二手 LAM RESEARCH (4) Chambers for Alliance 4 9600 SE #293594496 待售
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ID: 293594496
晶圆大小: 8"
优质的: 1996
8"
Process chamber:
Chamber A/B: Metal etch chambers
Chamber C/D: Strip chambers
BROOKS VCE: Loader / Transport system
Primary function: Metal etch and asher
Computer interface
8-Lines gas box
(2) NOAH PRECISION 3300 Chillers
With Controller
(2) Cassette load / Unload platens
Remote operator station
Remote gas box assembly
Remote power distribution box
Operating system: Next 3.3
Gases:
Boron Tri-chloride
Chlorine
Sulfur Hexafluoride
Oxygen
Nitrogen
Argon
Missing parts:
VCE Boards
VME Boards
Wafer aligner
TM Robot
CE Marked
Power supply: 208 Volts, 50 Hz, Single phase
1996 vintage.
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