二手 EBARA Frex 300 #9212102 待售
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ID: 9212102
CMP System
Qty Part description
(1) Cl1-l drain pipe
(1) Cl1-r drain pipe
(1) Cl2-r drain pipe
(1) Sponge holder assy (c)
(1) Sponge holder assy (d)
(4) Rubber seats
(4) Cross recessed head machine screws m2x8
(8) Cross recessed head screws m3x8
(4) Cross-recessed head screws m3x8
(4) Cross recessed head screws m3x8
(12) Cross recessed head screws m3x10
(14) Cross recessed head screws m3x16
(8) Cross recessed head screws m3x20
(4) Cross-recessed machine head screws m3x30
(4) Cross-recessed head screws m4x8
(4) Cross recessed head screws m4x10
(10) Cross recessed head screws m4x12
(6) Cross recessed head screws m4x15
(4) Cross recessed head screws m4x16
(6) Cross recessed head screws m4x25
(8) Cross recessed head screws m5x16
(4) Cross recessed head screws m6x15
(4) Cross recessed machine head screws m3x6
(8) Cross recessed head screws m3x8
(18) Cross recessed head screws m4x8
(3) Cross recessed head machine screws m4x10
(2) Hexagon socket headless set screws m3x5
(1) Hexagon socket set screw m4x10
(1) Hexagon socket headless set screw m5x6
(12) Cross hole truss small screws m3x4
(12) Cross recessed truss head screws m3x6
(14) Cross recessed truss head screws m3x10
(17) Cross-recessed truss head screws m4x6
(4) Cross recessed truss head screws m4x8
(20) Cross recessed truss head screws m4x10
(8) Cross recessed truss head screws m5x8
(9) Cross recessed truss head screws m5x10
(1) Joint bolt, roll
(8) Hexagon socket head cap screws m3x4
(9) Hexagon socket head cap screws m3x8
(12) Hexagonagon socket head cap screws m3x10
(1) Hexagon socket head cap screw m3x16
(6) Hexagon socket head cap screws m3x20
(2) Hexagon socket head cap screws m3x25
(4) Hexagon socket head cap screws m4x6
(22) Hexagon socket head cap screws m4x8
(11) Hexagon socket head cap screws m4x10
(4) Hexagon socket head cap screws m4x12
(24) Hexagon socket head cap screws m4x16
(1) Hexagon socket head cap screw m4x25
(8) Hexagon socket head cap screw m5x8
(2) Hexagon socket head cap screw m5x14
(32) Hexagon socket head cap screw m5x16
(2) Hexagon socket head cap screw m5x25
(3) Hexagon socket head cap screw m6x10
(14) Hexagon socket head cap screw m6x20
(4) Hexagon head bolt m4x10
(10) Hexagon head bolt m4x25
(2) Hexagon head bolt m5x10
(2) Hexagon head bolt m6x30
(3) Sp bolt
(1) Nut, cleaning arm (d)
(1) Nut, cleaning arm (c)
(2) Plate nut 300
(22) Plain washer m3
(35) Plain washer m4
(32) Plain washer m5
(1) Washer
(2) Weight case washer
(1) Washer
(2) Spring pin
(2) Spring pin 3x8
(2) Spring pin 4x12
(2) Pivot shaft
(1) Shaft
(1) Shaft, roll
(1) Parallel key 3x3x10
(1) Coupling
(2) Ball bearing
(1) Bearing ss6800zz
(4) Ceramic bearing, 6800
(2) Beariing (7000st)
(1) Timing belt
(2) Spring, nozzle, roll
(3) Spring
(2) O-ring p12
(1) O-ring p20
(1) O-ring g730
(12) O-ring s4
(5) O-ring s7
(2) O-ring s16
(1) O-ring s20
(2) O-ring s22
(1) O-ring s32
(1) O-ring s75
(1) O-ring s95
(1) O-ring s270
(1) O-ring s290
(3) O-ring as568a-216
(1) O-ring as568-#022
(1) Gasket, cover
(2) Gasket, d pan
(1) Seal assy
(1) Balance weight (ur)
(1) Cylinder
(1) Cylinder
(2) Handle
(2) Center nozzle
(4) Nozzle
(3) Latch
(3) Air cylinder
(1) Pfa tube
(1) Soft nylon tube
(4) Pliant tube (2)
(1) Joint (j) drain
(2) Pfa tube (4x3)
(5) Pvc saddle
(3) Ts-saddle 20a
(1) Reducing union tee adapter
(1) Piping adapter set
(2) Piping adapter l type
(4) Elbow union
(1) Elbow union
(1) Male elbow
(6) Union elbow
(8) Union elbow
(6) Union elbow
(8) Union elbow
(8) Reducing union elbow
(1) Quick connector socket
(1) Male branch tee
(1) Plug
(13) Plug
(12) Plug, seal retainer, w.r.
