二手 CANON FPA 6000 ES6 #9217736 待售

KRF Scanner, 12" Main (PO Module) WS Module RS Module PSR WS Chuck Laser beam GIGA Laser CPSU Unit N2 Purge Control box Cover panel Wafer type: Notch Altitude: 59 m Wafer feeder: Right No inline unit No wafer temperature adjustment plate TEL / TOKYO ELECTRON Lithius Coater / Developer Wafer chuck, 12" LCP Orientation flat position: Standard Carrier unit, 12" Booth unit: SMIF Reticle changer: SMIF No laser delivery optics Excimer laser: GIGAPHOTON G41K3-1 Laser power cable unit: 20 m Front and rear console: Cover kit Right and left console: Attachment kit No connector cover unit MO Driver: Left / Right CPSU Cable: 15 m C-Rack power cable: 15 m C-Rack signal cable: 15 m No reticle cassette No signal tower Absolute intensity meter No additional library Reticle bar code reader, 6" No cassette bar code reader No pellicle particle checker High-precision N° turn pa parts No 440 test reticle Test reticle: 756 Additional built-in console No F47 kit No power cable unit No exhaust unit Exhaust duct unit: 5 m Axi SiA input lens Axi zoom SiB2 input lens Maintenance tool No mass flow chemical filter PO Module: WS Mount unit Scan OPTF5+ ULEX 06S OAS3B Wafer interferometer Chuck maintenance unit Reticle interferometer EX-A Scope FG Unit Illuminator Stage reference mark 2nd Stage reference: Mark left and right Illumination uniformity checker Chamber Upper control rack Lower control rack ALS12 Type 10 wafer feeder: PA / SH / RH Type 10 wafer feeder: SCH / INL Ground underground common unit Incoherent Manuals included Front / Side console: Touch screen USB Port Keyboard Mouse RS Module: Illumination system ZYGO 7714 R / S Side laser head RA Main body PRA Reticle scan stage PCB PO Module: U-Lens OAS (OA Scope) Scan OPTF Unit ZYGO 7714 W / S Side laser head Chuck maintenance unit WS Module: Wafer chuck type: Pin Wafer stage Booth 1: J-Box left / Right EWS Booth 2: Auto feeder: Inline relay: FOUP Unit Inline unit: WTC Open cassette SCH Robot Auto feeder-PSR: PA Unit RCV Station SH Hand RH Hand Reticle changer: R / C Type, 6" Cassette type: SMIF SMIF POD RTH Robot Reticle stocker Reticle stage Barcode reader PPC CE Marked Power supply: 208 V, 60 Hz 2004 vintage.