二手 ASML PAS 2500 / 40 #138919 待售

Stepper, 5" Operator training: No PEP 2 (Color graphics): Yes PEP 1/3/4: No SECS (I/II): No SECS Job creator: No Single reticle SMIF: No Matching manager: No Extended file system (MEP): No Focus enhancement package: No Line scan: No Dose control: No Reticle error correction: No Throughput enhancement: No Batch status light: No Reticle carrier identification: No Extended power supply: No 88 um error detection: No RICO Verification: No Chuck spot detection: No Wafer track interface: Yes Wafer tilt monitor: Yes Mechanical / electrical / options: Interface: SVG 88 Stamp drive type: Non Stamp foot type: Clean Stamp POU filter: Yes Cyber: SSSD Air shower (OEPS): No P-Chuck: MIII P-Chuck top flat finder: No Microscope: Adjustable Lamp HG: 450W Alignment PCBD: 4022.430.00900 Analog PCBD in VME: MIOS1 HDD: Solid state TCU: No HCU: No Ionizer: No Box 1: FESTO Box 2: FESTO Box 3: FESTO Box 4: FESTO Box 5: FESTO Software: 8.1.0 Optical performance: Uniformity: 2.5 Matching X magnification: 168 Matching Y magnification: 176 UDOF @ 0.7 micron status Q4-2008: 2.4 Astigmatism noticed: No Focus stability: Yes Currently de-installed.