二手 PERKIN ELMER 4450 #9251060 待售
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ID: 9251060
Sputtering system
(3) DELTA Targets and etch
Used for thin silicon R&D tri metal (Ti ,Ni, Ag)
Spare parts:
Qty / Part number/ Description
(3) / PES-120-018-000 / O Ring BS259
(7) / PES-120-018-000 / O Ring BS259
(5) / PES-120-018-000 / O Ring BS259
(3) / PES-120-019-000 / O Ring BS214 Viton
(6) / PES-120-121-000 / O Ring BS222 Viton
(2) / PES-120-144-000 / Switch micro (BA-2RV22T)
(4) / PES-121-165-000 / Circlip - External 1/2"
(1) / PES-121-189-200 / Circlip - External 1/4"
(4) / PES-121-381-400 / O Ring BS426 Viton
(10) / PES-121-392-000 / O Ring BS252 Viton
(8) / PES-121-392-000 / O Ring BS252 Viton
(20) / PES-121-394-500 / O Ring BS116 Viton
(7) / PES-121-395-300 / O Ring BS210
(2) / PES-121-395-800 / O Ring BS234
(7) / PES-121-396-700 / O Ring BS266
(3) / PES-121-396-900 / O Ring BS268
(2) / PES-121-401-400 / Belt timing 100 Xl
(2) / PES-121-411-600 / Bearing
(1) / PES-121-412-500 / Bracket
(1) / PES-121-412-600 / Bracket
(9) / PES-121-420-400 / O Ring BS131
(1) / PES-121-420-400 / O Ring BS131
(2) / PES-121-423-900 / O Ring BS272
(10) / PES-121-423-900 / O Ring BS272
(2) / PES-121-424-000 / O Ring BS278
(9) / PES-121-424-000 / O Ring BS278
(1) / PES-121-425-700 / Circlip internal 2"
(1) / PES-121-430-000 / Circlip internal 2 3/4"
(1) / PES-121-430-800 / FAFNIR KP33B Bearing ball
(1) / PES-121-432-400 / Ring retaining 2 1/8"OD
(1) / PES-121-947-100 / Resistor assy 15K Ohm
(2) / PES-121-964-910 / Bearing (204NPD) W-2Z
(8) / PES-122-026-600 / Fuse-1/8 Amp (1"x1/4")
(2) / PES-122-074-500 / Switch push button
(2) / PES-122-082-500 / Capacitor-WBR+1000-35
(2) / PES-122-142-800 / I.C 74C76
(1) / PES-122-142-900 / I.C 74HCT10
(1) / PES-122-148-500 / DAYCO 150L050 timing belt
(1) / PES-122-154-200 / Motor stepper 120 Volt
(5) / PES-122-165-900 / O Ring BS128
(2) / PES-122-165-900 / O Ring BS128
(2) / PES-122-165-900 / O Ring BS128
(1) / PES-122-202-400 / I.C 74HCT00
(100) / PES-122-202-500 / CD74HCT04E - IC (Farnell 381-081)
(2) / PES-122-245-600 / POTTER&BROOMFIELD Relay 115V
(5) / PES-122-267-500 / Washer steel 1 1/4OD x 3/4ID x 1/8
(2) / PES-122-268-400 / Capacitor variable 20-500 uF
(1) / PES-122-275-600 / I.C MCA 22312 (4N32 Equiv)
(1) / PES-122-283-790 / Switch toggle Op (C&K 7415)
(2) / PES-132-101-200 / Choke (Ohmite Z-7)
(1) / PES-132-509-300 / Timer (Syracuse DDR-00305)
(1) / PES-133-223-000 / Capacitor 500 mF 25VDC
(2) / PES-133-272-100 / Capacitor 500M 6Kv 25V
(2) / PES-134-021-200 / Rheostat 15K (Ohmite 4202 15000)
(1) / PES-134-354-000 / Resistor assy 3K
