二手 CPA / KURDEX V2000 #9159037 待售

Sputtering system Process chamber: Dimensions: 29.625” H x 9.5” W x 26.25” L Chambers capable of 600 mm x 600 mm (3) Process chambers with viewing windows Entry: (1) Chamber Deposition: (2) Chambers (1) Load lock valve Pumping port: CF-275 flange for RGA Pumping ports for chamber with frame base plate Standard modules With up to (4) cathode positions per module Cryopumped process chamber Cryopumped load locks (2) Sets shielding RGA Port DC and RF in any mix Sputter single side or double side Vacuum performance: Ultimate pressure: 2 x 10(-7) in 16 hrs 5 x 10(6) in 30 minutes Rate of rise: 1 x 10(-4) 6 minutes Utility requirements: Water: 4 GPM @ 65 PSI per Deposition / Heater position Power: 208 VAC 3Ø, 60 Hz, 5 wire, 80A Gas: Compressed air: 80 PSI min, 90 PSI max Vent gas (Nitrogen): 10 PSI min, 15 PSI max Process gas (Argon): 20 PSI min, 25 PSI max Doors with no cathodes Hivacs Cryos Throttle valves Load lock valve Track assembly.