二手 DISCO DFG 8540 #9138237 待售

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ID: 9138237
Wafer back grinder Workpiece : Silicon wafer Sample wafer provision : with (200mm) Wafer thickness : o 8"mm wafer Thickness after processing : 100um, 200um,150um o 6" wafer Thickness after processing : < =300um Protective tape Wheel selection (for Z1:fine grinding) : BT 300 Wheel selection (self-grinding) : Disco suggestion Dresser board : Z1 wheel : Part no : DISCO Z2 wheel : Part no : DISCO Default cassette setting : Open flow (transfer to opposite cassette) Stage A: 8" A192-80M 8" double slot cassette sample of cassette Stage B: 8" A192-80M 8" double slot cassette sample of cassette Adjustable cassette setting 1: open flow(transfer to opposite cassette) Stage A: 6" A194-60MB 6" double slot cassette Sample of cassette Stage B: 6" A194-60MB 6" double slot cassette sample of cassette Default display language : English Z1 Height gauge stroke : 1.8mm(max.) Z2 Height gauge stroke : 1.8mm(max.) Power voltage Power frequency : 60Hz Attached hose : 5M Safty lables : English Paint color: Cream Standard color (munsell#2.5GY8.0/0.5) Black Standard color munsell#N 2.4 Manuals: First set : English (for standard specification) Second set : English (for standard specification) Transport parts : 6" to 8" Optional accessories (included with shipment) : 8" dedicated transport parts Optional accessories (Thin grinding specification) : 6" decicated, 8" dedicated Chuck table : Universal (4" to 8") Wafer size selection for universal chuck table: 5",6",8" Double slot cassette for thinly ground waters : 6" dedicated double slot cassette 8" dedicated double slot cassette Lifting jig set Power cable for main unit : with (5m/transformer for main unit is used) Site-side piping joints : Including water temperature control unit (DTU152) Automatic setup function Transformer for main unit CM:with (voltage: 220 V) Water temperature control unit (DTU152) : with (English manual attached) Transformer for water temperature control unit : with (voltage :220 V) Power cable for water temperature control unit: with (5m/transformer for DTU152 is used) Duct unit Uniterruptible power supply unit Vaccum maintance function Equip 8" & 6" wf thin grinding necessary parts 8" wf parts with shipment for main product Capacity : 5 m3/min 2010 vintage.
DISCO DFG 8540是一款紧凑、功能丰富的晶圆研磨、研磨和抛光设备,旨在满足半导体和光学行业的最大要求。这个强大的系统配备了先进的控制功能,能够达到高达0.1um的精度水平,使其成为纳米技术的完美工具。该单元的主要部件包括研磨抛光头、研磨板和主体框架。磨头由AccuForce-I磨削驱动马达驱动,能够以12,000 rpm的最大转速旋转。磨盘配有直接驱动电动机,能够以高达10,000 rpm的速度旋转,可重复精度高达0.1um。主体框架的设计使所有组件牢固地结合在一起,并设有一个集成的控制面板,可以方便地访问所有的机器参数。该工具配有信号控制软件包,便于资产操作和磨削及抛光过程的实时控制。它还具有用户友好的图形界面,实时显示研磨和抛光状态。后者便于全程监控,保持高质量的效果。该模型还能够存储和传输客户数据,使其成为协作项目的理想工具。最后,DISCO DFG8540配备了几个安全功能,包括磨削和抛光头的双层保护外壳,以及防止未经授权人员进入设备的安全门。这些特性结合其精确度和可靠性,使DFG 8540成为晶圆研磨、研磨和抛光应用的可靠工具。
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