(2) Union
(1) Reducing union
(8) Half union
(1) Tube flange
(1) Flange (1), bellows
(1) Flange (2) bellows
(1) Air operated valve
(1) Air operated valve
(1) Block manifold (l)
(4) Speed control
(3) Regulator
(2) Regulator
(4) Block (2)
(1) Chuck arm (1)
(1) Chuck arm (2)
(1) Arm, ur
(2) Guide (1)
(1) Front cover (upper) 300
(1) Protector frame (l1)
(1) Bearing cover
(1) Belt cover
(1) Cable cover
(1) Cover, arm, ur
(2) Collar, brg (d10x5), rol.
(2) Collar, brg (d19x5), rol.
(1) Collar
(1) Collar, roll
(1) Collar, spd
(1) Cap
(1) Sco cap
(1) Bearing clamp
(1) Connector clamp
(3) Tube, clamp, drain
(1) Bearing case (1)
(1) Bearing case (2)
(1) Case, center nozzle, ur
(4) Chuck piece
(4) Saddle, tube and cable, catm
(3) Saddle, tube, arm
(2) Support, center nozzle, roll
(1) Pipe support (l)
(3) Hose support, chem
(2) Sco shim
(2) Sco shim
(2) Sco shim
(2) Sco shim
(1) Bellows, upper roll
(1) Block stage
(2) Stopper
(1) Plate, washer, arm
(4) Daistad
(1) Table assy
(1) Drain pan (j)
(2) Dry hand (1) 300
(1) Bracket
(1) Bracket (1) r
(3) Bracket (1)
(2) Weight case bracket
(1) Shaft bracket, ur
(1) Flange, seal, roll
(1) Motor bracket
(1) D/r plate
(2) Seal plate l1
(1) Seal plate l2-r
(1) Seal plate l2-l
(1) Plate, chem
(1) Sco plate
(1) Rod block
(1) Pipe block
(1) Base, loadcell, ur
(2) Holder, center nozzle, roll
(1) Holder (1), motor bracket
(4) Tube holder chem
(2) Holder, cable, arm
(1) Holder, seal, roll
(1) Rod end
(3) Sp washer
(1) Drive center
(2) Clip (ar19)
(2) Clip (wr10)
(6) Joiner set
(1) Pivot channel
(1) Screw, cleaning arm (d)
(1) Screw, cleaning arm (c)
(1) Tvme 3903v
(1) Tvme 3902v
(2) Uniwire board
(1) Amplifier
(1) Driver, sgdm-01bda
(1) Vacuum sensor amp
(1) Driver, sgdm-08ada
(1) Ac servo
(2) Controller mc001-tk
(1) Pressure sensor
(1) Fiber unit
(1) Power unit, digital epw-002
(1) Driver, asd13c-a
(1) Driver, asd13c-a
(2) Driver, asd13a-a
(1) Ac servo motor
(1) Ac servo motor
(1) Uni wire end unit
(1) Digital pressure monitor
(1) Load cell
(1) Flow meter
(1) Power terminal
(2) D/a converter
(1) Sticker
(1) Sticker
(2) Lamp, fluorescent, polisher
(1) Lamp, fluorescent, mini enviornment
(2) Glow lamp igniter
(2) Lamp, fluorescent, cleaner
Pins and connectors:
(100) / Connector pins (m) awg 26-20
(100) / Connector pins (m) awg 20-16
(100) / Connector pins (f) awg 26-20
(100) / Connector pins (f) awg 20-16
(20) 2 Pins, receptacle, elr-02v
(16) 3 Pins, receptacle, elr-03v
(20) 4 Pins, receptacle,elr-04v
(6) 6 Pins, receptacle, elr-06v
(24) 2 Pins, receptacle, elp-02v
(16) 3 Pins, receptacle, elp-03v
(20) 4 Pins, receptacle,elp-04v
(6) 6 Pins, receptacle, elp-06v.
EBARA Frex 300是一种自动化晶圆研磨、研磨和抛光设备，用于完成和抛光半导体晶圆。它旨在提供高精度和重复性，适合用于研发实验室。EBARA FREX-300是一种精密的平板晶片研磨抛光机.它有一个从0-45度成角度的平整工件床，使样品可以根据其大小水平或垂直处理。该机还采用独特的两位双微研磨/抛光板系统，以确保均匀和均匀的加工。它还具有数字控制的原位样品支架，以防止样品在加工过程中运动。F-REX300是为灵活、安全、准确的操作而设计的。它总共配备了10种工艺参数的控制功能，包括研磨、研磨、抛光。此外，该单元连接到数据处理平台，用于数据采集和分析过程中的性能参数。EBARA F-REX300还有一个全自动的样品处理机，它是整个机器的组成部分。它有一个计算机控制的可移动装载机，允许样品在最小的监督和用户干预下从机器上装卸。还提供了一个样品运输工具，用于将晶片往返装载机。FREX-300设计为提供可靠的结果，最大粗糙度偏差为1 µm，以确保表面各向同性抛光。它可以加工各种不同的材料，不同的抛光规格，从光磨到高光泽抛光。而且，F-REX 300可以很容易地整合到标准晶圆处理系统上，例如金刚石抛光或蚀刻。这使其成为研发和生产环境的理想解决方桉。EBARA还为机器提供生命周期和维护服务,确保Frex 300保持最佳服务。
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