二手 KENSINGTON CSMT-4 #9078959 待售

KENSINGTON CSMT-4
ID: 9078959
晶圆大小: 6"
Station Sorting/Mapping Tool System, 6" Wafer Handling robot with Dual Paddle for High Throughput Advanced Cassette Sort Merge/Randomize/Split Capability Cassette Tilt Scanning/Mapping System with Transmissive Metrology Measures Actual Wafer Positions in Cassettes Detects Two-wafers-in-a-slot & Cross slotted wafers Wafers Handled through slot center for minimal contamination and gentle handling High Speed, High Resolution Prealigner Foresight OCR Recognition System OS/2 Operating System with Touch Screen Color Display: Pentium PC User Friendly Graphical Interface for all operations and Recipe Generation Ergonomic Stainless-Steel Frame Better that Class-1 Clean Room Compatibility Fail-Safe, Integrated Vacuum/Motion Controllers (Kensington Model 4000) Automatic Error-Condition Recovery Smooth, Digitally-controlled DC Servo Actuation of all axes Direct Motion Metrology of all axes: Fully Distributed Force/Position Feedback Sensing Automatic Tilt-Back locates Wafers against back of cassette: prevents migration 90° Tilt-Back Cassette Loading/Unloading addresses Carpel Tunnel Syndrome Concerns Colored Light System Status Beacon Un-interruptible Power Supply/Back-up Vacuum (UPS/BUV) System. 110VAC AC 50/60 Hz Automatically Unloads all wafers safely into their cassettes on total loss of power Keyboard Drawer Mirror-Bright #8 Electro-polished Laminar Flow Frame Top X-Windows Software Installation and on-site support System Options: GEMS/SECS-II Interface Intel Ether Express W/TCPIP or HSMS.
KENSINGTON CSMT-4是一款先进的自动化晶片处理机,专为半导体工业大批量生产300毫米硅片而设计。处理程序能够携带多达四(4)个晶片,并将它们装入化学气相沉积(CVD)设备或工艺室。它包括一个机器人手臂,从盒式磁带中拾取晶片并将其放入处理系统。处理程序还包含一个真空单元,用于处理过程周期中的晶片。CSMT-4晶片处理程序提供了许多功能,使其成为自动化晶片处理的可靠且通用的工具。其先进的机器人手臂允许高定位精度和流畅、精确的运动,使其能够容纳各种各样的晶圆尺寸。真空机器的设计目的是确保晶片在一个过程周期中保持稳固的位置,从而消除晶片因空气湍流或振动而破裂的可能性。检测工具可以自动检测晶圆的大小,提供实时反馈和准确的位置信息,即使对于大晶圆尺寸也是如此。处理程序还具有易于访问的盖,以便更简单的维护和检查,而无需工具或拆卸机器人手臂。集成控制资产允许存储和执行过程程序,而无需指示机器人手臂。还有一个集成的安全防护和联锁模型,提供对机器内部部件的完整保护,使其在工业环境中使用安全。KENSINGTON CSMT-4是一款经过验证、可靠的自动化晶片处理器,旨在满足半导体生产行业的最高生产和性能要求。它为处理和处理硅片提供了可靠、安全和经济的解决方桉,具有很高的位置精度和最少的人工干预。该处理程序能够容纳各种各样的晶圆尺寸和工艺周期,使其成为大批量生产和提高工艺效率的可靠解决方桉。
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