二手 NOVELLUS Chamber for Sequel Express #9241912 待售

8" Process: Oxide-nitride Turn-key base include setup (Hardware & process) MC3 Module controller ADVANCE ENERGY HF & LF RF Generators ADVANCE ENERGY RF Matching network Gas filters & heater block (19-00154-00) have been replaced RF Coaxial cables (HF & LF) Lower spindle assy Ferrofluidic spindle assy Shower head assy Heater & RF feedthru assy 10 Torr & 1000 Torr manometer (MKS) Heated type foreline gate & throttle valves (04-127185-00) Throttle valve controller Spindle fork assy Ceramic parts on process chamber Chamber O-rings WATLOW Temperature controller Window SAPPHIRE Heater ISO box Pump interface Gas box configuration: Gas MFC ID Capacity MFC Model C2F6 MFC 9 5 SLM AERA FC-7800CD O2 MFC 8 20 SLM AERA FC-7800CD N2O MFC A 20 SLM AERA FC-7800CD N2O MFC 7 1 SLM AERA FC-7800CD SiH4 MFC 1 1 SLM AERA FC-7800CD NH3 MFC 6 10 SLM AERA FC-7800CD N2 MFC B 10 SLM AERA FC-7800CD N2 MFC 2 5 SLM AERA FC-7800CD.