二手 NIKON NSR 2205 i12D #293601857 待售

i-Line stepper Resolution: 0.35 µm UDOF: ≥ 0.6 µm CD Uniformity: ≤ 50 nm Focus calibration repeatability: 3 Sigma ≤ 0.1 µm Lens distortion: Within ±50 nm Maximum area: 22 x 22 mm Reticle blind setting accuracy: 0.4 to 0.8 mm Exposure power: ≥ 600 mW / cm² Integrated exposure control: Within ±1% Illumination uniformity: Within 1% Reticle rotation: Within 20 nm Absolute value Repeatability Overlay accuracy: ISA-EGA: 3 Sigma ≤ 65 nm FIA-EGA: 3 Sigma ≤ 65 nm Array orthogonality: Within ±0.1 sec Stepping precision: 3 Sigma ≤ 50 µm Operational test: 99.5% Success rate Wafer system: 100% Success rate Reticle Wafer pre alignment: 3 Sigma ≤ 15 µm Focus stability: ≤ 0.6 µm Magnification error: Within 15 nm Stepping rate: 27 sec Throughput: ISA-EGA: 25 min 25 sec / less FIA-EGA: 30 min 25 sec / less INC: ±0.35 µm Astigmatism total focus deviation 0.35 µm L and S: ≤ 0.3 µm Field curvature: ≤ 0.3 µm Chip leveling accuracy: Within ±1.5 sec.