二手 TEL / TOKYO ELECTRON LHP #9195799 待售

Low temperature hot plate process station Removed from TEL Clean Track Lithius system Parts list: Assembly P/N: 5087-401692-19 Base(HP) assy, back Pin(LHP) assy: 5087-401693-14 Support assy: 5085-407314-12 Base (E-LHP) assy: 5087-401375-16 Cover (HP) assy: 5085-407301-12 Plate assy: 5085-402639-13 Chamber (LHP) assy: 5085-407323-15 Cover (LHP)ASSY back: 5085-407933-14.