二手 EBARA Frex 300 #9017351 待售

Poly / STI CMP system, 12" Factory Interface (FI): Frame config: metro ready Load-port type: (4) Asyst ISO Pre-aligner Wafer handling robot: track type with dual end effecter Polisher (L/R): Process (L/R): STI Polishing heads: 300 mm AL head, gen. II Endpoint: TCM and friction Platen type (speed): ceramic (SIC), 10-150 rpm Pad type: IC1000 Platen pad conditioner: scan dresser 4” disc (3M 5122-AB), sweep driven Slurry delivery: closed loop (CLC) delivery Slurry flow range: 25-250 mL/min (low flow rate) Slurry line 1: HS-8800 Slurry line 2: none Slurry line 3: none Wafer slip-out sensor: yes Wafer loss camera: no Platen cooling flow monitor: Tokyo KEISO Platen cooling temp monitor: user configurable alarm settings Dresser DIW flow meter: flow range 1.0-1.5 L/min Atomizer: yes Endpoint (L/R): Table current monitor (TCM): yes Multi-process monitor ME20 for EPD: yes Metrology option: none Cleaner (L/R): Cleaner 1 type: roller brush ¬ Note: no megasonic ¬ Chem. delivery type: (1) chem CLC 0.0-1.0 L/min (alarm capability) ¬ Chemical 1 upper flow meter: 0.0-1.0 L/min ¬ Chemical 1 lower flow meter: 0.0-1.0 L/min ¬ Chemical line 1: HF ¬ Chemical line 2: n/a ¬ Bevel edge cleaning: yes Spin rinse dryer: pencil brush ¬ Chem delivery type: (1) chem CLC 0.0-1.0 L/min (alarm capability) Options: Robot D: Yaskawa Robot R: Yaskawa Robot L: Yaskawa Status lamp (RYGB, front/rear) Monitor 1: front Monitor 2: L-side Monitor 3: R-side EPD monitor: R-side Software: Main SW ver: 7.5.02 CPU-1 (OS/9) ver: 7.5.02 CPU-2 (OS/9) ver: 7.5.00 Touch panel control ver: 7.5.00 Touch panel drawing ver: 7.5.00 Online ver: 7.5.00 ME10/ME20 ver: 2.4.30.0 Communication: Controller (logic): VME Controller (process database): touch panel Heat exchanger / chiller: (1) Advanced Thermal Sciences SX-21 Facility: Seismic support: bracket locations to be provided Chemical connections: bottom Exhaust connections: top Gas connections: bottom Drain connections: bottom Power requirements: 208 VAC (3.4 kW) , 200 A, 3 phase, 3 wire+ground, 60 Hz 2004 vintage.