(1) / PES-134-402-000 / Resistor assy 33K
(1) / PES-134-403-000 / Resistor assy 100K
(1) / PES-134-407-000 / Resistor assy 5.6K
(1) / PES-134-951-500 / Resistor 22.5K
(2) / PES-135-444-400 / Switch rocker Op (C&K 7201)
(2) / PES-135-445-500 / Strip grounding
(2) / PES-135-921-200 / Head relay brd 24 V AC .K3
(2) / PES-135-921-900 / Relay 120V AC (Sigma78Re1)
(1) / PES-135-922-000 / Relay 28V DC / 120V AC
(1) / PES-135-928-200 / POTTER&BRUFIELD Khu17D11 Relay
(2) / PES-136-300-400 / Ring PTFE 1/4" ID
(2) / PES-136-634-000 / Transistor 2N1559
(2) / PES-139-003-000 / Insulator ceramic
(5) / PES-139-008-700 / Insulator ceramic
(3) / PES-139-008-700 / Insulator ceramic
(1) / PES-139-008-800 / Insulator ceramic
(1) / PES-178-146-000 / Motor 7RPM 120 Volt
(5) / PES-179-632-000 / Fuse (Buss GMA1O) 3/16 x 3/4
(1) / PES-220-965-000 / Clamp bar
(2) / PES-220-965-100 / Clamp bar
(1) / PES-221-079-300 / Block S/S 1" X 4 1/2" X 1/4"
(2) / PES-221-177-600 / PCB LN2 control
(3) / PES-221-180-200 / Switch rocker Op (Micro4TPL-7)
(1) / PES-221-274-900 / Gasket
(1) / PES-221-279-500 / Assembly feed through
(1) / PES-221-279-900 / Flange transport drive assy.
(1) / PES-221-281-500 / Assembly Feed Through
(2) / PES-221-296-100 / Water feed through
(6) / PES-221-340-900 / Strip grounding
(1) / PES-221-582-900 / PCB Filter board
(1) / PES-2E26 / Beam amplifier
(1) / PES-500-579-500 / Seal assy 1 5/8" OD
(1) / PES-500-585-400 / Bellows 1 1/2" Valve
(2) / PES-500-827-700A / Bellows Assy
(1) / PES-6AG7 / Receiving tube
(3) / PES-721-369-000 / Transformer
(5) /PES-721-384-000 / Washer fibre 1/2"OD X 1/8"ID
(10) / PES-AM33K3 / Bearing - Inner door
(5) / PES-B221-210-000 / Clip heater
(1) / PES-B221-462-700 / Motor Stepper 120 Volt
(1) / PES-D220-948-700 / Valve bellows 2"
(2) / PES-MI-100-KF / Gauge Ion-Mi-100-Kf.
PerkinElmer PERKIN ELMER 4450是一种溅射设备，设计用于薄膜制造过程中金属和介电膜的沉积。它提供两全其美；一种工业标准的双枪阴极溅射源和独特的双宽喷嘴源，用于介质膜的高度均匀沉积。该系统能够在直径不超过8英寸的晶片上沉积高清晰度和非凡均匀性的金属或介电材料层。PerkinElmer 4450包括真空室、电源和高频发电机。它支持多种过程，包括连续和脉冲溅射、反应性离子模式溅射（RIMS），以及同时从双独立源沉积不同材料。该装置可容纳两个源-一个位置特定的双枪阴极溅射源和一个双宽喷嘴源的介电膜。源电压和功率是可调的，可以控制沉积速率和薄膜厚度。PerkinElmer PERKIN ELMER 4450的高级电源为每个电源提供独立且可编程的电源设置,从而进一步优化了流程。这台机器还配备了一个样品支架和一个用于装载和卸载多达八个晶片的提升工具--它可以容纳直径达200毫米的晶片。样品支架的运动由执行器控制，位置重复性优于1微米。支架可以旋转（CW和CCW），在-10到+10°的范围内以每分钟最多395次旋转倾斜。该资产还配备了自动聚焦传感器和原位石英监测器，以确保精确的薄膜厚度控制。最后，PerkinElmer 4450包含了一些安全特性，如紧急停止和腔室、源和晶圆支架上的联锁。该模型设计用于受控环境下的半导体加工。为了保持高水平的工艺重复性，减少溅射颗粒和背景污染，可以用工艺气体、氮气或其他气体清洗设备。综上所述，PerkinElmer PERKIN ELMER 4450是一种先进的高精度溅射系统，旨在提供均匀的薄膜沉积，具有很高的工艺重复性和准确性。其原位石英监测器和自动自动聚焦传感器确保了对关键膜参数的轻松、精确控制，同时综合安全措施提供了可靠的工艺优化。
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