二手 LEYBOLD HERAEUS Z700 #293751412 待售
网址复制成功!
单击可缩放
ID: 293751412
High vacuum coating system
No vacuum pump
Gas flow: Range: 0 - 100 sccm
Flow controller calibration: N2
(2) PIRANI Vacuum sensors
Measurement range : 5x 10^-4 mbar - 1000 mbar
Operating voltage : 24 V DC
IONIVAC + PIRANI Vacuum sensor
Measurement range : 1 x 10^-6mbar - 1000 mbar
Operating voltage : 24 V DC
(2) Process gas units with pressure controller:
Flow controller
Valve and inclusive vacuum feed through
Substrate drive:
(2) Substrate heaters
Substrate holder
High vacuum sealed rotary feed through
MPC-4Q/12G Multi changer lead through
Speed range:5-50 RPM
Heater circuits
Temperature controller
Calotte diameter: 630 mm
Maximum substrate temperature: 350°C
Heating power: 2.5 kW
SLOAN EB Gun evaporator:
Maximum Power: 8 kW
Deflection: 270°
(4) Pot crucible
Material: Cupper
High voltage generator: 10 kVA, DC 2 kV -10 kV
Filament transformer
Deflection unit (X and Y Direction)
Thermal evaporator:
Maximum power: 3.6 kVA
Electrical cabinet:
PC
TFT Monitor, 19"
PLC
Net adapter
Electrical connection:
Voltage: 3 AC, 400 V / 230 V, +6% / -10%
Frequency: 50 Hz ±1%
Power supply: 3 Phase, N, PE.
还没有评论