二手 OERLIKON / BALZERS / EVATEC Clusterline 200E #293823663 待售
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ID: 293823663
晶圆大小: 6"
优质的: 2023
Physical Vapor Deposition (PVD) System, 6"
Lytron EWA-15DL-CF04CBD0 heat exchanger
(2) CTI IS100 cryo compressors
(3) KASHIYAMA MU100 dry vacuum pumps
Transport Module:
BROOKS AUTOMATION Magnatran LEAP transfer robot
Front and rear monitors
Load lock with turbo pump
TU3 aligner
TU6 cooler
Modules 1, 3:
Modular chuck type
VAT 2-position gate valve
MKS GE50A mass flow controllers
CTI IS OB-8F cryo pump
ADVANCED ENERGY Pinnacle 12kW power supply
MB300DK magnetron
Inficon BCG450PN ion gauge
Module 2:
Modular chuck type
Turbo vacuum pump
ADVANCED ENERGY Cesar 136 (RF) and LFGS 1250D (MF) power supplies
Inficon BCG450PN ion gauge
Modules 4, 5:
Modular chuck type
CTI IS OB-8F cryo pump
ADVANCED ENERGY Pinnacle+ 10kW power supply
MB300DL magnetron
Module 6:
Modular chuck type
CTI IS OB-8F cryo pump
ADVANCED ENERGY Pinnacle 12kW power supply
MB300DF magnetron
2023 vintage.
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