二手 EBARA Frex 200 #9016976 待售

Tungsten CMP system Includes: Table motor current: (2) Ceramic tables (heating and cooling capability) (2) Buff stations (2) Spare multi-holed top ring head assemblies, Ebara part no. AEPO22-BLR-0010 Main frame construction: Split frame: cleaning unit and polishing unit Stainless steel frame, base panels painted light gray, blue, and white Latched panels and hinged door Air: flow in transfer / cleaning unit, air-flow in polishing unit Piping: DI water: PFA / Slurry: PFA and PTFE / Drain: PVC Loading / Unloading unit: Flouroware, part no. A198-80MB-47C02 Transfer unit: (3) robots Wafer stations: (2) dry, (2) wet Polishing unit: (2) Top-ring units (2) Turn table units (2) Dressing units (1) Rotary transporter units (1) Slurry feed pump Rotary transporter unit: (2) Turnover units (2) Lifter units (1) Rotary stage unit (2) Pusher units Cleaning units: (4) Units in total, with in-line processing, process cup structure, and wafer transfer with robot between units First stage cleaning includes: Roll sponge scrub cleaning, and chemical spout rinsing for front side and back sides Peripheral chucking by rollers, and manual damper Ventilation control with exhaust pressure indicator Second stage cleaning for cleaning both sides of wafer and spin dry, includes: Pencil sponge scrub cleaning, Megasonic jet cleaning, and chemical spout rinsing Peripheral chucking by rollers, and manual damper ventilation control with exhaust pressure indicator Power supply including breaker for each module Main controller hardware including VME bus, Board computer, Main CPU: 68-series 32-bit O/S software using OS-9/C language description Separate structure on each module I/O connection with module, featuring serial communication Operation unit with touch panel display Safety measures to include: Leakage sensors provided on the polishing head (top - ring head) Drain pans which may have possibilities of fluid leakage Emergency off buttons installed around the tool to cut power and stop CMP operation Lift top ring and stop table Door interlock that stops unit operation Moving parts are covered with protection covers Protection cover is provided for areas which may have potential larger than 24 V 208 VAC, 3 phase, 60 Hz Full load: 80 A Machine main breaker rating: 125 A Ampere rating of largest load: 80 A Interrupt current: 14,000 A Size of largest motor: 3.7 kW 2000 vintage.