二手 PETER WOLTERS / LAPMASTER microLine AC 2000-P2 #9352425 待售

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ID: 9352425
晶圆大小: 12"
优质的: 2007
Double side polishing machine, 12" Wheel dimensions: Outer: 1935 mm Ring width: 686 mm Thickness: 80 mm Wheel distance: 190 mm With 80 mm wheel thickness Pneumatic: Maximum load pressure: 3500 daN Compressed air: 6,5 Bar Electronic equipment: Servo drives digitally controller Upper wheel: 46 kW/40 min⁻¹ Lower wheel: 46 kW/40 min⁻¹ Inner workpiece drive: 7,5 kW/min⁻¹ Outer workpiece drive: 7,5 kW/min⁻¹ Hold the drive aggregates for lower working wheel and workpiece drive Electromechanical height adjustment for outer and inner pin ring Splash guard pan Assembly connections for easy access Pneumatic load control Interception device Weighting device Drives Working wheels Safety device Corrosion resistant design Electric switch cabinet (Air cooled) CNC Controller Operating panel Polishing media connection and metering Slurry distribution system Polishing media collecting channel Tool kit Basical range of CNC Control S7-400 With visualization Pressure control via proportional valve and pressure sensor Display of the actual pressure value 13-Pressure ranges Variable speed of rotation change in each pressure range of each drive Variable change of rotation direction Automatic swiveling in / out 5-Conditioning program with recorded inception heights Alternative list for selective programming functions: Swiveling device Starting of the drives Feeding of the polishing media Wet mode 0020: Brush program 0030: Cooling water temperature monitoring 0040: Rinsing and spraying device (Chemical polishing) 0050: Spraying device 0060: Levelling device for horizontal adjustment of the upper working wheel 0070: Epicyclic work holder drive system 0080: (2) Polishing wheels 0090: Back up Options: 0100: Power backup 0110: Polishing compound connection 0120: Cable identification 0130: Mixing block 0140: Taiwan electrics Electrics: 460 V UPS: 230 V 0150: Packing 0160: Commissioning 0170: Status light 0180: Loading counter 0190: Second hand operation station 0200: Shower guns for DI- Water 0210: (2) Heating / Cooling aggregate (WRK) 12760 W 0220: Heating / Cooling aggregate Heating possibility up to 55°C 0230: Fittings for cooling water circulation system with refrigeration unit 0240: 6-Step polishing program 0260: Fiberglas cable 0270: Separate drive security 0290: Signal tower with LED 0300: Indication of signal tower 0310: Upgrades 0320: 80-Polishing feed holes 0330: Anti-syphoning package 0340: Measuring device (Flatness) 0350: Distance block set 0360: Steel straight edge, 2000-0 mm 0370: Additional cable length 0380: Engineering costs 0390: PDR System Power supply: 400 V + 6%-10% (Acc. DIN IEC 38) Frequency: 50 Hz Control voltage: 203 V / 24 VDC 2007 vintage.
LAPMASTER AC 2000-P2是一种用于半导体晶片的晶片研磨、研磨和抛光设备。它是一种精密仪器,具有计算机化控制器、模块化无错误主轴传动装置以及多种优质磨料和快速更换安装在工业级花岗岩基座上。该系统设计处理200-300毫米晶圆研磨,精度和重复性最高。交流2000-P2采用两阶段研磨和抛光工艺。每个阶段分为两个部分:第一阶段由一个安装站、一个晶圆夹板和一个坚固的研磨轮组成。第二阶段采用不同的研磨轮,具有抛光垫支架和粗细的研磨剂。这两个阶段都包括变速调整,允许操作员根据需要增加或降低速度。交流2000-P2还设有计算机化控制器,为操作员提供详细数据,包括运行时间、进程设置、自动关闭和机器状态指示灯。控制器极具弹性,可以接受广泛的输入选择选项,例如手动、半自动和全自动模式。该单元还提供压力、滑移和振动极限调节等可调节参数,以确保最高的工艺精度。该机还有一个集成的除尘工具。空气叶片清除产生的磨料灰尘,同时将其放置在机器外部。尘埃收集网也有可调的设置,以满足最严格的颗粒要求。PETER WOLTERS AC 2000-P2配备了可提供高精度操作的模块化无错误主轴驱动器。这种精密的设计结合了人体工程学和交流电机技术的原理,提供了可靠和安全的操作。资产还包括各种可选模块,例如用于晶圆夹紧和超压控制的空气单元,以及高精度的振动保护模型。这些特性使得PETER WOLTERS/LAPMASTER AC 2000-P2一种高精度晶片量产的理想机器。其精密的工程设计和灵活性提供了真正的"一体"设备,能够研磨、抛光、吹风以及生产过程中所需的任何其他改进。系统的控制器使操作员能够完全控制过程,从而实现卓越的过程质量。交流2000-P2是寻找制造半导体晶片的可靠装置的生产商的理想选择。
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