二手 TEL / TOKYO ELECTRON Lot of spare parts #9266603 待售
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ID: 9266603
Part number / Description
BB10-100620-12 / Shower plate
3M10-300476-11 / CVD Unity shower plate
3M10-200150-11 / CVD Unity mixing plate
1810-220952-14 / Cooling plate
1810-224220-12 / Cooling plate
1010-201588-12 / Upper electrode
1810-121366-11 / AL Depo shild ring (P/C1)
1810-121367-11 / AL Depo shild ring (P/C2)
1810-326593-15 / Screw cover A-C
1010-101475-11 / Plate baffle
1810-121857-12 / Plate block
1810-121786-12 / Plate RF
1810-121692-12 / Shield depo upper-AL P2
1810-224473-13 / Ring, out
1810-328284-12 / Cover screw A-AL chamber
1810-328284-12 / Cover screw B-AL chamber
1810-121677-12 / Plate exhaust T6 EXH S850DI
1010-101398-11 / Baffle plate
1810-431128-11 / Screw
- / Bellow space ring
1810-224611-11 / Slit plate EXH W1.6 P3
1810-328318-11 / AL Wall chamber (UP) (GND) (STEMP)
1810-328319-11 / AL Wall chamber (LOW) (GND) (STEMP)
1810-328321-11 / AL Wall chamber (L) (GND) (STEMP)
1810-328320-11 / AL Wall chamber (R) (GND) (STEMP)
1810-224951-11 / Ring, centering type-1
1810-121899-12 / Plate exhaust T6 AN
1810-121591-14 / Liner A EXH, AN
1810-327572-14 / Liner B EXH
1810-329303-11 / Cover, bellows A (AD), AN
1810-329022-13 / Liner adapter (AL) type 2
1810-224953-12 / Liner C gate chamber, AN
1810-329078-11 / Cover screw A-AL AN
1810-329079-11 / Cover screw B-AL AN
1810-121903-11 / Shield depo upper P1, AN
1810-121898-11 / Shield depo lower, AN
1810-329064-12 / Window, AL-3, AN
1810-121903-11 / Shield depo upper P2, AN
- / Chamber lid-gas plate base for 3M
- / Gas plate bush for 3M
- / IEM Holder
- / T5000 Upper electrode
- / Shutter liner (Poly).
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