二手 OERLIKON / BALZERS / EVATEC Clusterline 200E #293823662 待售

Physical Vapor Deposition (PVD) system, 6" Lytron EWA-15DL-CF04CBD0 heat exchanger (2) CTI IS100 cryo compressors (3) KASHIYAMA MU100 dry vacuum pumps Transport module: BROOKS AUTOMATION Magnatran LEAP transfer robot Front monitor Rear monitor Load lock vacuum turbo pump TU3 Aligner TU6 Cooler Modules 1, 3: Modular chuck type VAT 2-position gate valve MKS GE50A mass flow controllers CTI IS OB-8F cryo pump ADVANCED ENERGY Pinnacle 12kW power supply MB300DK magnetron Inficon BCG450PN ion gauge Module 2: Modular chuck type Turbo vacuum pump ADVANCED ENERGY Cesar 136 (RF) and LFGS 1250D (MF) power supplies Inficon BCG450PN ion gauge Modules 4 and 5: Modular chuck type CTI IS OB-8F cryo pump ADVANCED ENERGY Pinnacle+ 10kW power supply MB300DL magnetron Module 6: Modular chuck type CTI IS OB-8F cryo pump ADVANCED ENERGY Pinnacle 12kW power supply MB300DF magnetron 2023 vintage.