二手 DISCO DFG 8540 #9138237 待售
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ID: 9138237
Wafer back grinder
Workpiece : Silicon wafer
Sample wafer provision : with (200mm)
Wafer thickness :
o 8"mm wafer
Thickness after processing : 100um, 200um,150um
o 6" wafer
Thickness after processing : < =300um
Protective tape
Wheel selection (for Z1:fine grinding) : BT 300
Wheel selection (self-grinding) : Disco suggestion
Dresser board :
Z1 wheel : Part no : DISCO
Z2 wheel : Part no : DISCO
Default cassette setting : Open flow (transfer to opposite cassette)
Stage A:
8" A192-80M
8" double slot cassette
sample of cassette
Stage B:
8" A192-80M
8" double slot cassette
sample of cassette
Adjustable cassette setting 1:
open flow(transfer to opposite cassette)
Stage A:
6" A194-60MB
6" double slot cassette
Sample of cassette
Stage B:
6" A194-60MB
6" double slot cassette
sample of cassette
Default display language : English
Z1
Height gauge stroke : 1.8mm(max.)
Z2
Height gauge stroke : 1.8mm(max.)
Power voltage
Power frequency : 60Hz
Attached hose : 5M
Safty lables : English
Paint color:
Cream
Standard color (munsell#2.5GY8.0/0.5)
Black
Standard color munsell#N 2.4
Manuals:
First set : English (for standard specification)
Second set : English (for standard specification)
Transport parts :
6" to 8"
Optional accessories (included with shipment) : 8" dedicated transport parts
Optional accessories (Thin grinding specification) : 6" decicated, 8" dedicated
Chuck table : Universal (4" to 8")
Wafer size selection for universal chuck table: 5",6",8"
Double slot cassette for thinly ground waters :
6" dedicated double slot cassette
8" dedicated double slot cassette
Lifting jig set
Power cable for main unit : with (5m/transformer for main unit is used)
Site-side piping joints : Including water temperature control unit (DTU152)
Automatic setup function
Transformer for main unit CM:with (voltage: 220 V)
Water temperature control unit (DTU152) : with (English manual attached)
Transformer for water temperature control unit : with (voltage :220 V)
Power cable for water temperature control unit: with (5m/transformer for DTU152 is used)
Duct unit
Uniterruptible power supply unit
Vaccum maintance function
Equip 8" & 6" wf thin grinding necessary parts
8" wf parts with shipment for main product
Capacity : 5 m3/min
2010 vintage.
DISCO DFG 8540是一款紧凑、功能丰富的晶圆研磨、研磨和抛光设备,旨在满足半导体和光学行业的最大要求。这个强大的系统配备了先进的控制功能,能够达到高达0.1um的精度水平,使其成为纳米技术的完美工具。该单元的主要部件包括研磨抛光头、研磨板和主体框架。磨头由AccuForce-I磨削驱动马达驱动,能够以12,000 rpm的最大转速旋转。磨盘配有直接驱动电动机,能够以高达10,000 rpm的速度旋转,可重复精度高达0.1um。主体框架的设计使所有组件牢固地结合在一起,并设有一个集成的控制面板,可以方便地访问所有的机器参数。该工具配有信号控制软件包,便于资产操作和磨削及抛光过程的实时控制。它还具有用户友好的图形界面,实时显示研磨和抛光状态。后者便于全程监控,保持高质量的效果。该模型还能够存储和传输客户数据,使其成为协作项目的理想工具。最后,DISCO DFG8540配备了几个安全功能,包括磨削和抛光头的双层保护外壳,以及防止未经授权人员进入设备的安全门。这些特性结合其精确度和可靠性,使DFG 8540成为晶圆研磨、研磨和抛光应用的可靠工具。
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