二手 CANON FPA 2000 i1 #9134789 待售

Stepper, 6" Wafer type: semi flat Wafer chuck type: LC ring chuck Track interface: DNS Auto-feeder (in-line direction): Left, Type 2 Altitude: X m Signal tower: yes CE mark (Europe): yes Edge beam removal: no Reticle changer: Reticle size: 5", type 2 with 14 slots Reticle bar code reader: yes Library slot number: 14 Workstation: Workstation model: HP1000 Software: Main software version: V5.25B Gem software version: SECS Facility requirements: Main electrical supply: 3 Phase, 415 VAC Exhaust 1x Heat exhaust for chamber 2x Control rack (Setting 0.5 inc to 2 inc H2O) CDA Supply: 3X 100psi Cooling water supply: cooling Water in (pressure=1to5 kg/cm2) Vacuum: 3X vacuum setting ≤ 550 mm Hg Drain: 1X drain for chamber aircodition system Chamber: Chamber type: TBW-CD-50W Wafer feeding unit: Type of wafer feeding unit: Type II Wafer size: 6" Carriers: double carriers Flat/notch finder: flat Method: non-edge contact, back side holding XY stage: 6" sliding stage Tilt stage: yes Reticle changer system: Type II with 14 slots Size: 5" Reticle Reticle alignment system: TV image processing with FRA2 mark Alignment source: g-line HeCd laser: No Auto wafer alignment system: Auto alignment source: HeNe Laser (1 for X, 1 for Y) Method: through the len off axis auto alignment Mode: die and die and AGA Projection lens: Magnification: X 1/5 Numerical aperture: 0.55 Illumintor: Light source: 1 KW Hg Lamp Exposure time control: light integrator Masking function: variable with 4 independent masking blades Auto focus: Method: optical auto focus Other: auto compensation for barometric pressure change Mechanical prealignment: non-edge contact TV prealigment: TV image processing Monitor display: LCD.