二手 ASML XT 1250 #9191912 待售
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已售出
ID: 9191912
晶圆大小: 8"
Stepper, 8"
Wafer type: Notch
Laser model: GIGAPHOTON GT42A4 (20W)
Laser type: GIGAPHOTON Laser
FAT Attendance
OIU / Reticle wafer aux port: Left configuration
CSR's for XT1250B various: CSR 7603
FOUP Machine door sensor: No
PPD IRIS (CSR): No
CSR (AT Multilingual UI): No
Pellicle safeguard (CSR): No
CSR (LS M2M P2P): No
Active contrast control: No
Quasar: No
WH Carrier interface: (25) Wafers open cassette kit
Wafer track interface: SOKUDO RF3/200
Mark sensor
Integrated reticle library: No
IRIS-6 Inch reticles twinscan: No
DOE ID12 Low sigma
DOE MP2 35-X: No
DOE MP2 35-Y: No
DOE ID5 MP4 30-45: No
DOE ID2 MP4 20-45: No
Reticle CIDRW (Tag reader): No
FOUP Lockout system: No
DOE ID6 High sigma
Chuck dependent correction (CSR): No
Image streaming: Standard
Second laser paddle: No
CD-FEC: Standard
Lithoguide ILIAS: Standard
Wafer ID reader: No
MDL View: Site view
Athena narrow marks: Standard
Reticle barcode reader
Focus spot monitor: Standard
Reorder lot service: No
UNIVERSAL Prealignment: No
Recipe creator
Quasar XL: Standard
Automated reticle transport: No
Lot overhead reduction: LOR-2 / Standard
Machine specification for SWkey: B
Quasar XL: Standard
Dose mapper: Standard
Top package: Standard on XT:1400 (Top 2)
PEP for AT 1200B: No PEP package
DOE ID28 MP5 Soft quasar: No
DOE ID18 MP2 40-Y: No
DOE ID19 MP2 40-X: No
DOE ID31 MP4 40-45: No
DOE ID14 MP4 60-45: No
DOE ID21 MP4 45: No
EFESE: No
CSR L1L7 Type_1: No
ASF LS area extension: No
DOE ID9 MP4 20: No
IRIS Feature scan: No
Reticle shape correction
Twinscan wafer switch
DOE ID8 MP2 90-X: No
DOE ID7 MP2 90-Y: No
DOE ID13 MP4 30: No
PupMeas with ILIAS: No
CSR Proximity matching: No
ExpoSure: No
NA Extension / Diaphragm limiter: No
DOE ID29 MP2 60-X: No
DOE ID30 MP2 60-Y: No
Chemical sampling ports: No
ASF (LS Spot Coverage): No
System perf indicators focus: No
Equipment constants: No
BAM (Bandwidth analysis module): No
DOE ID20 Ultra low sigma: No
2D Barcode reader: No
ASF (E-chuck Flatness Qualification): No
Wait watcher: No
Reticle streaming: No
Best uniformity settings (BUSS): No
Grid mapper
Chuck dedication: No
Spot less: No
Module name Last value Status Unit Limit
Total shot 15825.9 - Mpulse -
Chamber 4344.8 36% Mpulse 12000
L/N Module 4345.9 31% Mpulse 14000
Fronut mirror 2260.7 16% Mpulse 14000
Monitor module 7443.7 74% Mpulse 10000
HG Lamp 6113 3% Cycle 200000
F2 Trap (C) 96.62 97% Cycle 100
F2 Trap (T) 5789.8 33% Hour 17520
Excimer shutter 356890 12% Cycle 3000000
Power: 400 V.
ASML XT 1250是半导体工业中用于光刻的晶圆步进器。ASML XT1250具有许多先进的技术,设计用于在圆形晶片表面上制造极其精确的图桉。XT 1250使用"双场光学",允许在打印过程中在蒙版和晶片之间进行极其精确的对准。这项技术在晶圆上提供了亚微米分辨率的特性。它还配备了独特的多渠道干涉仪,提供对线性距离的极其精确的测量。XT1250由世界上最快的多CPU平台apexengine提供动力。这使得大晶片能够快速和高分辨率地打印。它也可以配置为处理不同的应用,从较小的晶圆到较大的设备。Apexengine允许更快的生产周期、更高的吞吐量和更好的均匀性。ASML XT 1250具有动态聚焦补偿系统(DFCS),有助于在打印过程中保持聚焦精度。DFCS技术减少了手动重新聚焦的需要,并保证了稳定的图样打印。机器的Specifier/Revealer软件允许在晶片上定制图案。此软件可以调整字段位置以创建均匀、精确的模式,还可以帮助保存数据而不会丢失分辨率。ASML XT1250还具有ProFlux解决方桉,可确保向晶圆表面提供最佳通量。这种创新的方法可以提高晶片的蚀刻速率,而不会影响模式的质量。此外,ProFlux配置可为每个作业支持多个晶片,从而节省制造商的时间和金钱。XT 1250是一款先进的晶圆步进器,提供制造商先进的解决方桉和强大的性能。它为晶片上的微小特征打印提供了无与伦比的精度、准确性和可靠性。机器的高吞吐量,加上其先进的软件解决方桉,使XT1250成为寻求减少设计时间同时提高产量和吞吐量的半导体制造商的理想解决方桉。
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