二手 LAM RESEARCH Process modules for Alliance 9100 PTX #9382951 待售
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ID: 9382951
Upper chamber:
A6061 Aluminum alloy
Alumite treatment
GDP: SiC
TCP Coil: Copper silver plated
ALN TCP Window
Al203 Chamber liner
Castable heater (Aluminum alloy and Sheath heater): 1500 W, 120 VAC
L-Type matcher
Lower chamber:
A6061 Aluminum alloy
Bipolar ESC Ceramic Electrostatic chuck
(4) Ni+Ti Pins wafer lift
Al203 Focus ring (One-piece structure)
SiN Edge ring (One-piece structure)
EPD: NNEP
Vacuum system:
OSAKA TG2003MBW TMP
Pendulum valve vacuum control
Capacitance manometer:
PM1: 2.67 Pa : MKS 627A
PM2: 66.7 Pa : MKS 267A
PM3: 1.33 kPa : MKS 625A
Fore line: 1.33 kPa : MKS 625A
Turbo exhaust: 1.33 kPa : MKS 625A
Backside cooling helium: 6.67 kPa : MKS 722A
RF System:
RF30H TCP Coil: 13.56 MHz, 0 - 3000 W
RF25MWC Bias: 4 MHz 0 - 2500 W
Matching network:
Upper match: TCP Coil
Lower match: Bias
Missing parts:
PCBs
(2) PM7 Pendulum valve controllers
Assembly
853-441118-002 OPT Endpoint detector.
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