二手 ASML PAS 2500 / 30 #9043931 待售

Stepper, 5" Operator training: No PEP 2 (Color Graphics): No PEP 1/3/4: Yes SECS (I/II): No SECS Job creator: No Single reticle SMIF: No Matching manager: No Extended file system (MEP): No Focus enhancement package: Yes Line scan: Yes Dose control: No Reticle error correction: No Throughput enhancement: Yes Batch status light: Yes Reticle carrier identification: No Extended power supply: No 88 um Error detection: No RICO Verification: No Chuck spot detection: No Wafer track interface: Yes Wafer tilt monitor: No Mechanical / Electrical / Options: Interface: SVG 88 Stamp drive type: TEP Stamp foot type: Clean Stamp POU filter: No Cyber: SSSD Air shower (OEPS): Yes P-Chuck: MIII P-Chuck top flat finder: No Microscope: Fixed Lamp HG: 450W Alignment PCBD : 4022.436.24720 Analog PCBD in VME: Yes HDD: Solid state TCU: No HCU: No Ionizer: No Box 1: KAY Box 2: KAY Box 3: KAY Box 4: KAY Box 5: KAY Software: 8.1.0 Optical performance: Uniformity: 2.7 Matching X magnification: 252 Matching Y magnification: 191 UDOF @ 0.7 Micron status Q4-2008: 2.7 Astigmatism noticed: No Focus stability: No.