二手 KENSINGTON CSMT-2 #9078951 待售
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ID: 9078951
Station Sorting/Mapping Tool System, 6"
Wafer Handling robot with Dual Paddle for High Throughput
Advanced Cassette Sort Merge/Randomize/Split Capability
Cassette Tilt Scanning/Mapping System with Transmissive Metrology
Measures Actual Wafer Positions in Cassettes
Detects Two-wafers-in-a-slot & Cross slotted wafers
Wafers Handled through slot center for minimal contamination and gentle handling
High Speed, High Resolution Prealigner
Foresight OCR Recognition System
OS/2 Operating System with Touch Screen Color Display: Pentium PC
User Friendly Graphical Interface for all operations and Recipe Generation
Ergonomic Stainless-Steel Frame
Better that Class-1 Clean Room Compatibility
Fail-Safe, Integrated Vacuum/Motion Controllers (Kensington Model 4000)
Automatic Error-Condition Recovery
Smooth, Digitally-controlled DC Servo Actuation of all axes
Direct Motion Metrology of all axes: Fully Distributed Force/Position Feedback Sensing
Automatic Tilt-Back locates Wafers against back of cassette: prevents migration
90° Tilt-Back Cassette Loading/Unloading addresses Carpel Tunnel Syndrome Concerns
Colored Light System Status Beacon
Un-interruptible Power Supply/Back-up Vacuum (UPS/BUV) System. 110VAC AC 50/60 Hz
Automatically Unloads all wafers safely into their cassettes on total loss of power
Keyboard Drawer
Mirror-Bright #8 Electro-polished Laminar Flow Frame Top
X-Windows Software
Installation and on-site support
System Options:
GEMS/SECS-II Interface
Intel Ether Express W/TCPIP or HSMS.
KENSINGTON CSMT-2是一种晶片处理设备,旨在为处理高温敏感晶片提供高性能、经济高效的解决方桉。它是一个自动化晶圆处理程序,具有集成的石墨结构,简化晶圆处理和热传递。CSMT-2的主要特点包括其自动晶圆索引和移动设备、用于热传输的集成石墨块以及直观的触摸屏界面。KENSINGTON CSMT-2具有自动晶圆索引和移动系统,可方便地在各个阶段之间进行索引和移动。这使得晶片能够精确且可重复地定位到石墨块的中心,从而实现热能的高效传递。晶圆处理程序的内置热管理和控制单元消除了晶圆加工对外部冷却系统的需求。集成石墨块具有非接触式热传递机构,可确保最佳温度均匀性。这样就不需要接触棒或热电偶,提高了工艺可靠性,降低了污染风险。石墨块还能防止热漂移,确保加热的晶片在更一致的加工环境中保持温度。CSMT-2直观的触摸屏界面简化了晶圆处理和热传输设置。它允许用户为晶圆处理参数选择所需的温度、速度和时序。这个用户友好的界面确保了准确和可重复的晶圆处理结果,优化生产贯穿始终。此外,KENSINGTON CSMT-2还具有内置的安全功能,如自动关闭、过温警报和紧急停止按钮,确保操作员和设备免受潜在危害。它也是一个低维护设备,得益于其坚固的结构和耐腐蚀的部件。CSMT-2是一种自动化晶片处理程序,旨在为处理高温敏感晶片提供高性能、经济高效的解决方桉。它的特点,如自动晶片索引和移动机、集成的石墨块、直观的触摸屏界面以及内置的安全特性,使得它特别适合高温敏感晶片的可靠准确的处理。
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