二手 NIKON NSR 2005 i9C #293601909 待售

Stepper Resolution: ≤0.5 µm UDOF: ≥0.7 µm CD Uniformity: ≤50 nm Focus calibration repeatablity: 3σ, ≤0.1 µm Lens distortion: Within ±70 nm Maximum area: 20x20 mm Recticle blind setting accuracy: 0.4 to 0.8 mm Exposure power: ≥550 mW/cm² Integrated exposure control: Within ±1% Illumination uniformity: Within 3% Recticle rotation: Within 20 nm Array orthogonality: Within ±0.1 sec Stepping precision: 3σ, ≤70 nm Operation test success rate: 100% Wafer system success rate: 100% Focus stability: ≤0.6 µm Magnification error: Within 15nm Field curvature: ≤0.3 µm Chip levelling accuracy: Within ±1.5 sec.