二手 PETER WOLTERS / LAPMASTER microLine AC 2000-P2 #9352424 待售
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ID: 9352424
晶圆大小: 12"
优质的: 2007
Double side polishing machine, 12"
Wheel dimensions:
Outer: 1935 mm
Ring width: 686 mm
Thickness: 80 mm
Wheel distance: 190 mm With 80 mm wheel thickness
Pneumatic:
Maximum load pressure: 3500 daN
Compressed air: 6,5 Bar
Electronic equipment:
Servo drives digitally controller
Upper wheel: 46 kW/40 min⁻¹
Lower wheel: 46 kW/40 min⁻¹
Inner workpiece drive: 7,5 kW/min⁻¹
Outer workpiece drive: 7,5 kW/min⁻¹
Hold the drive aggregates for lower working wheel and workpiece drive
Electromechanical height adjustment for outer and inner pin ring
Splash guard pan
Assembly connections for easy access
Pneumatic load control
Interception device
Weighting device
Drives
Working wheels
Safety device
Corrosion resistant design
Electric switch cabinet (Air cooled)
CNC Controller
Operating panel
Polishing media connection and metering
Slurry distribution system
Polishing media collecting channel
Tool kit
Basical range of CNC control S7-400 with visualization
Pressure control via proportional valve and pressure sensor
Display of the actual pressure value
13-Pressure ranges
Variable speed of rotation change in each pressure range of each drive
Variable change of rotation direction
Automatic swiveling in / out
5-Conditioning program with recorded inception height
Alternative list for selective programming functions:
Swiveling device
Starting of the drives
Feeding of the polishing media
Wet mode
0020: Brush program
0030: Cooling water temperature monitoring
0040: Rinsing and spraying device (Chemical polishing)
0050: Spraying device
0060: Levelling device for horizontal adjustment of the upper working wheel
0070: Epicyclic work holder drive system
0080: (2) Polishing wheels
0090: Back up
Options:
0100: Power backup
0110: Polishing compound connection
0120: Cable identification
0130: Mixing block
0140: Taiwan electrics
Electrics: 460 V
UPS: 230 V
0150: Packing
0160: Commissioning
0170: Status light
0180: Loading counter
0190: Second hand operation station
0200: Shower guns for DI- Water
0210: (2) Heating / Cooling aggregate (WRK) 12760 W
0220: Heating / Cooling aggregate Heating possibility up to 55°C
0230: Fittings for cooling water circulation system with refrigeration unit
0240: 6-Step polishing program
0260: Fiberglas cable
0270: Separate drive security
0290: Signal tower with LED
0300: Indication of signal tower
0310: Upgrades
0320: 80-Polishing feed holes
0330: Anti-syphoning package
0340: Measuring device (Flatness)
0350: Distance block set
0360: Steel straight edge, 2000-0 mm
0370: Additional cable length
0380: Engineering costs
0390: PDR System
Power supply: 400 V + 6%-10% (Acc. DIN IEC 38)
Frequency: 50 Hz
Control voltage: 203 V / 24 VDC
2007 vintage.
PETER WOLTERS/LAPMASTER microLine AC 2000-P2是一种先进的晶圆研磨、研磨和抛光设备,用于多面、全自动晶圆加工。它提供了高度精确和均匀的大小不超过200毫米的大小晶片的制造。该系统采用先进的计算机控制机器人加载和定向装置。这台机器被设计成精确而一致地将晶片放置在研磨和抛光卷上的精确位置。高精度研磨/抛光磨辊安装在旋转卡盘中,以进行精确的角度调整,从而可以对晶圆进行非常精细的研磨和抛光。该工具使用精密金刚石磨料将晶片抛光至尽可能高的公差。它为平面和曲面提供了出色的表面光洁度和精度。机械研磨过程与计算机控制的资产相结合,保证了可重复的结果。该模型还配备了先进的晶圆测绘设备,以确保一致、精确的结果。晶圆映射系统采用精密激光传感器和3D激光扫描仪。激光扫描仪从晶片上收集数据点,以创建晶片表面的详细地形图。这些数据被送入机器人单元,以准确定位和固定晶片进行研磨和抛光。LAPMASTER microLine AC 2000-P2还配备了高级后处理机。此工具自动收集和存储最终研磨和抛光过程中的数据点,以确保可重复的结果。后处理资产还可以清除成品晶片中的任何毛刺、凹痕或其他缺陷。PETER WOLTERS microLine AC 2000-P2专为长期运行而设计,可轻松集成到现有晶圆处理系统中。它能够处理直径达200毫米的晶片,并在晶片研磨、研磨和抛光操作方面提供优异的效果。
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