二手 IPEC / WESTECH / SPEEDFAM 372M #155037 待售

ILD CMP Oxide/Poly Silicon/STI systems, 8" Specifications: Model 372 polisher mainframe Novascan Model 210 thickness measurement system 32 bit Hardware Upgrade (Adtron Thincard system) SECS I / II Host Computer Interface Floppy Drive Printer / Terminal Interface Software Software-Controlled Process Variables with Hi/Low Limits Dual Sensor Loadcup SFI Load Station Sensor RFK Gaard Arm pad conditioner 7.5 hp Final Platen Drive System 750 lb. Down-Force Polisher Arm Closed-Loop Load Cell Down-Force Control High-Pressure Primary Polish Station TUFRAM-Coated Platen, 60 psi rating Final Polish Station TUFRAM-Coated Platen 1000 mL Flow Slurry Pumps (2 Primary - 2 Final) Wafer Carrier Speeds (10-125 rpm) Platen Speed (10-175 rpm) Head Clean Station Quick-Dump Rinse Unit Clean Station Float Sensor Capacitance Level Sensor for Polish Tub Slurry Manifold - BECO Valves DI Manifold - BECO Valves PRi compatible environmental hood Moisture Sensor in Fluids Cabinet and System Base Interfaced Process Chilled Water Temp Gauges and Flow Meters Fluids Cabinet Exhaust AWN Interface - Underneath Mushroom-style Emergency Machine Off (EMO) Buttons Electrical Cabinet Heat-treated wood Currently barrier bagged and crated.