 Data Acquisition (1) / 1501390 / 10-80 / ELECTRON FLOOD CONTROL PANEL (1) / 1501400 / 10-80 / Endstation Front Panel Display (9) / 1501420 / 10-80 / IDX Sensor Assy. (1) / 1501490 / 10-80 / Data Acquisition Power Supply (3) / 1501500 / 10-80 / Universal Mother bd (1) / 1501620 / 10-160 / Data Transceiver Board (3) / 1501650 / 6200 / CRT Interface (1) / 1501660 / 6200 / Stepper Motor Driver (2) / 1501670 / 10-80 / 1 Channel Transceiver (2) / 1501700 / 10-80 / Controller Datalock Slave (5) / 150171 / 10-80 / Minipulator Assy. (2) / 1501720 / 10-80 / Beam Controller Front Panel Input Card (3) / 1501820 / 10-80 / Datalock/Slave Opoisolator (1) / 1501870 / 10-80 / Remote Vac Controller I/O (4) / 1501990 / 10-80 / Keyboard (1) / 15020300 / 10-80 / Plunger Pos Sense (2) / 1503010 / 10-80 / CPU TM990/101 (16) / 1503020 / 10-80 / I/O TM990/310 E.S. A-8 (5) / 1503040 / 10-80 / Memory Board TM990/201-42 (8) / 1503060 / 10-80 / Controller Remote (1) / 1503061 / 10-80 / Controller Remote Board (8) / 1503070 / 10-80 / Beam Controller Remote I/O (2) / 1503100 / 10-80 / Output Buffer A-1 (7) / 1503180 / 10-80 / Beam Remote Controller (1) / 1503190 / 10-80 / Electron Shower PCB (4) / 1503220 / 10-80 / Memory Expansion (5) / 1503230 / 10-80 / Antilog A/D (1) / 1503440 / 10-160 / GAS BOX CONTROLER BACK (1) / 1503750 / 10-80 / Electrode Suppression P.S. (4) / 1503901 / 10-80 / Z80 Controller (1) / 1503920 / 10-80 / Power Fault Detector (2) / 1504030 / 10-160 / I/O Remote Vac Controller (3) / 1504080 / 6200 / Cassette Stepper Controller (5) / 1504090 / 10-80 / Flat sensor Collector (5) / 1504100 / 10-80 / Flat Sensor Emitter 150MM (5) / 1504130 / 10-160 / Isolation Inter-connect (2) / 1504180 / 10-80 / EMO Remote (4) / 1504260 / 10-80 10-160 / Electrode Surge Protection (2) / 1505420 / 10-80 / Pneumatic Switch (4) / 1505430 / 10-160 / Speed Controller (1) / 1505480 / 10-80 / Power Fault Interrupt Generator (2) / 1505490 / 10-80 / Optoisolator (1) / 1505500 / 10-80 / ELECTRON SHOWER (3) / 1505580 / 10-80 / Beam Controller Remote I/O B (4) / 1505650 / 10-80 / Faraday Sensor (1) / 1505710 / 10-80 / AMU Front Panel B (3) / 1505720 / 10-80 / AMU Ground Level (3) / 1505750 / 10-80 / Output Buffer (3) / 1505771 / 10-80 / AMU Front Panel D1 (3) / 1505810 / 10-80 / Data Concentrator (1) / 1505950 / 10-80 / Remote Log A/D Board (1) / 1505951 / 10-160 / Remote Log A/D (1) / 1505960 / 10-160 / Remote Emissions Controller (1) / 1507360 / 10-160 / Vac AMU Tranceiver (10) / 1507380 / 10-80 / Exchange Interface (2) / 1507440 / 10-80 / AMU Remote A (23) / 1515577 / 10-160 / Defining Aperture A (7) / 1516900 / 10-80 / CPU TM 990/101MB (1) / 1517410 / GSD / Terminal Electric Rack D.I. (1) / 1517660 / 10-160 / 180 Cont Remote (1) / 1517820 / 10-160 / Dedicated Buffer Board (1) / 1518150 / 10-160 / AT-4 Data Acquisition (1) / 1519190 / 10-80 / Beam Controller I/O (1) / 1519313 / 10-80 / Analog I/O (1) / 1519350 REV C / 1-160 / I/O VAVUUM CONTROLLER (1) / 1519520 / GSD / Power Distribution Device Interface (1) / 1519540 / 3206 / Flag Faraday Filter (1) / 1520130 / GSD / Interconnect (1) / 1520210 / 10-80 / Baised Output (2) / 1520560 / GSD / Source Controller DI (1) / 1521080 / GSD / STD Bus (1) / 1521110 / 3206 / STD Buss Poss. (1) / 1521250 / gsd / pcb (1) / 1521300 / 10-80 / Dose Cont. Filter Power (1) / 1521330 / GSD / GSD V3 CONTROL BD. (2) / 1521840 / 10-160 / Remote Vac Controller I/O (2) / 1522040 - / EMS INTERFACE (1) / 1522250 / 3206 / Master Oscillator (1) / 1522920 / GSD / TC & Cryo Interlock Board (1) / 1523280 / 10-160 / Creonics ES Encoder Filter Piggyback (4) / 1523530 / GSD / EMI PUWER SUPPLY CONTROL (5) / 1550-0001-3001 / 6200 / ELECTRODE EXTRACTION (1) / 155-000-062 - / Rotor Union 1-14 (8) / 1550-0013-3001 / 6200 / Decel Electrode (4) / 1550-0016-0001 / 6200 / Filament Electrode (23) / 1550-0017-0001 / 6200 / 3 PC ARC CHAMBER TOP (9) / 1550-0036-0001 / GSD / High Voltage Aperture (1) / 1550-0037-0004 / GSD / Face Plate 2 (2) / 1550-0038-0001 / GSD / High Voltage Electrode (1) / 1550302 / 3206 / Sensor (1) / 15532116 / GSD / TAPE DRIVE AND NEW TAPE (3) / 156-0067-01 / 6200 / IC (7) / 157 D / 10-80 / Vacuum Controller Eprom 80KV (3) / 15A 125V / Any / Hubbell 15A 125V Male Socket (1) / 15S0303 / 10-80 / V Notch Emitter (1) / 1600046 / 10-80 / TM990/305 Endstation A-10 (1) / 1600700 / 10-80 / Cable extention (1) / 160-608-008 / 3206 / Shaft Anti Torque (2) / 160-608-048 / 3206 / Shaft Ball (1) / 1613191 / NV20A / CABLE FLAG FDAY (3) / 1621421 / 10-80 / CABLE FILMENT PS (1) / 165L / 6200 / TIMING BELT (1) / 1700141 / 10-80 / Filament Feed Thru Left (28) / 1700240 / 6200 / Vespel Spacer (6) / 1700310 / 6200 / .625 Filament Clamp (1) / 170033150 / GSD / VAP PART (1) / 1700340 / 10-80 160 / ball screw ass shaft (4) / 170065 / 10-80 / Gasket foam (4) / 1701450 / 10-80 10-160 / Sliding Seals (4) / 1702040 / 10-160 10-80 / accel/deccl (25) / 17021870 / 10-80 / Electron Shower Filament Aperture (16) / 1703110 / - / FLEXURE (6) / 1703150 / 6200 / SPCR FLEX (16) / 17032100 / 10-80 / Beam Aperture (590) / 17032830 / 10-80 / Ceramic Filament Insulator (12) / 17033000 / 10-80 / Insulator H (15) / 17033030 / 10-80 / Feedthru Insulator (4) / 17033160 / 10-80 / Ball Joint (6) / 17033170 / 10-80 10-160 / FILAMENT FEED STARP (12) / 17033170B / 10-80 / FILAMENT STRAP (4) / 17033330 / 10-160 / Dual Vaporizer 1 1/8 Tread with Termocouples (2) / 17034610 / 20A / Cap Seal (2) / 17036670 / 10-80 / Dual Vaporizer Base Plate (24) / 17037280 / 10-80 / Faraday Flag Top Shield (11) / 17037280B / 10-80 / Source End Cap For 20A (12) / 17037290 / 10-80 / Source