二手 CANON FPA 3000 i4 #9224170 待售

i-Line stepper, 6" Reticle, 6" Main frame Lamp hose D-rack Transformer Lamp: 2 kW Field size: 22 mm² Reduction ratio: 5.1 Exposure wavelength: 365nm Lens performance: 0.63/0.65 Mode Resolution: 0.35um L/S Depth of focus: >0.7um FD: < 0.04 um Coma: < 4*-0.3 um Best focus / 5 Point Astigmatism: < 0.25 um Distortion: < 0.05 um Lens matching: < -/+ 0.11 um Lens heating magi: < 2 ppm Lens heating focus: <0.3 um Illumination performance: Intensity: > 6500 W/m² Uniformity: < 1.0% Light integrator accuracy: < 1.0% Masking accuracy: < +/- 100 um Focus & leveling: Static auto focus repeatability: 3Q < 0.10 um Die by die repeatability: 3Q < 7 ppm XY stage performance: Stepping accuracy: 3Q < 0.04 um Stepping repeatability: 3Q < 0.04 um Scaling: < 0.5 ppm Orthogonality: < 0.5 ppm Alignment: Reticle rotation: Accuracy: < 10 nm Repeatability: < 20 nm AGA Mode 1&2: Mean +3Q < 0.06 um Pre-alignment performance: Mechanical pre-alignment accuracy: 3Q < 0.03 um TV Pre-alignment accuracy: < 3 um Throughput: 6" (Die by die): >83 wph 8" (Die by die): >58 wph Known issues: OPTF Electrical fault 1997 vintage.