二手 KENSINGTON CSMT-4 #9078960 待售
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ID: 9078960
晶圆大小: 8"
Station Sorting/Mapping Tool System, 8"
Wafer Handling robot with Dual Paddle for High Throughput
Advanced Cassette Sort Merge/Randomize/Split Capability
Cassette Tilt Scanning/Mapping System with Transmissive Metrology
Measures Actual Wafer Positions in Cassettes
Detects Two-wafers-in-a-slot & Cross slotted wafers
Wafers Handled through slot center for minimal contamination and gentle handling
High Speed, High Resolution Prealigner
Foresight OCR Recognition System
OS/2 Operating System with Touch Screen Color Display: Pentium PC
User Friendly Graphical Interface for all operations and Recipe Generation
Ergonomic Stainless-Steel Frame
Better that Class-1 Clean Room Compatibility
Fail-Safe, Integrated Vacuum/Motion Controllers (Kensington Model 4000)
Automatic Error-Condition Recovery
Smooth, Digitally-controlled DC Servo Actuation of all axes
Direct Motion Metrology of all axes: Fully Distributed Force/Position Feedback Sensing
Automatic Tilt-Back locates Wafers against back of cassette: prevents migration
90° Tilt-Back Cassette Loading/Unloading addresses Carpel Tunnel Syndrome Concerns
Colored Light System Status Beacon
Un-interruptible Power Supply/Back-up Vacuum (UPS/BUV) System. 110VAC AC 50/60 Hz
Automatically Unloads all wafers safely into their cassettes on total loss of power
Keyboard Drawer
Mirror-Bright #8 Electro-polished Laminar Flow Frame Top
X-Windows Software
Installation and on-site support
System Options:
GEMS/SECS-II Interface
Intel Ether Express W/TCPIP or HSMS.
KENSINGTON CSMT-4是一种晶片处理程序,设计用于加工室和晶片盒式磁带之间的手动交换。它采用四轴步进电机控制,可实现精确、干净的手动晶片处理。CSMT-4适用于精确的晶片处理,并具有多种功能,可满足各种晶片制造和测试需求。KENSINGTON CSMT-4采用灵活的结构设计,允许使用范围从2英寸到8英寸的晶圆。该单元还支持允许每个腔室中最大数量晶圆的高密度盒式吊舱设计。该单元配备了精密步进电机,为精密晶圆处理和对准提供了卓越的精度。该单元还提供基于运动学的预对准设备和获得专利的偏心齿轮控制,以减少颤抖运动。CSMT-4的自动晶片对准、优化的自动对准(适用于无与伦比的吞吐量和性能)提供了简单快捷的设置。该装置配有视觉系统,可确保晶圆与加工站精确对准。KENSINGTON CSMT-4设计用于处理6"至8"晶圆,最大重量容量为80g/晶圆。它还能够同时处理单个晶片和盒式磁带加载,从而实现最大的灵活性和可靠性。设备配备了七位代码,可确保从PC到控制器的可靠数据传输。安全是CSMT-4的优先事项。它设计为用户友好,具有简单的控件和直观的用户界面。该装置还具有降低晶圆断裂的真空收缩和气袋晶圆翻转臂等安全特性。该单位还配备了一个综合安全单位,用于监测和报告检测到的任何故障操作。KENSINGTON CSMT-4专为高效使用而设计。其用户友好的界面和高级功能使其易于操作和维护。该单元还提供了广泛的选项,如晶圆测量机、气体监测单元和集成晶圆位置跟踪工具。此外,它采用模块化设计,可以在客户需要时轻松调整和升级。总体而言,CSMT-4是一个可靠和高效的晶片处理程序,设计用于在加工室和晶片盒之间手动交换晶片。它提供了广泛的功能,包括精确的晶片处理、自动晶片对齐、视觉资产和安全功能,以实现最大程度的保护。该单元还易于设置和维护,使其成为各种晶圆制造和测试需求的理想选择。
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