二手 BALZERS / EVATEC LLS EVO II #293822746 待售
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ID: 293822746
晶圆大小: 6"
优质的: 2005
Physical Vapor Deposition (PVD) system, 6"
AC Distribution box
AC Cabinet
(3) External transformers
Eaton 9130 Uninterruptible Power Supply (UPS)
Backing pumps
Polycold system
CDA (Clean Dry Air) system
400V 3L+N+PE Power supply
Operating system: Windows XP
Gases:
Ar
O2
N2
Damaged parts:
One Beckhoff I/O card
2005 vintage.
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