二手 EBARA Frex 300 #9182740 待售
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ID: 9182740
晶圆大小: 12"
CMP System, 12"
Components:
(1) Loadport (Foup): 1
(1) Loadport (Foup): 2
(1) Loadport (Foup): 3
(1) Loadport (Foup): 4
(1) Mainbody: Load unload unit
(1) Mainbody: Cleaner unit
(1) Mainbody: Polish unit: L
(1) Mainbody: Polish unit: R
(1) TCM & Noba monitor unit
(1) DHF Supply unit
(1) Power supply unit
(1) SC-1 Supply unit
(1) Slurry delivery unit
(1) Parts box: 1
(1) Parts box: 2
(1) Parts box: 3
(1) Parts box: 4
(1) Poli head: R
(1) Poli head: L
(1) Dresser: R
(1) Dresser: L
(1) Punching jig
(1) Poli jig
(1) Foot plates
(1) Cable pallet: 1
(1) Cable pallet: 2
(1) Cable pallet: 3
(1) Pipe: 1
(1) Pipe: 2
(1) Pipe: 3
(1) Pipe: 4
(1) Pipe: 5
(1) Roller tool
(1) Upside panel: 1
(1) Upside panel: 2
(1) Upside panel: 3
(1) Upside panel: 4
(1) Upside panel: 5
(1) Upside panel: 6
(1) Upside panel: 7
(1) Upside panel: 8
(1) Backside panel: 1
(1) Backside panel: 2
(1) Backside panel: 3
(1) Backside panel: 4
(1) Backside panel: 5
(1) Poli panel: 1
(1) Poli panel: 2
(1) Poli panel: 3
(1) Poli panel: 4
Parts box 1:
(1) Fitting jig
(1) Poli L,R Docking bolt
(1) Clean & poli docking bolt
(1) Poli L,R Shutter cover
(1) Poli & clean L,R Side cover
(1) Poli L,R Cooling water 1,2
(1) Poli L,R drain
(1) CL1 R-Side drain
(1) CL1 L-Side drain
(1) Poli L,R Side drain 1,2
(1) CL Drain pan drain
(1) CL R Side drain pan drain
(1) CL2 R Side drain
(1) CL2 L Side drain
(1) CL & EFEM Docking bolt
(1) CL 1,2 L Side
Parts box 2:
(2) Exhaust pipe
(1) Road cell
Parts box 3:
(1) Special jig
(1) Diar gage jig
(1) Pad jig
(2) Use the drive for the lift shaft
(1) Centol ling jig
(1) M6-11
(1) Sfc003610
(1) Sfc003615
(1) Position fixture
(1) 70735401
(1) C-6200-192
(9) Other parts
Parts box 4:
(1) Side panel-L braket
(1) Side Panel-R braket
(1) Side panel-L
(1) Side panel-R.
EBARA Frex 300是一种半导体晶圆研磨、研磨和抛光设备,用于直径不超过6英寸的晶圆的受控背面加工。系统配备320毫米主磨轮、单轴伺服驱动单元，以及两个6英寸真空卡盘。其独特的研磨工艺利用金刚石砂轮，能够调制切削深度、进料速率、密度等工艺因素，在晶圆上实现出色的平面化。该装置采用独特的磨轮设计，采用基台铣削技术，在晶圆上提供均匀的接触力，从而提高了磨削时间。研磨过程由直接驱动机器控制，该机器精确同步两个6英寸真空卡盘。它采用低振动环路驱动工具，采用闭环自动伺服电机控制，根据样本量优化研磨工艺。研磨工艺产生具有受控表面纹理的高品质表面光洁度，提供出色的平面度和特征定义。最后，在EBARA FREX-300的抛光轮上进行抛光过程，该抛光轮由ECU控制的直流伺服电机驱动。它能够为特定的晶圆表面提供精确的压力控制和动态性能。综上所述，F-REX300是一个强大的晶圆研磨，研磨，抛光资产，提供卓越的平面和特征定义。由于其低振动环路驱动模型、ECU控制直流伺服电机和金刚石砂轮，它具有可靠的性能和精度。该设备是为满足高精度半导体晶圆制造业的需求而设计的。
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