二手 VARIOUS Lot #9195867 待售

Lot of mass flow controller: Aera: Gas / Size SiH4 / 20 SCCM BCL3 / 100 SCCM TiCL4 / 50 SCCM Vacuum general: Gas / Size CL2 / 10 SCCM N2 / 1 SLM O2 / 100 SCCM Gas / Size H2/N2 / 10 SLM Air / 1 SLM, 200 SCCM O2 / 5 SLM, 100 SCCM H2 / 200 SCCM CH4 / 25 SCCM HCL / 500 SCCM BCL3 / 100 SCCM DCS / 200 SCCM N2 / 150 SCCM CO / 200 SCCM CL2 / 10 SCCM.