二手 GCA ALS I2235 #9247980 待售

Stepper Lens: TROPEL 2235 i-Line (365 nm): 0.35 NA Field size: 22 mm Automatic Wafer Handler (AWH): Cycle 25, 3"-8" Automatic level wafers RMS10: (10) Reticles, 5" Maxi 2000: i-Line light source idles: 1000 W AFS 100: Automatic Focusing System MicroDFAS: Measures local alignment system Corrects alignment prior to stepping SmartSet: Used to process and store data to match single / multiple steppers Insitu probe: Probe mounted stage and lens reduction Rotation & focus with alignment baseline IQ Probe: Lamp position and light source Accurate measure and correct dose Programmable Platen Control (PPC): Automatically adjust reticle load position Integrated Alignment System (IAS): Performs digital alignment of global target Environmental chamber 8860 Stepper With temperature & cleanliness Options: System resolution: 0.7 µm line / space Depth of focus: 1.5 µm Illumination uniformity: ±2.5 % Illumination intensity: >300 mW / cm² Open frame: No repeaters Reduction: ±0.1 µm Rotation: ≤0.05 µm Telecintricity: ≤1.5 ppm / µm Stepping repeatability: ≤0.15 µm Global alignment: ±0.3 µm Local alignment: ±0.2 µm RMS reliability: 100 Cycles Reticle blade accuracy: ±0.25 mm AWH Reliability: 100 Wafers AWH Accuracy: ±0.003” Leveling repeatability: ±5 ppm from nominal.