End Ring (3) / 17037680 / 10-160 / ELECTRODE GROUND PLATE (21) / 17037760 / 10-80 / Low Voltage Aperture (4) / 17037900 / NV20A / FERRO-CERAMIC INSULATOR (2) / 17037940-B / - / EX SHEALD (48) / 17038680 / 10-80 / pin 1/4 dia vesper (15) / 17043870 / 10-80 / .4 filament clamp (1) / 17046020 / 10-80 / BLANK OFF PLATE (14) / 17046670 / 10-80 / Mod. Single Gas Base Plate (29) / 17048870 / 10-80 / Face Plate groove (1) / 1704940 / 10-80 / Curved Field Block (3) / 1704990 / 10-80 / Arc Chamber Side Plate (5) / 1705001 / 10-80 / Single Gas Base Plate (3) / 1705360 / 10-80 / DISK HUB (4) / 17055991 / 10-160 / VLV COVER (4) / 17059460 / 10-160 / Screw Plug (1) / 17059980 / 80-10 / (2) / 1706000 / 10-80 / SPR TRSN DISK EXCH (40) / 17062340 / 10-160 / High Energy Electrode (17) / 17062350 / GSD / HV Electrode Plate (1) / 17062500 / 10-80 / Graphite (1) / 1706370 / 10-80 / NOZZLE VAPRIZ (2) / 17063700 / 10-80-160 / GUIDE SET (1) / 17063730 / 10-80 / Lift Ring (5) / 1706380 / 10-80 / Vaporizer Nozzle (25) / 17064260 / 10-80 / Ground Electrode Plate (3) / 1706440 / 10-80 / Filament sHIELD OB (4) / 17065300 / - / PLATE (9) / 17065360 / 10-80 / Faraday Flag Aperture (6) / 1706540 - / INSUL BSHG 8 (35) / 17066871 / GSD / PLT Strike Faraday VG (1) / 17068110 / 10-80 / brkt proximity switch (3) / 1707-1 - / KINGS 1707-1 RF/COAXIAL SHV JACK STRAIGHT CONNECTORS (1) / 17074630 / 10-80 / Blank Off Plate 2.25 Dia (60) / 1707760 / 10-80 / Filament 10-80 (9) / 17079740 / 10-80 / GF BEARING FOR EXTRATION (6) / 1708220 / 10-80 / AT-4 BUSHING (1) / 17083020 / GSD / Filament mounting Block Ins. (6) / 17083680 / 10-80 / End Plate 2 (1) / 1708520 / 10-160 / Graphite (12) / 1708670 / 10-80 / End Plates (1392) / 1708680 / 6200 / Insulator (2) / 17087480 / 10-160 / APERTURE ACCEL ASSY 160K (20) / 17097240 / 10-80 / Insulator c (2) / 17099181 / GSD / Faraday Aperture VT1 (2) / 17099200 / GSD / GF (2) / 17099201 / GSD / Strike Plate (7) / 17099631 / GSD / Inner Beam Dump VGI (2) / 17099671 / GSD / Outer End VGI (1) / 1709980 / 10-160 / Cylinder Short Stroke DA61R1M (1) / 17099831 / GSD / Shield Faraday Cup (4) / 170-L075 / 6200 / TIMING BELT (1) / 17100120 / GSD / Pipe Gas Teflon EX Term Gap (126) / 17100430 / 10-80 / Repeller Plate (2) / 17100521 / GSD / Exit Dump VGI (2) / 17102611 / 20A / Aperture Resolving (4) / 1710590 / 10-80 10-160 / Feralflulidick Seal (1) / 17106471 / GSD / Strike Plate 3 (1) / 17106491 / GSD / Strike plate Graphite (1) / 17106501 / GSD / Strike plate 2 (3) / 17107540 / 10-80 / Centering Plate (2) / 17107630 / 10-160 / BEAM APERTURE (4) / 17111780 / GSD / Outer Dump (2) / 17111800 / GSD / Outer Duct 5 (1) / 17111810 / GSD / Inner Duct 5 (2) / 1711190 / 10-80 / extaction clamp (43) / 1711261 / 10-80 / Large Cup (64) / 1711262 / 10-80 / Small Cup (1) / 17115410 / GSD / Faraday Vitr Aperture (1) / 17115510 / 6200 / GND PLT FEED THRU CON (4) / 1712040 / 10-80 / Graphite Bearing (19) / 1712070 / 10-80 / Ground Electrode (6) / 17121740 / GSD / REPELLER (7) / 17121750 / GAD / INNER CUP SHIELD (2) / 17122890 / GSD / Graphite Shield Outer Exit (1) / 17122940 / GSD / Post Accel Aperture (1) / 17122970 / GSD / Resolving Housing Aperture (7) / 17123430 / GSD / Retainer (14) / 1712390 / 10-80 / Electrode Standoff (2) / 17124230 / 6200 / Wear Ring Chamfered (1) / 17124240 / 10-80 / WEAR RING DISK VAC (1) / 17126830 / GSD 200 / GSD 200 GF SHIELD (10) / 17127600-1 / 10-80 / 4 in Input Chuck (1) / 17127630 / 10-80 / HEAT SHIELD VAPORZER (3) / 17127840 / GSD / Feedthru Insulator (1) / 17128110 / 10-80 / Face Plate 15R (1) / 17128250 / GSD / Shield (1) / 1712960 / 10-160 / Vaporizer Crucible (2) / 17129700 / GSD / Faraday Strike Plate (3) / 17129710 / GSD / Faraday Strike Plate (3) / 17129720 / GSD / Faraday Strike Plate (3) / 17129730 / GSD / Faraday Strike Plate (37) / 1713040 / 10-80 / Source Shield (18) / 1713050 / 10-80 / End Plate (2) / 17132290 / GSD / High Voltage Aperture (1) / 17133400 / GSD / ELS Standard, Without Vaporizer Ports, .140 Dia. Repeller Hole Arc Chamber (5) / 1713410 / 10-80 6200 / SOURCE GLASS WINDOW (1) / 17135430 / GSD / E-Shower Housing Liner (2) / 1714110 / 10-80 / CLAMP (2) / 1714970 / 10-80 / BSHG Graphite (12) / 1715230 / 10-80 / SILVER STRAP (6) / 1715240 / 10-80 / Copper Filament Post (4) / 17158000 / GSD / S-1.5X 1 Pc. Lean Cathode, Tungsten, 7mm Thick (8) / 17168950 / GSD / Insulator Shield (2) / 1717480 / 10-80 / Face Plate (27) / 1717950 / 10-80 / Beam Aperture (13) / 1718290 / 10-80 / Reflector E-shower (7) / 1718300 / 10-80 10-160 / Ecetron Shower Filament Insulator (13) / 1718600 / 10-80 / WATER TUBE (1) / 17189120 / GSD / Filament GSD (17) / 1718960 / 10-80 / Filament Mount (1) / 17192210 / GSD / GSD ELS Filament Support, Right (1) / 17192211 / GSD / GSD ELS Filament Support, Left (1) / 171944 / 10-80 / SOURCE RING CLAMP (1) / 171-R / 10-80 / AIR CYLINDER FOR LARGE VALVES (1) / 17208650 / GSD 200 / GSD Source Liner (4) / 1722A / 10-80 / Fluke 1722A (2) / 1723250 / 10-80 / CUP INSRRT (1) / 1723340 / 10-160 / Faraday Flag Insulator (1) / 17234230 / GSD / Flexible Connector (12) / 17254990 / GSD / Long Spring (1) / 17272300 / GSD / Shield Tube VG Select Aperture (1) / 17285600 / GSD / Accel Liner (1) / 17287850 / GSD / ELS Filament .040 (8) / 17287851 / GSD / ELS-2X Filament (6) / 17287860 / GSD / Cathode Support Plate (5) / 17287870 / GSD / Insulator Mounting Block (2) / 1730130 / 10-80 / CLAMP PLATE (93) / 1732990 / 10-80 / Waveguide Liner Block (14) / 1733000 / 10-80 / CLAMP BODY (7) / 1733010 / 10-80 / Clamp Lock (3) / 1733940 / 10-80 160 / DEFFING AP (1) / 1739150 / 10-160 / Vaporizer No