二手 GCA DSW 8500 #293639852 待售

i-Line stepper Illumination uniformity: <= 2.5% System resolution: 0.8 μm L/S Depth of focus: <= 1.25 μm Reduction: +/- 0.10 µm Rotation: <= 0.05 µm Telecentricity: +/- 0.25 ppm Global registration: +/- 0.25 µm T.I.R Local registration: +/- 0.15 µm T.I.R Open frame: No repeaters Orthogonality: +/- 1.0 ppm Stage precision: +/- 0.10 µm Wafer levelling repeatability: +/- 10 ppm Reticle aligner accuracy: <= 0.1 µm Aperture blade repeatability: +/- 0.25 mm Aperture blade skew: +/- 0.25 mm RMS Realiability: 30 Cycles AWH Precision: +/- 3.0 mils AWH Reliability: 50 wafers Focus repeatability: <= 0.30 µm T.I.R Reduction repeatability: <= 6.0 ppm T.I.R Optic: Lens specification: 1635-I Tropel Focal length: 86 Resolution: 0.8 µm Image field: 16 mm Wavelength: 365 mm E.P. Location: 439 mm Reduction: 1:5 Depth of focus: n+/- 0.75 µ.