二手 PERKIN ELMER 4410 #9201791 待售
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ID: 9201791
晶圆大小: 8"
Sputtering system, 8"
Wafer loading: Manual
With load lock
Cathodes: Delta shape, 3 max
Sputter methods: RF / DC
Diode / MAGNETRON
Gas lines: 1~3 MFC
Options:
Gas lines with MFC
N2
O2
Customized
Lamp tower alarm with buzzer:
Mechanical pump / Dry pump for process chamber and load lock
Independent mechanical pump / Dry pump for process chamber
Chiller for cooling plates and table
Turbo pump for load lock
Load lock lamp heating function: Up to 200°C
Chamber lamp heating function: Up to 300°C
Plasma etch function
Bias function
Co sputter function
Reactive sputter function
Main frame
28" Diameter SST chamber top plate with ports and cathodes:
Configuration 4400 4410 / 4450
Cathode shape Circle Delta
Cathode size 8" Delta
Cathode quantity 1 to 4 1 to 3
Sputter power supply:
4400 4410 / 4450
DC Power 5 kW 5 kW / 10 kW
RF Power 1kW / 2kW 2 kW / 3 kW
Pulse DC Power 5 kW 5 kW / 10 kW
Process chamber:
8" Diameter x 12" High stainless steel cylinder with 6"
CF Flange view port and load lock port
28" Diameter stainless steel base plate
11/2" Air operated roughing isolation valve
Air operated gas inlet valve
Air operated vent valve
11/2" Blanked-off leak check port
Removable deposition shields
23" Diameter, 3-position water cooled annular substrate
Table with variable speed motorized table drive
Full circle shutter and vane shutter
Chain drive pallet carrier transport
Heavy duty electric hoist
Load lock:
30" x 28" x 8" Stainless steel load lock chamber
Aluminum cover
Chain drive pallet carrier transport
2" Air operated roughing isolation valve
Air operated vent valve
23" Diameter molybdenum annular substrate pallet
Elevator for pallet up and down function
Vacuum systems for process chamber:
(2) Stage cryo pumps
With 1000 l/s pumping speed for air
Includes:
Chevron
Water cooled compressor and lines
Automatic regeneration controller
Plumbing kit, 71/2"
Aluminum air operated gate valve: 6" ASA
Air operated venetian blind throttling valve
Mechanical pump or dry pump for process: 36.7 Cfm
Chamber and load lock
Replaced obsolete controls:
Auto pump down controller
Load lock controller
Digital clock timer
Table raise / Lower control
Throttle valve control system
Pressure control system
Sputter head controls
Gas line with MFC
Ar, 200 SCCM, customized
Power box: AC 380 V / 208 V / 3 Phase.
PERKIN ELMER 4410是一款溅射设备,设计具有高度通用的功能集,使其成为电气、微电子和半导体应用的热门选择。这个能力很强的系统由两个主要组成部分组成;喷枪和一个装有控制和动力部件的集成底盘。4410心脏的溅射枪有40至350瓦之间的可调电源。这允许用户根据当前项目或应用程序的需要定制设备的沉积速率。此外,溅射枪设计高度模块化,使其能够使用各种不同的溅射目标,包括蒸发、磁控管和二极管设计。PERKIN ELMER 4410的集成机箱是控制和所有电源组件所在的位置。控制单元便于自动操作以及手动模式选项。这包括可以指定压力和温度等参数的预编程操作过程,以及用于微调溅射过程的手动操作。电源单元由多个变压器和整流器组成,这些变压器和整流器需要将传入的交流电源转换为溅射枪所需的直流电源。4410设计用于洁净室式环境,设计时考虑到安全性。它包含一个紧急关闭按钮,以便在紧急情况下能够快速关闭机器,并且它的废气在外面排出,以确保危险材料的最小暴露。综上所述,PERKIN ELMER 4410是一款多功能、高性能的溅射工具,具有出色的控制和动力元件,可以用于多种工业和研究相关应用。它是为特殊的安全而设计的,并配有模块化溅射枪和集成控制装置,用户可以放心地为当前项目的精确需求定制自己的资产。
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