二手 EBARA Frex 300 #293606132 待售
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ID: 293606132
晶圆大小: 12"
优质的: 2001
CMP System, 12"
EFEM (Load/Unload):
(4) ASYST Load ports
YASKAWA Electric robot
Position control: Motor + Ball screw
Dry robot
Wafer transfer:
(2) Turn overs (R/L Side)
(2) Pushers (R/L Side)
(4) LTP Linear stages (R/L Side)
(2) Lifters (R/L Side)
Wafer stage (R/L Side)
Wet robot
Polishers:
(2) Top ring normal heads
(2) Buffing tables
Slurry line
Chemical (CL) connection
Return Line
(2) Dressers (R/L Side):
Diamond pattern type
Disk type: Plate
(2) Tables (R/L Side):
Material stainless steel
Lapping surface
Motor
(2) Cleaners:
1st Cleaner:
(2) Roll scrubs
(2) Megasonics
Wafer roller: Duro 90
SC-1 < 60°C
2nd Cleaner (Pencil and SRD Unit):
(2) Roll scrubs
Megasonic
Power control unit:
Power control
(4) Drivers:
Head rotation
Head swing
Operation controller (ETC):
Hardware:
VME Bus, board computer
Main CPU: 68 Series 32 Bit
2001 vintage.
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